公开(公告)号：AU4646189A

公开(公告)日：1990-05-28

申请号：AU4646189

申请日：1989-11-07

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY ,  MOSS MARY ,  CUZMAR RUTH ,  HAWLEY DAN ,  FLAIM TONY

IPC: G03F7/039 ,  H01L21/312 ,  H01L23/532 ,  H01L29/00 ,  G03C1/60 ,  G03F7/26

Abstract: Positive working polyamic acid photoresist compositions are disclosed having improved high resolution upon image development and exhibiting stable photosensitivity and superior dielectric performance. The compositions comprise polyamic acid condensation products of an aromatic dianhydride and an aromatic di-primary amine wherein a percentage of the diamine comprises special dissolution inhibiting monomers. The compositions may be further improved by the presence of particular supplemental additives.