公开(公告)号：DE59002144D1

公开(公告)日：1993-09-09

申请号：DE59002144

申请日：1990-03-20

Applicant: BASF AG

Inventor： HICKEL WERNER DR ,  KNOLL WOLFGANG DR ,  ROTHENHAEUSLER BENNO DR

IPC: G01B11/06 ,  G01B11/30 ,  G01N21/552 ,  G01N21/88 ,  G01N21/55

Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.

公开(公告)号：AT92619T

公开(公告)日：1993-08-15

申请号：AT90105197

申请日：1990-03-20

Applicant: BASF AG

Inventor： HICKEL WERNER DR ,  KNOLL WOLFGANG DR ,  ROTHENHAEUSLER BENNO DR

IPC: G01B11/06 ,  G01B11/30 ,  G01N21/552 ,  G01N21/88 ,  G01N21/55

公开(公告)号：DK0388872T3

公开(公告)日：1993-09-27

申请号：DK90105197

申请日：1990-03-20

Applicant: BASF AG

Inventor： HICKEL WERNER DR ,  KNOLL WOLFGANG DR ,  ROTHENHAEUSLER BENNO DR

IPC: G01B11/06 ,  G01B11/30 ,  G01N21/552 ,  G01N21/88 ,  G01N21/55

Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.

公开(公告)号：DE3909143A1

公开(公告)日：1990-09-27

申请号：DE3909143

申请日：1989-03-21

Applicant: BASF AG

Inventor： HICKEL WERNER DR ,  KNOLL WOLFGANG DR ,  ROTHENHAEUSLER BENNO DR

IPC: G01B11/06 ,  G01B11/30 ,  G01N21/552 ,  G01N21/88

Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.