公开(公告)号：US20250068087A1

公开(公告)日：2025-02-27

申请号：US18803041

申请日：2024-08-13

Applicant: Applied Materials, Inc.

Inventor： Yangyang SUN ,  Jinxin FU ,  Sihui HE

IPC: G03F7/00

Abstract: Embodiments of the present disclosure generally relate to metrology systems and metrology methods to measure waveguides for image quality standards. In at least one embodiment, an optical device metrology system includes a stage, a body, and a light engine positioned within the body and mounted above the stage. The light engine includes, a light source, a fold mirror angled relative to the light source, the fold mirror is configured to turn a light beam toward the stage, one or more lenses or arrays positioned between the fold mirror and the stage, and a projection lens positioned between the one or more lenses or arrays and the stage. The system further includes, a first detector positioned within the body and mounted above the stage adjacent to the light engine configured to receive the projected light beam projected upwardly from the stage.

公开(公告)号：US20250078424A1

公开(公告)日：2025-03-06

申请号：US18812051

申请日：2024-08-22

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Sihui HE

IPC: G06T19/00 ,  G02B6/10

Abstract: Embodiments of the present disclosure generally relate to augmented reality (AR) systems. More specifically, embodiments described herein provide for an AR projection system and AR devices having the projection system. In one or more embodiments, an augmented reality device includes a projection system. The projection system includes a light engine. The light engine includes a pixel. The pixel includes an emission surface. A microlens is coupled to the emission surface of the pixel. The projection system further includes a projection lens configured to refract a first light emitted by the pixel. The first light has a first pupil length defined by a distance between a first end and a second end of the first light. The augmented reality device further includes a waveguide including an input coupler configured to incouple the first light at a first bounce length that is equivalent to the first pupil length.

公开(公告)号：US20250022234A1

公开(公告)日：2025-01-16

申请号：US18769595

申请日：2024-07-11

Applicant: Applied Materials, Inc.

Inventor： Evan WANG ,  David Alexander SELL ,  Kunal SHASTRI ,  Sihui HE ,  Kevin MESSER ,  Samarth BHARGAVA

IPC: G06T19/00 ,  G02B5/04 ,  G02B6/10 ,  G02B27/01

Abstract: The present disclosure relates to augmented reality devices and related methods. In one or more embodiments, an augmented reality device includes a projection system and a waveguide. The projection system includes a projector and a prism. The projector projects an image along the projectors major axis. The prism refracts the image having a first spectrum, a second spectrum, and a third spectrum. The waveguide is disposed at a wrap angle from a plane formed from the major axis of the projector. The waveguide includes an input coupler and an output coupler. The input coupler includes input structures at an input period and an input orientation and the input coupler is configured to receive the spectrums at different corresponding input angles. The output coupler includes output structures at an output period and an output orientation and the output coupler out couples the respective spectrums at an about equal output angle.

公开(公告)号：US20250053099A1

公开(公告)日：2025-02-13

申请号：US18797716

申请日：2024-08-08

Applicant: Applied Materials, Inc.

Inventor： Yangyang SUN ,  Jinxin FU ,  Sihui HE ,  Ludovic GODET

IPC: G03F7/00

Abstract: Embodiments described herein provide an asymmetric optical metrology system for evaluating and inspecting the performance of optical devices, such as augmented reality (AR) waveguide combiners. The system utilizes an asymmetric optical configuration and fly-eye illumination to enhance the detection limit of image sharpness and the accuracy of luminance uniformity. By employing different lenses with various focal lengths, the system increases the sampling rate in the angular space, addressing the challenges of form factor limitations and pixel density inherent in conventional metrology tools. Embodiments described herein offer improved contrast and sharp image details, as well as a compact design, making it suitable for the development, optimization, and quality control of optical devices, such as AR waveguide combiners.

公开(公告)号：US20250046026A1

公开(公告)日：2025-02-06

申请号：US18793389

申请日：2024-08-02

Applicant: Applied Materials, Inc.

Inventor： David Alexander SELL ,  Sihui HE ,  Kevin MESSER ,  Kunal SHASTRI ,  Jinxin FU ,  Samarth BHARGAVA

IPC: G06T19/00 ,  G02B5/04 ,  G02B6/10

Abstract: The present disclosure relates to augmented reality devices and related methods. The augmented reality devices include a projection system. The projection system includes a projector including a major axis. The projected is configured to project an image along the major axis. A prism is configured to refract the image. The image includes a first spectrum, a second spectrum, and a third spectrum. A waveguide is disposed at a wrap angle from a plane formed from the major axis of the projector. The waveguide includes an input coupler, and an output coupler.

公开(公告)号：US20250020921A1

公开(公告)日：2025-01-16

申请号：US18769069

申请日：2024-07-10

Applicant: Applied Materials, Inc.

Inventor： Jinxin FU ,  Sihui HE

IPC: G02B27/01

Abstract: Embodiments described herein relate to an augmented reality (AR) system. The AR system includes a projection system and an optical device. The projection system includes a backlight, a lens, and an illumination system. The illumination system is configured to receive light from the backlight and emit light having a first color trend. The light having a first color trend is emitted through the lens towards the optical device. The optical device is configured to form a second color trend. The second color trend is opposite the first color trend.