公开(公告)号：JPH05188036A

公开(公告)日：1993-07-27

申请号：JP17699592

申请日：1992-07-03

Applicant: BASF AG

Inventor： BERUNTO EFU BUEE HOFUMAN ,  RAINAA ERUBATSUHA ,  GEERUHARUTO BUEGUNAA ,  HAARARUTO FUKUSU ,  BUORUFUGANGU SHIYUREPU ,  MATEIASU SHIYAUPU

IPC: G01N27/414 ,  G01N27/22 ,  G01N27/333

Abstract: PURPOSE: To obtain a capacitive measuring chemical sensor apparatus capable of easily replacing individual constituting elements to be adapted to reduce size by indicating extremely low interlacing sensitivity with simple manufacture. CONSTITUTION: The capacitive measuring chemical sensor apparatus comprises a sensor 12, and a reference element 11 connected in series with the sensor 12 to be brought into contact with measuring solution, i.e., electrolyte 1 with semiconductor as a base capable of being reduced in size. The element 11 is covered with a membrane 8, and formed of a highly doped semiconductor substrate 10 or metal-semiconductor substrate. The sensor 12 is formed of insulator- semiconductor substrate 5 covered with a sensitive film 7, and the film 7 of the sensor 12 has higher sensitivity than that of the film 8 of the element 11.