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    Mems singulation process utilizing protective coating
    1.
    发明专利
    Mems singulation process utilizing protective coating 未知

    公开(公告)号：AU2002251828A1

    公开(公告)日：2002-08-12

    申请号：AU2002251828

    申请日：2002-01-22

    Applicant: AXSUN TECH INC

    Inventor： LE MINH VAN ,  WONG JO-EY

    IPC: B81C1/00 ,  G02B26/08 ,  H01L21/00 ,  H01L21/301 ,  H01L21/304 ,  G02B26/00

    Abstract: A process for singulating MOEMS optical devices from a precursor structure, in which the precursor structure comprises device material, having movable optical structures, and handle material, through which optical ports are formed to provide for optical access to the movable optical structures. The process comprises coating a frontside and a backside of the precursor structure with protection material. The precursor structure is then attached to a substrate such as dicing tape and the precursor structure separated into individual optical devices by a process, including die sawing. Thereafter, the optical devices are removed from the tape and the protection material removed from the optical devices.

    MEMS SINGULATION PROCESS UTILIZING PROTECTIVE COATING
    3.
    发明申请
    MEMS SINGULATION PROCESS UTILIZING PROTECTIVE COATING 审中-公开
    使用保护涂层的MEMS整合工艺

    公开(公告)号：WO02060811A2

    公开(公告)日：2002-08-08

    申请号：PCT/US0202348

    申请日：2002-01-22

    Applicant: AXSUN TECH INC ,  LE MINH VAN ,  WONG JO-EY

    Inventor： LE MINH VAN ,  WONG JO-EY

    IPC: B81C1/00 ,  G02B26/08 ,  H01L21/00 ,  H01L21/301 ,  G02B26/00

    CPC classification number: H01L21/67132 ,  B81C1/00896 ,  G02B26/0841 ,  H01L21/67092

    Abstract: A process for singulating MOEMS optical devices (10) from a precursor structure (110), in which the precursor structure (110) comprises device material (12), having movable optical structures (14), and handle material (22), through which optical ports (30) are formed to provide for optical access to the movable optical structures (14). The process comprises coating a frontside and a backside of the precursor structure (110) with protection material (610). The precursor structure (110) is then attached to a substrate such as dicing tape and the precursor structure (110) separated into individual optical devices (10) by a process, including die sawing. Thereafter, the optical devices (10) are removed from the tape and the protection material (610) removed from the optical devices (10).

    Abstract translation: 一种用于从前体结构（110）分离MOEMS光学器件（10）的方法，其中前体结构（110）包括器件材料（12），具有可移动的光学结构（14）和手柄材料（22） 光端口（30）被形成为提供对可移动光学结构（14）的光学访问。 该方法包括用保护材料（610）涂覆前体结构（110）的前侧和后侧。 然后，前体结构（110）通过包括模切法的工艺被连接到诸如切割带的基底上，并将前体结构（110）分离成各个光学器件（10）。 此后，将光学装置（10）从带上取下，保护材料（610）从光学装置（10）中取出。

    INTEGRATED TUNABLE FABRY-PEROT FILTER AND METHOD OF MAKING SAME
    4.
    发明申请
    INTEGRATED TUNABLE FABRY-PEROT FILTER AND METHOD OF MAKING SAME 审中-公开
    集成的TUNABLE FABRY-PEROT过滤器及其制造方法

    公开(公告)号：WO0167158A2

    公开(公告)日：2001-09-13

    申请号：PCT/US0106944

    申请日：2001-03-02

    Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

    Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F ,  SHANFIELD STANLEY R ,  LE MINH VAN

    IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02

    CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

    Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

    Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

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