公开(公告)号：JP2001135253A

公开(公告)日：2001-05-18

申请号：JP2000306128

申请日：2000-10-05

Applicant: AXCELIS TECH INC

Inventor： HORSKY THOMAS N ,  PEREL ALEXANDER STUART ,  LOIZIDES WILLIAM KEITH

IPC: H01J37/30 ,  H01J27/08 ,  H01J27/16 ,  H01J37/08 ,  H01J37/317

Abstract: PROBLEM TO BE SOLVED: To provide an ion source and ionizer that ionize decaborane sufficiently accurately and controllably. SOLUTION: This ion source 50 includes an evaporator 51, that accepts solid ion source material like decaborane, an ionizer 53 connected to the evaporator via a supply tube 62, and a heating medium 70 that heats the evaporator and supply tube to maintain the temperature of evaporated decarborane at an optimum value. The ionizer 53 is equipped with a main body, an ion chamber in which decarborane is ionized by an energy-emitting element that produce a plasma, an exit aperture through which an ion beam is extracted, and a cooling mechanism to lower temperature on the wall face of the ion chamber. The energy-emitting element functions at a low output level to prevent additional dissociation of decaborane molecules evaporated by the plasma itself, by minimizing the plasma density in the ion chamber.