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1.ASSIST LAYERS FOR EUV LITHOGRAPHY 审中-公开
Title translation: UNTERSTÜTZUNGSSCHICHTENFÜRDIE EUV-LITHOGRAFIE公开(公告)号:EP2783389A4
公开(公告)日:2015-07-01
申请号:EP12851678
申请日:2012-11-20
Applicant: BREWER SCIENCE INC
Inventor: OUATTARA TANTIBORO , WASHBURN CARLTON , KRISHNAMURTHY VANDANA , GUERRERO DOUGLAS , COLLIN ALINE
CPC classification number: G03F7/092 , B82Y30/00 , B82Y40/00 , G03F7/11 , G03F7/2004 , Y10S977/755 , Y10T428/24917