-
公开(公告)号:US20230154515A1
公开(公告)日:2023-05-18
申请号:US17808404
申请日:2022-06-23
Inventor: Xiaoguang WANG , DINGGUI ZENG , Huihui LI , Jiefang DENG , Kanyu CAO
CPC classification number: G11C11/161 , G11C11/1655 , H01L43/08 , H01L43/02 , H01L27/228 , H01L43/12
Abstract: The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate; a transistor, including a control terminal, a first terminal, and a second terminal; a first magnetic memory structure, a bottom electrode of which is electrically connected to the first terminal of the transistor; a second magnetic memory structure, a top electrode of which is electrically connected to the first terminal of the transistor, the bottom electrode of the first magnetic memory structure is located in a same layer with a bottom electrode of the second magnetic memory structure; a first bit line, electrically connected to a top electrode of the first magnetic memory structure; a second bit line, electrically connected to the bottom electrode of the second magnetic memory structure; and a selection line, electrically connected to a second terminal of the transistor.
-
公开(公告)号:US20230066016A1
公开(公告)日:2023-03-02
申请号:US17808372
申请日:2022-06-23
Inventor: Xiaoguang WANG , Dinggui ZENG , Huihui LI , Kanyu CAO
Abstract: The present disclosure provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a plurality of memory cells alternately arranged on a substrate, the memory cell including an odd number of vertical transistors, a connection pad connected to one end of each of the odd number of vertical transistors, and a magnetic tunnel junction located on the connection pad; wherein a material of a channel of the vertical transistor includes a monocrystalline semiconductor.
-
公开(公告)号:US20230061246A1
公开(公告)日:2023-03-02
申请号:US17857219
申请日:2022-07-05
Inventor: Xiaoguang WANG , Dinggui ZENG , Huihui LI , Kanyu CAO
Abstract: A semiconductor structure, a manufacturing method therefor and a memory are provided. The semiconductor structure may at least include: a plurality of aligned transistors, in which the transistors share a same source plate, channels of the transistors are located above the source plate, the channel length direction of the transistors is perpendicular to a surface of the source plate, and a material of the channels includes a single crystal semiconductor; a plurality of drain contacts, electrically connected with drains of the transistors, in which even number of the transistors share one same drain contact; and a plurality of magnetic tunnel junctions, located on the drain contacts and electrically connected with the drain contacts in one-to-one correspondence.
-
公开(公告)号:US20230171969A1
公开(公告)日:2023-06-01
申请号:US17827799
申请日:2022-05-30
Inventor: Xiaoguang WANG , Huihui LI , Wei CHANG , Kanyu CAO
IPC: H01L27/105
CPC classification number: H01L27/1052
Abstract: Embodiment provides a semiconductor structure and a fabrication method thereof, and relates to the field of semiconductor technology. The fabrication method includes providing a substrate including a peripheral circuit region and an array region having a memory cell, where the peripheral circuit region includes a first region and a second region. In the present disclosure, a logic device configured to control the memory cell and a magnetic memory device are simultaneously fabricated in the peripheral circuit region by means of a process for fabricating a dynamic random access memory (DRAM), such that the same semiconductor structure has two types of memory structures at the same time. Compared with a technology for fabricating two types of memory structures separately, fabricating steps can be simplified, and fabricating costs can be reduced.
-
公开(公告)号:US20230094859A1
公开(公告)日:2023-03-30
申请号:US17808797
申请日:2022-06-24
Inventor: Xiaoguang WANG , DINGGUI ZENG , Huihui LI , Jiefang DENG , Kanyu CAO
IPC: H01L23/528 , H01L27/11502 , H01L27/22 , H01L27/24
Abstract: The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate, having a first surface; a plurality of memory cells, located on the first surface of the substrate and arranged according to a first preset pattern; and a plurality of memory contact structures, corresponding to the memory cells in a one-to-one manner, where bottom portions of the memory contact structures are in contact with top portions of the memory cells, and top portions of the memory contact structures are arranged according to a second preset pattern. The bottom portion of the memory contact structure is arranged opposite to the top portion of the memory contact structure.
-
6.
公开(公告)号:US20230063767A1
公开(公告)日:2023-03-02
申请号:US17842937
申请日:2022-06-17
Inventor: Kanyu CAO , Xiaoguang WANG , Huihui LI , Dinggui ZENG , Jiefang DENG
Abstract: A method for manufacturing a semiconductor structure, a semiconductor structure and a semiconductor memory are provided. The method includes: providing a substrate; forming an MTJ structure and a first mask structure sequentially on the substrate; patterning the first mask structure to form a first pattern extending in a first direction; forming a second mask structure on the first pattern; patterning the second mask structure to form a second pattern extending in a second direction, in which the first direction intersects the second direction, and is not perpendicular to the second direction; patterning the first pattern by utilizing the second pattern to form a cellular pattern; and transferring the cellular pattern to the MTJ structure to form a cellular MTJ array.
-
公开(公告)号:US20230172072A1
公开(公告)日:2023-06-01
申请号:US17827778
申请日:2022-05-29
Inventor: Xiaoguang WANG , Huihui LI , Wei CHANG , Kanyu CAO
CPC classification number: H01L43/08 , H01L27/226 , H01L43/02 , H01L43/12
Abstract: Embodiments provide a layout and a processing method thereof, a storage medium and a program product. The layout has a first memory area and a second memory area. The layout includes a base substrate array pattern and a storage pattern, the base substrate array pattern includes a plurality of plug patterns spaced apart; and the storage pattern includes a magnetic tunnel junction pattern in the first memory area and a capacitor pattern in the second memory area. The magnetic tunnel junction pattern shares a partially overlapped area with a given one of the plurality of plug patterns in the first memory area, and the capacitor pattern shares a partially overlapped area with a given one of the plurality of plug patterns in the second memory area.
-
公开(公告)号:US20230171971A1
公开(公告)日:2023-06-01
申请号:US17853877
申请日:2022-06-29
Inventor: Xiaoguang WANG , Huihui LI , Qiang ZHANG , Minmin WU , Shan WANG
IPC: H01L27/105
CPC classification number: H01L27/1052
Abstract: Embodiments relate to the field of semiconductor manufacturing technology, and more particularly, to a semiconductor structure and a method for fabricating a semiconductor structure. The semiconductor structure includes a substrate including a first array region and a second array region. The first array region is provided with a first memory array comprising a plurality of first memory structures, and the second array region is provided with a second memory array comprising a plurality of second memory structures. Compared with related technologies where different memory structures are stacked on a substrate, in this embodiment, the plurality of first memory structures and the plurality of second memory structures are arranged side by side on the substrate, which is advantageous to simplifying fabrication processes and improving production efficiency.
-
9.
公开(公告)号:US20230061322A1
公开(公告)日:2023-03-02
申请号:US17805004
申请日:2022-06-01
Inventor: Xiaoguang WANG , Huihui LI , DINGGUI ZENG , Jiefang DENG , Kanyu CAO
Abstract: A method for manufacturing a semiconductor structure includes the following: providing a substrate; forming an MTJ structure and a first mask structure in sequence on the substrate; performing a patterning process on the first mask structure to form a first pattern extending in a first direction; transferring the first pattern to the MTJ structure; forming a second mask structure on the MTJ structure; performing a patterning process on the second mask structure to form a second pattern extending in a second direction, the first direction intersecting the second direction and being not perpendicular to the second direction; and performing a patterning process on the MTJ structure by utilizing the second pattern to form a cellular MTJ array, the first pattern and the second pattern together forming a cellular pattern.
-
公开(公告)号:US20250031411A1
公开(公告)日:2025-01-23
申请号:US18714965
申请日:2022-12-07
Inventor: Huihui LI , Yunsen ZHANG , Guilei WANG , Chao ZHAO
IPC: H01L29/786 , H01L29/06 , H01L29/423 , H01L29/66 , H10B12/00 , H10B61/00
Abstract: A vertical transistor, and a memory cell and a manufacturing method therefor are provided. The vertical transistor includes: a source electrode disposed on a substrate; a drain electrode which is disposed at a side, away from the substrate, of the source electrode; and a gate electrode and a semiconductor layer, which are in the same layer, and are disposed between the source electrode and the drain electrode in a first direction which is perpendicular to the substrate. The gate electrode at least comprises a column-shaped first gate electrode extending in the first direction. The semiconductor layer comprises a first semiconductor layer and a second semiconductor layer which are in the same layer and spaced apart from each other, and the first gate electrode is disposed between the first semiconductor layer and the second semiconductor layer.
-
-
-
-
-
-
-
-
-