公开(公告)号：DE69828630T2

公开(公告)日：2005-06-16

申请号：DE69828630

申请日：1998-09-28

Applicant: BREWER SCIENCE INC

Inventor： MEADOR D ,  GUERRERO J ,  SHAO XIE ,  KRISHNAMURTHY VANDANA

IPC: G03F7/11 ,  C08F8/00 ,  C08F220/32 ,  C08F283/10 ,  C09D133/06 ,  G03F7/09 ,  G03C1/492 ,  G03C1/815 ,  C12N15/00 ,  C10M137/04

Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.

公开(公告)号：DE69828630D1

公开(公告)日：2005-02-17

申请号：DE69828630

申请日：1998-09-28

Applicant: BREWER SCIENCE INC

Inventor： MEADOR D ,  GUERRERO J ,  SHAO XIE ,  KRISHNAMURTHY VANDANA

IPC: G03F7/11 ,  C08F8/00 ,  C08F220/32 ,  C08F283/10 ,  C09D133/06 ,  G03F7/09 ,  G03C1/492 ,  G03C1/815 ,  C12N15/00 ,  C10M137/04

Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.