公开(公告)号：US20060060783A1

公开(公告)日：2006-03-23

申请号：US11208492

申请日：2005-08-22

Applicant: Andrew Armit

Inventor： Andrew Armit

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/043 ,  H01J2237/1501 ,  H01J2237/2487 ,  H01J2237/2826

Abstract: A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

Abstract translation: 提供了一种扫描粒子束仪器，该仪器包括扫描仪，辐射探测器和直流放大器，该直流放大器可操作以放大由该辐射探测器产生的信号以产生一视频信号，该仪器还包括一控制器， 因此使光束相对于样本直接，或者确定光束何时相对于样本如此定向，可以将由DC放大器产生的实际视频信号与期望的视频信号进行比较，以比较实际和期望的视频信号和 以调整DC放大器的DC偏移，以减少信号之间的差异。 还提供了使用这种仪器产生视频信号的方法。

公开(公告)号：US20050264351A1

公开(公告)日：2005-12-01

申请号：US10515213

申请日：2003-05-15

Applicant: Andrew Armit

Inventor： Andrew Armit

IPC: H01J37/26 ,  H03F1/56 ,  H03F3/08 ,  H03F17/00 ,  H03G1/00

CPC classification number: H01J37/244 ,  H01J2237/2448 ,  H03F3/087 ,  H03F3/45475 ,  H03F2200/261 ,  H03F2203/45138 ,  H03F2203/45512 ,  H03F2203/45528 ,  H03F2203/45594 ,  H03G3/3084

Abstract: Disclosed is a transresistance amplifier for a charged particle detector, comprising a variable input resistance, which may be a phototransistor (IC3), a voltage amplification stage (IC1) and control means (IC3), operable to vary the variable input resistance. The variable input resistance includes a first light-dependent resistance and the control means includes a first variable intensity light source that is optically coupled to the first light-dependent resistance. Also disclosed is a charged particle detector that includes such a transresistance amplifier and an electron microscope that includes such a charged particle detector.

Abstract translation: 公开了一种用于带电粒子检测器的跨阻放大器，包括可变输入电阻，其可以是光电晶体管（IC 3），电压放大级（IC 1）和控制装置（IC 3），可操作以改变可变输入电阻 。 可变输入电阻包括第一光依赖电阻，并且控制装置包括光耦合到第一依赖于光的电阻的第一可变强度光源。 还公开了一种带电粒子检测器，其包括这种跨阻放大器和包括这种带电粒子检测器的电子显微镜。