公开(公告)号：JP2010224554A

公开(公告)日：2010-10-07

申请号：JP2010106668

申请日：2010-05-06

Applicant: BREWER SCIENCE INC

Inventor： KRISHNAMURTHY VANDANA ,  NEEF CHARLES J ,  SNOOK JULIET A M

IPC: G03F7/11 ,  C08G77/20 ,  C08G79/00 ,  C08G79/10 ,  C08L85/00 ,  G03F7/09 ,  G03F7/32 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide an anti-reflective composition and a method of using the composition to form a circuit. SOLUTION: The composition comprises a polymer dissolved or dispersed in a solvent system. The polymer of the composition is generated by reacting an organic compound with a polymeric metal alkoxide, and the polymeric metal alkoxide includes a recurring unit having formula (I), wherein M is a metal individually selected from a group composed of titanium, zirconium, silicon and aluminum, each L is individually selected from a group consisting of diketo and alkoxide ligands, and the organic compound includes a functional group for coordinating with M of the polymeric metal alkoxide. COPYRIGHT: (C)2011,JPO&INPIT

公开(公告)号：AU2003245596A1

公开(公告)日：2004-01-06

申请号：AU2003245596

申请日：2003-06-18

Applicant: BREWER SCIENCE INC

Inventor： KRISHNAMURTHY VANDANA ,  NEEF CHARLES J ,  SNOOK JULIET A M

IPC: G03F7/11 ,  C08G79/00 ,  C08G79/10 ,  C08L85/00 ,  G03F7/09 ,  H01L21/027 ,  G03C1/735 ,  G03F7/30 ,  G03F7/36 ,  G03C1/825 ,  G03C1/835 ,  G03F7/20

Abstract: Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. The polymers of the composition being formed by reacting a polymeric metal alkoxide with an organic compound, said polymeric metal alkoxide including recurring units having the formula wherein M is a metal, and each L is individually selected from the group consisting of diketo and alkoxide ligands; and said organic compound comprising a functional group for coordinating with M of said polymeric metal alkoxide. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.

公开(公告)号：EP1516226A4

公开(公告)日：2010-02-17

申请号：EP03739224

申请日：2003-06-18

Applicant: BREWER SCIENCE INC

Inventor： KRISHNAMURTHY VANDANA ,  NEEF CHARLES J ,  SNOOK JULIET A M

IPC: G03F7/11 ,  C08G79/00 ,  C08G79/10 ,  C08L85/00 ,  G03F7/09 ,  H01L21/027 ,  G03C1/735 ,  G03C1/825 ,  G03C1/835 ,  G03F7/20 ,  G03F7/30 ,  G03F7/36

CPC classification number: C08G79/10 ,  C08G79/00 ,  C08L85/00 ,  G03F7/091 ,  Y10S430/106 ,  Y10S430/11 ,  Y10S430/111 ,  Y10S430/151