公开(公告)号：US20240142227A1

公开(公告)日：2024-05-02

申请号：US18408193

申请日：2024-01-09

Applicant: Applied Materials, Inc.

Inventor： Yangyang SUN ,  Jinxin FU ,  Ludovic GODET

IPC: G01B11/26

CPC classification number: G01B11/26

Abstract: Embodiments described herein provide for devices and methods of measuring a pitch P of optical device structures and an orientation angle ϕ of the optical device structures. One embodiment of the system includes an optical arm coupled to an arm actuator. The optical arm includes a light source. The light source emits a light path operable to be diffracted to the stage. The optical arm further includes a first beam splitter and a second beam splitter positioned in the light path. The first beam splitter directs the light path through a first lens and the second beam splitter directs the light path through a first dove prism and a second lens. The optical arm further includes a first detector operable to detect the light path from the first lens and second detector operable to detect the light path from the second lens.

公开(公告)号：US20240084435A1

公开(公告)日：2024-03-14

申请号：US18511631

申请日：2023-11-16

Applicant: Applied Materials, Inc.

Inventor： Ludovic GODET ,  Bencherki MEBARKI ,  Jinxin FU

IPC: C23C14/04 ,  C23C14/22 ,  C23C14/34 ,  G02B6/132 ,  G02B27/01 ,  G02B27/10

CPC classification number: C23C14/046 ,  C23C14/042 ,  C23C14/225 ,  C23C14/3407 ,  C23C14/3464 ,  G02B6/132 ,  G02B27/0172 ,  G02B27/1073 ,  G02B2027/0178

Abstract: Embodiments described herein relate to encapsulated nanostructured optical devices and methods of encapsulating gratings of such devices by asymmetric selective physical vapor deposition (PVD). In some embodiments, a method for encapsulating optical device gratings includes a first PVD process and a second PVD process that may be carried out simultaneously or sequentially. The first PVD process may provide a first stream of material at a first angle non-perpendicular to a substrate of the grating. The second PVD process may provide a second stream of material at a second angle non-perpendicular to the substrate of the grating. The combination of the first PVD process and the second PVD process forms an encapsulation layer over the grating and one or more air gaps between adjacent fins of the grating.

公开(公告)号：US20220397744A1

公开(公告)日：2022-12-15

申请号：US17805623

申请日：2022-06-06

Applicant: Applied Materials, Inc.

Inventor： Wubin PANG ,  Yangyang SUN ,  Jinxin FU ,  Samarth BHARGAVA

IPC: G02B13/06 ,  G02B13/16 ,  G02B13/22 ,  G02B27/00

Abstract: Embodiments of the present disclosure generally relate to an optical system having a lens system configured to have a wide field of view and high resolution. The optical system includes three or more lens groups with ability to combat optical aberrations and produce a pupil outside of the lens group. The lens system as an image projection system projects a pattern or image rendered on a flat reticle or display of finite distance to the infinity. In an imaging system, the lens system collects light from infinity and forms an image of that object on a sensor.

公开(公告)号：US20220307127A1

公开(公告)日：2022-09-29

申请号：US17655849

申请日：2022-03-22

Applicant: Applied Materials, Inc.

Inventor： Nai-Wen PI ,  Jinxin FU ,  Kang LUO ,  Ludovic GODET

IPC: C23C14/48 ,  C23C14/02 ,  C23C14/58 ,  C23C14/00 ,  C03C23/00

Abstract: Embodiments described herein provide for optical devices with methods of forming optical device substrates having at least one area of increased refractive index or scratch resistance. One method includes disposing an etch material on a discrete area of an optical device substrate or an optical device layer, disposing a diffusion material in the discrete area, and removing excess diffusion material to form an optical material in the optical device substrate or the optical device layer having a refractive index greater than or equal to 2.0 or a hardness greater than or equal to 5.5 Mohs.

公开(公告)号：US20220171283A1

公开(公告)日：2022-06-02

申请号：US17534128

申请日：2021-11-23

Applicant: Applied Materials, Inc.

Inventor： Yongan XU ,  Jinxin FU ,  Jhenghan YANG ,  Ludovic GODET

IPC: G03F7/00 ,  G02B6/136 ,  G02B6/122

Abstract: The present disclosure generally relates to methods of forming optical devices comprising nanostructures disposed on transparent substrates. A first process of forming the nanostructures comprises depositing a first layer of a first material on a glass substrate, forming one or more trenches in the first layer, and depositing a second layer of a second material in the one or more holes to trenches a first alternating layer of alternating first portions of the first material and second portions of the second material. The first process is repeated one or more times to form additional alternating layers over the first alternating layer. Each first portion of each alternating layer is disposed in contact with and offset a distance from an adjacent first portion in adjacent alternating layers. A second process comprises removing either the first or the second portions from each alternating layer to form the plurality of nanostructures.

公开(公告)号：US20250053099A1

公开(公告)日：2025-02-13

申请号：US18797716

申请日：2024-08-08

Applicant: Applied Materials, Inc.

Inventor： Yangyang SUN ,  Jinxin FU ,  Sihui HE ,  Ludovic GODET

IPC: G03F7/00

Abstract: Embodiments described herein provide an asymmetric optical metrology system for evaluating and inspecting the performance of optical devices, such as augmented reality (AR) waveguide combiners. The system utilizes an asymmetric optical configuration and fly-eye illumination to enhance the detection limit of image sharpness and the accuracy of luminance uniformity. By employing different lenses with various focal lengths, the system increases the sampling rate in the angular space, addressing the challenges of form factor limitations and pixel density inherent in conventional metrology tools. Embodiments described herein offer improved contrast and sharp image details, as well as a compact design, making it suitable for the development, optimization, and quality control of optical devices, such as AR waveguide combiners.

公开(公告)号：US20250053082A1

公开(公告)日：2025-02-13

申请号：US18933099

申请日：2024-10-31

Applicant: Applied Materials, Inc.

Inventor： Yongan XU ,  Jinxin FU ,  Jhenghan YANG ,  Ludovic GODET

IPC: G03F7/00 ,  G02B6/122 ,  G02B6/136

Abstract: The present disclosure generally relates to methods of forming optical devices comprising nanostructures disposed on transparent substrates. A first process of forming the nanostructures comprises depositing a first layer of a first material on a glass substrate, forming one or more trenches in the first layer, and depositing a second layer of a second material in the one or more holes to trenches a first alternating layer of alternating first portions of the first material and second portions of the second material. The first process is repeated one or more times to form additional alternating layers over the first alternating layer. Each first portion of each alternating layer is disposed in contact with and offset a distance from an adjacent first portion in adjacent alternating layers. A second process comprises removing either the first or the second portions from each alternating layer to form the plurality of nanostructures.

公开(公告)号：US20250046026A1

公开(公告)日：2025-02-06

申请号：US18793389

申请日：2024-08-02

Applicant: Applied Materials, Inc.

Inventor： David Alexander SELL ,  Sihui HE ,  Kevin MESSER ,  Kunal SHASTRI ,  Jinxin FU ,  Samarth BHARGAVA

IPC: G06T19/00 ,  G02B5/04 ,  G02B6/10

Abstract: The present disclosure relates to augmented reality devices and related methods. The augmented reality devices include a projection system. The projection system includes a projector including a major axis. The projected is configured to project an image along the major axis. A prism is configured to refract the image. The image includes a first spectrum, a second spectrum, and a third spectrum. A waveguide is disposed at a wrap angle from a plane formed from the major axis of the projector. The waveguide includes an input coupler, and an output coupler.

公开(公告)号：US20250020921A1

公开(公告)日：2025-01-16

申请号：US18769069

申请日：2024-07-10

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Sihui HE

IPC: G02B27/01

Abstract: Embodiments described herein relate to an augmented reality (AR) system. The AR system includes a projection system and an optical device. The projection system includes a backlight, a lens, and an illumination system. The illumination system is configured to receive light from the backlight and emit light having a first color trend. The light having a first color trend is emitted through the lens towards the optical device. The optical device is configured to form a second color trend. The second color trend is opposite the first color trend.

公开(公告)号：US20240151973A1

公开(公告)日：2024-05-09

申请号：US18280901

申请日：2022-03-07

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Ludovic GODET

IPC: G02B27/01 ,  G02B1/00 ,  G02B3/00 ,  G02B5/18 ,  G02B27/10

CPC classification number: G02B27/0172 ,  G02B1/002 ,  G02B3/0062 ,  G02B5/1819 ,  G02B27/106 ,  G02B2027/0178 ,  G02B2207/101

Abstract: Embodiments of the present application generally relate to augmented reality and virtual reality glasses having stacked lenses. The augmented reality (AR) and virtual reality (VR) glasses includes a pair of lenses retained by a frame. A lens stack is utilized in the pair of lenses. The lens stack may include multiple metasurfaces that improve the focus adjustment for both the real and virtual images as well as a prescription lens or prescription metasurface in the lens stack. The metasurfaces are coupled to a waveguide combiner to assist in overlaying virtual images on ambient environments. By utilizing a lens stack, the total weight of the glasses will decrease.