公开(公告)号：SG11201404229YA

公开(公告)日：2014-08-28

申请号：SG11201404229Y

申请日：2013-01-17

Applicant: BREWER SCIENCE INC

Inventor： SULLIVAN DANIEL M ,  STROUD CHARLYN ,  DAI JINHUA

IPC: H01L21/31 ,  H01L21/027

Abstract: Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.

公开(公告)号：EP2805347A4

公开(公告)日：2015-07-22

申请号：EP13738476

申请日：2013-01-17

Applicant: BREWER SCIENCE INC

Inventor： SULLIVAN DANIEL M ,  STROUD CHARLYN ,  DAI JINHUA

IPC: G03F7/09 ,  C07C69/76 ,  C07D303/23

CPC classification number: C09D5/006 ,  C07C69/76 ,  C07C69/94 ,  C07C2603/24 ,  C07C2603/74 ,  C07D303/23 ,  G03F7/091 ,  G03F7/094 ,  G03F7/30 ,  G03F7/40 ,  H01L21/0276 ,  Y10T428/265 ,  Y10T428/31511 ,  Y10T428/31525 ,  Y10T428/31529

Abstract: Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.