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公开(公告)号:MY158452A
公开(公告)日:2016-10-14
申请号:MYPI2012000839
申请日:2010-09-09
Applicant: BASF SE , GP SOLAR GMBH
Inventor: SIMON BRAUN , JULIAN PRÖLSS , IHOR MELNYK , MICHAEL MICHEL , STEFAN MATHIJSSEN
IPC: H01L31/0236
Abstract: AN AQUEOUS ACIDIC ETCHING SOLUTION SUITABLE FOR TEXTURING THE SURFACE OF SINGLE CRYSTAL AND POLYCRYSTAL SILICON SUBSTRATES AND CONTAINING, BASED ON THE COMPLETE WEIGHT OF THE SOLUTION, - 3 TO 10% BY WEIGHT OF HYDROFLUORIC ACID; - 10 TO 35% BY WEIGHT OF NITRIC ACID; - 5 TO 40% BY WEIGHT OF SULFURIC ACID; AND - 55 TO 82% BY WEIGHT OF WATER; A METHOD FOR TEXTURING THE SURFACE OF SINGLE CRYSTAL AND POLYCRYSTAL SILICON SUBSTRATES COMPRISING THE STEP OF (1) CONTACTING AT LEAST ONE MAJOR SURFACE OF A SUBSTRATE WITH THE SAID AQUEOUS ACIDIC ETCHING SOLUTION; (2) ETCHING THE AT LEAST ONE MAJOR SURFACE OF THE SUBSTRATE FOR A TIME AND AT A TEMPERATURE SUFFICIENT TO OBTAIN A SURFACE TEXTURE CONSISTING OF RECESSES AND PROTRUSIONS; AND (3) REMOVING THE AT LEAST ONE MAJOR SURFACE OF THE SUBSTRATE FROM THE CONTACT WITH THE AQUEOUS ACIDIC ETCHING SOLUTION; AND A METHOD FOR MANUFACTURING PHOTOVOLTAIC CELLS AND SOLAR CELLS USING THE SAID SOLUTION AND THE SAID TEXTURING METHOD.
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公开(公告)号:MY157203A
公开(公告)日:2016-05-13
申请号:MYPI2013000526
申请日:2011-08-25
Applicant: BASF SE
Inventor: SIMON BRAUN , ANDREAS KLIPP , CORNELIA RÖGER-GÖPFERT , CHRISTIAN BITTNER , MEICHIN SHEN , CHENGWEI LIN
IPC: H01L31/18
Abstract: AN AQUEOUS ACIDIC SOLUTION AND AN AQUEOUS ACIDIC ETCHING SOLUTION SUITABLE FOR TEXTURIZING THE SURFACE OF SINGLE CRYSTAL AND POLYCRYSTAL SILICON SUBSTRATES, - HYDROFLUORIC ACID; - NITRIC ACID; AND - AT LEAST ONE ANIONIC POLYETHER, WHICH IS SURFACE ACTIVE; A METHOD FOR TEXTURIZING THE SURFACE OF SINGLE CRYSTAL AND POLYCRYSTAL SILICON SUBSTRATES COMPRISING THE STEP OF (1) CONTACTING AT LEAST ONE MAJOR SURFACE OF A SUBSTRATE WITH THE SAID AQUEOUS ACIDIC ETCHING SOLUTION; (2) ETCHING THE AT LEAST ONE MAJOR SURFACE OF THE SUBSTRATE FOR A TIME AND AT A TEMPERATURE SUFFICIENT TO OBTAIN A SURFACE TEXTURIZATION CONSISTING OF RECESSES AND PROTRUSIONS; AND (3) REMOVING THE AT LEAST ONE MAJOR SURFACE OF THE SUBSTRATE FROM THE CONTACT WITH THE AQUEOUS ACIDIC ETCHING SOLUTION; AND A METHOD FOR MANUFACTURING PHOTOVOLTAIC CELLS AND SOLAR CELLS USING THE SAID SOLUTION AND THE SAID TEXTURIZING METHOD.
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