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公开(公告)号：DE3800197A1
公开(公告)日：1989-07-20
申请号：DE3800197
申请日：1988-01-07
Applicant: BASF AG
Inventor： LOESER WERNER DR , DOMAS FRIEDRICH , ZISSEL GEORG , KUERTEN HERIBERT DR , BENDER RAINER DR
Abstract: The substrate plates, after facing, are finished with lapping discs, with the addition of a polishing fluid composed of an aqueous solution with aluminium oxide powder and organic additives, the lapping discs being provided with a covering made from an elastic material.
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