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1.发明专利
公开(公告)号：JP2009037245A
公开(公告)日：2009-02-19
申请号：JP2008216969
申请日：2008-08-26
Applicant: Brewer Science Inc , ブルーワー サイエンス アイ エヌ シー.
Inventor： SHAO XIE , MEADOR JIM D , BHAVE MANDAR , KRISHNAMURTHY VANDANA , NOWAK KELLY A , FOWLER MICHELLE , DESHPANDE SHREERAM V
IPC: G03F7/11 , B32B7/02 , C08J3/24 , C09D5/00 , C09D7/12 , C09D105/00 , C09D133/00 , C09D161/20 , C09D163/00 , C09D167/00 , C09D171/00 , C09D179/08 , C09D201/00 , G03F7/004 , G03F7/09 , H01L21/027
CPC classification number: C08J3/241 , G03F7/091 , Y10S430/151
Abstract: PROBLEM TO BE SOLVED: To provide an anti-reflective coating composition that does not crosslink prior to a bake stage in microlithographic processes so as to solve problems of spin bowl incompatibility and stability of an anti-reflective coating. SOLUTION: The anti-reflective composition includes a polymer dissolved or dispersed in a solvent system, a crosslinking agent, a light attenuating compound and a strong acid. The polymer is selected from a group consisting of acrylic polymers, polyesters, epoxy novolacs, polysaccharides, polyethers, polyimides and mixtures thereof. The crosslinking agent is selected from a group consisting of amino resin and epoxy resin. The light attenuating compound is selected from a group consisting of phenolic compounds, carboxylic acid, phosphoric acid, cyano compounds, benzene, naphthalene and anthracene. The composition contains the strong acid by less than 1.0 mass% based upon the total mass of the composition taken as 100 mass%. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题：提供在微光刻工艺中在烘烤阶段之前不交联的抗反射涂料组合物，以解决纺丝碗不相容性和抗反射涂层的稳定性的问题。 抗反射组合物包括溶解或分散在溶剂体系中的聚合物，交联剂，光衰减化合物和强酸。 聚合物选自丙烯酸聚合物，聚酯，环氧酚醛清漆，多糖，聚醚，聚酰亚胺及其混合物。 交联剂选自氨基树脂和环氧树脂。 光衰减化合物选自酚类化合物，羧酸，磷酸，氰基化合物，苯，萘和蒽。 组合物以占组合物总质量的100质量％为基准，含有小于1.0质量％的强酸。 版权所有（C）2009，JPO＆INPIT
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公开(公告)号：CA2330689A1
公开(公告)日：1999-11-04
申请号：CA2330689
申请日：1999-04-20
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY LOWELL , SHAO XIE , MEADOR JIM D
IPC: G03F7/11 , C08B15/06 , C08L1/10 , C08L1/26 , C08L61/32 , C09D5/00 , C09D101/08 , C09D101/14 , C09D161/20 , G02B1/11 , G03F7/09 , C08L1/12 , C08L1/14
Abstract: Anti-reflective compostions are prepared from cellulosic binders and alkylat ed aminoplast cross-linking agents derived from melamine, urea, benzoguanamine or glycoluril. These compositions are used to form bottom anti-reflective layer s with high plasma etch selectivity when used in multilayer photoresist processes.
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公开(公告)号：DE69807913D1
公开(公告)日：2002-10-17
申请号：DE69807913
申请日：1998-10-20
Applicant: BREWER SCIENCE INC
Inventor： SHAO XIE , HESTER COLIN , FLAIM D , BREWER L
Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.
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公开(公告)号：ES2150600T3
公开(公告)日：2000-12-01
申请号：ES95944193
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：AU2002259251A1
公开(公告)日：2002-12-16
申请号：AU2002259251
申请日：2002-05-14
Applicant: BREWER SCIENCE INC
Inventor： LAMB JAMES E III , HUANG RUNHUI , FLAIM TONY D , PULIGADDA RAMA , SHAO XIE
IPC: H01L21/312 , G03F7/09 , B05D3/02 , C08F8/32 , C08G59/16 , C08F120/32 , C08G59/14 , C08F8/00 , C08F8/14
Abstract: Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring monomers comprising epoxide rings reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers.
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Patent Agency Ranking
公开(公告)号：AU7602600A
公开(公告)日：2001-06-12
申请号：AU7602600
申请日：2000-09-20
Applicant: BREWER SCIENCE INC
Inventor： SHAO XIE , COX ROBERT , DESHPANDE SHREERAM V , FLAIM TONY D , PULIGADDA RAMA
Abstract: An improved light attenuating compound for use in the production of microdevices is provided. Broadly, the light attenuating compound is non-aromatic and can be directly incorporated (either physically or chemically) into photolithographic compositions such as bottom anti-reflective coatings (BARC) and contact or via hole fill materials. The preferred non-aromatic compounds of the invention are conjugated aliphatic and alicyclic compounds which greatly enhance the plasma etch rate of the composition. Furthermore, the light attenuating compounds are useful for absorbing light at shorter wavelengths. In one embodiment, the inventive compounds can be polymerized so as to serve as both the polymer binder of the composition as well as the light absorbing constituent.
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公开(公告)号：CA2301020A1
公开(公告)日：1999-04-08
申请号：CA2301020
申请日：1998-09-28
Applicant: BREWER SCIENCE INC
Inventor： GUERRERO DOUGLAS J , KRISHNAMURTHY VANDANA , SHAO XIE , MEADOR JIM D
IPC: G03F7/11 , C08F8/00 , C08F220/32 , C08F283/10 , C09D133/06 , G03F7/09 , G03C1/492 , G03C1/815
Abstract: Anti-reflective coating compositions having improved etchrate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate.
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公开(公告)号：DE69828630D1
公开(公告)日：2005-02-17
申请号：DE69828630
申请日：1998-09-28
Applicant: BREWER SCIENCE INC
Inventor： MEADOR D , GUERRERO J , SHAO XIE , KRISHNAMURTHY VANDANA
IPC: G03F7/11 , C08F8/00 , C08F220/32 , C08F283/10 , C09D133/06 , G03F7/09 , G03C1/492 , G03C1/815 , C12N15/00 , C10M137/04
Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.
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公开(公告)号：AT195025T
公开(公告)日：2000-08-15
申请号：AT95944193
申请日：1995-12-14
Applicant: BREWER SCIENCE INC
Inventor： FLAIM TONY D , MEADOR JIM D , SHAO XIE , BREWER TERRY L
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
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公开(公告)号：DE69828630T2
公开(公告)日：2005-06-16
申请号：DE69828630
申请日：1998-09-28
Applicant: BREWER SCIENCE INC
Inventor： MEADOR D , GUERRERO J , SHAO XIE , KRISHNAMURTHY VANDANA
IPC: G03F7/11 , C08F8/00 , C08F220/32 , C08F283/10 , C09D133/06 , G03F7/09 , G03C1/492 , G03C1/815 , C12N15/00 , C10M137/04
Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.
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