公开(公告)号：DE68928548D1

公开(公告)日：1998-02-19

申请号：DE68928548

申请日：1989-09-25

Applicant: BREWER SCIENCE INC

Inventor： LAMB JAMES ,  BREWER TERRY ,  MORI J

IPC: G03F7/004 ,  G03F7/039 ,  G03F7/085 ,  G03F7/09 ,  H01L21/027

公开(公告)号：DE3856007T2

公开(公告)日：1998-02-05

申请号：DE3856007

申请日：1988-01-12

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY ,  HAWLEY DAN ,  LAMB JAMES ,  LATHAM WILLIAM ,  STICHNOTE LYNN

IPC: G02B5/20 ,  G03F7/00 ,  G09F9/00 ,  G09F9/30 ,  H01L31/0216 ,  G03F9/00 ,  G03C5/00

Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.

公开(公告)号：DE68928548T2

公开(公告)日：1998-04-23

申请号：DE68928548

申请日：1989-09-25

Applicant: BREWER SCIENCE INC

Inventor： LAMB JAMES ,  BREWER TERRY ,  MORI J

IPC: G03F7/004 ,  G03F7/039 ,  G03F7/085 ,  G03F7/09 ,  H01L21/027

公开(公告)号：DE3856007D1

公开(公告)日：1997-10-02

申请号：DE3856007

申请日：1988-01-12

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY ,  HAWLEY DAN ,  LAMB JAMES ,  LATHAM WILLIAM ,  STICHNOTE LYNN

IPC: G02B5/20 ,  G03F7/00 ,  G09F9/00 ,  G09F9/30 ,  H01L31/0216 ,  G03F9/00 ,  G03C5/00

Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.