公开(公告)号：SG179209A1

公开(公告)日：2012-05-30

申请号：SG2012019063

申请日：2010-09-15

Applicant: BREWER SCIENCE INC

Inventor： YESS KIMBERLY A ,  DAILY MADISON M JR ,  FLAIM TONY D

Abstract: Scratch-resistant coatings for protecting front-side microelectromechanical and semiconductor device features during backside processing are provided, along with methods of using the same. The coatings are non-photosensitive, removable, and tolerate high processing temperatures. These coatings also eliminate the need for a separate etch stop layer in the device design. The coatings are formed from a composition comprising a component dissolved or dispersed in a solvent system. The component is selected from the group consisting of styrene-acrylonitrile copolymers and aromatic sulfone polymers.

公开(公告)号：WO2011034897A3

公开(公告)日：2011-07-14

申请号：PCT/US2010048899

申请日：2010-09-15

Applicant: BREWER SCIENCE INC ,  YESS KIMBERLY A ,  DAILY MADISON M JR ,  FLAIM TONY D

Inventor： YESS KIMBERLY A ,  DAILY MADISON M JR ,  FLAIM TONY D

IPC: H01L21/48 ,  C08J5/18 ,  C09D125/12

CPC classification number: H01L21/561 ,  H01L23/293 ,  H01L23/3121 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

Abstract: Scratch-resistant coatings for protecting front-side microelectromechanical and semiconductor device features during backside processing are provided, along with methods of using the same. The coatings are non-photosensitive, removable, and tolerate high processing temperatures. These coatings also eliminate the need for a separate etch stop layer in the device design. The coatings are formed from a composition comprising a component dissolved or dispersed in a solvent system. The component is selected from the group consisting of styrene-acrylonitrile copolymers and aromatic sulfone polymers.

Abstract translation: 提供了用于在背面处理期间保护正面微机电和半导体器件特征的耐刮擦涂层以及使用该涂层的方法。 该涂层是非光敏的，可移除的，并且可以承受高的加工温度。 这些涂层也消除了在器件设计中需要单独的蚀刻停止层。 该涂层由包含溶解或分散在溶剂体系中的组分的组合物形成。 该组分选自苯乙烯 - 丙烯腈共聚物和芳族砜聚合物。

公开(公告)号：EP2471090A4

公开(公告)日：2014-09-24

申请号：EP10817743

申请日：2010-09-15

Applicant: BREWER SCIENCE INC

Inventor： YESS KIMBERLY A ,  DAILY MADISON M JR ,  FLAIM TONY D

IPC: H01L21/48 ,  C08J5/18 ,  C09D125/12 ,  H01L21/56 ,  H01L23/29 ,  H01L23/31

CPC classification number: H01L21/561 ,  H01L23/293 ,  H01L23/3121 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00