3D STACKED SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT

    公开(公告)号:US20250048615A1

    公开(公告)日:2025-02-06

    申请号:US18692912

    申请日:2023-06-08

    Abstract: A 3D stacked semiconductor device, a manufacturing method therefor, and an electronic equipment are disclosed. The 3D stacked semiconductor device includes a plurality of transistors distributed in different layers and stacked along a direction perpendicular to a base substrate; a word line penetrating through the transistors of the different layers; and a plurality of protective layers corresponding to the plurality of transistors respectively; wherein each transistor includes a semiconductor layer surrounding a side wall of the word line, a gate insulation layer disposed between the side wall of the word line and the semiconductor layer, a plurality of semiconductor layers of the plurality of transistors are disposed at intervals in a direction in which the word line extends; each of the protective layers respectively surrounds and covers an outer side wall of a corresponding semiconductor layer, and two adjacent protective layers are disconnected from each other.

    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR, AND DYNAMIC RANDOM ACCESS MEMORY AND ELECTRONIC DEVICE

    公开(公告)号:US20240389306A1

    公开(公告)日:2024-11-21

    申请号:US18691823

    申请日:2022-09-23

    Abstract: The semiconductor device includes: a substrate; a plurality of memory cell columns, wherein each memory cell column includes a plurality of memory cells, arranged and stacked on one side of the substrate in a first direction, and the plurality of memory cell columns are arranged on the substrate in a second direction and in a third direction to form an array; the memory cells each include a transistor and a capacitor, the transistor including a semiconductor layer and a gate, and semiconductor layer includes a source region, an inversion channel region and a drain region; a plurality of bit lines, extending in the first direction, wherein the source regions of the transistors of the plurality of memory cells in two adjacent memory cell columns in the second direction, are all connected to one bit line; and a plurality of word lines, extending in the third direction.

    Semiconductor device, manufacturing method therefor, and electronic device

    公开(公告)号:US12238918B1

    公开(公告)日:2025-02-25

    申请号:US18754418

    申请日:2024-06-26

    Abstract: Provided are a semiconductor device and manufacturing method thereof, and an electronic device. The semiconductor device includes multiple storage cells distributed in a direction perpendicular to a base substrate, the multiple storage cells include multiple transistors and capacitors distributed in different layers and stacked in the direction perpendicular to the base substrate; a word line penetrating different layers and extending in the direction perpendicular to the base substrate; a transistor includes a first source/drain electrode, a second source/drain electrode and a semiconductor layer surrounding a sidewall of the word line; first insulating layers and conductive layers alternately distributed in the direction perpendicular to the base substrate, at least one first hole penetrating the different layers; and the second electrode of the capacitor includes an inner electrode disposed in the first hole on the first electrode.

    Semiconductor Memory Device, Manufacturing Method Thereof And Electronic Device

    公开(公告)号:US20230320071A1

    公开(公告)日:2023-10-05

    申请号:US18141107

    申请日:2023-04-28

    CPC classification number: H10B12/30 H10B12/03 H10B12/05

    Abstract: A semiconductor memory device and a manufacturing method thereof, a reading/writing method, an electronic device and a memory circuit are provided. A transistor is provided in each memory cell in the semiconductor memory device. A gate electrode and an auxiliary electrode are provided in the transistor, and the auxiliary electrode is electrically connected to a drain electrode. During a writing operation, a first voltage is applied to the gate electrode through a word line, and an electrical signal is applied to a source electrode through a bit line according to the external input data. During a reading operation, a second voltage is applied to the auxiliary electrode through the word line by using the influence of the voltage on the auxiliary electrode on the threshold voltage of the transistor (the size of the second voltage is between the threshold voltage of the transistor when storing “1” and the threshold voltage of the transistor when storing “0”), and then the data is read by detecting the size of the output current of the field effect transistor.

    Memory and Manufacturing Method Thereof, and Electronic Device

    公开(公告)号:US20230320070A1

    公开(公告)日:2023-10-05

    申请号:US18139766

    申请日:2023-04-26

    CPC classification number: H10B12/30 H10B12/03 H10B12/05

    Abstract: A memory comprises a substrate, and word lines, bit lines and memory cells located on one side of the substrate. Each of the memory cells comprises a transistor comprising: a semiconductor layer comprising a source contact region, a channel region and a drain contact region connected sequentially; a primary gate electrically connected to one of the word lines; a source electrically connected to one of the bit lines and the source contact region of the semiconductor layer, respectively; a drain electrically connected to the drain contact region of the semiconductor layer; and a secondary gate electrically connected to the drain, wherein an orthographic projection of the primary gate on the substrate and an orthographic projection of the secondary gate on the substrate are at least partially overlapped with an orthographic projection of the channel region of the semiconductor layer on the substrate, respectively.

    Semiconductor memory device, manufacturing method thereof and electronic device

    公开(公告)号:US11985811B2

    公开(公告)日:2024-05-14

    申请号:US18141107

    申请日:2023-04-28

    CPC classification number: H10B12/30 H10B12/03 H10B12/05

    Abstract: A semiconductor memory device and a manufacturing method thereof, a reading/writing method, an electronic device and a memory circuit are provided. A transistor is provided in each memory cell in the semiconductor memory device. A gate electrode and an auxiliary electrode are provided in the transistor, and the auxiliary electrode is electrically connected to a drain electrode. During a writing operation, a first voltage is applied to the gate electrode through a word line, and an electrical signal is applied to a source electrode through a bit line according to the external input data. During a reading operation, a second voltage is applied to the auxiliary electrode through the word line by using the influence of the voltage on the auxiliary electrode on the threshold voltage of the transistor (the size of the second voltage is between the threshold voltage of the transistor when storing “1” and the threshold voltage of the transistor when storing “0”), and then the data is read by detecting the size of the output current of the field effect transistor.

    Memory and manufacturing method thereof, and electronic device

    公开(公告)号:US11956943B2

    公开(公告)日:2024-04-09

    申请号:US18139766

    申请日:2023-04-26

    CPC classification number: H10B12/30 H10B12/03 H10B12/05

    Abstract: A memory comprises a substrate, and word lines, bit lines and memory cells located on one side of the substrate. Each of the memory cells comprises a transistor comprising: a semiconductor layer comprising a source contact region, a channel region and a drain contact region connected sequentially; a primary gate electrically connected to one of the word lines; a source electrically connected to one of the bit lines and the source contact region of the semiconductor layer, respectively; a drain electrically connected to the drain contact region of the semiconductor layer; and a secondary gate electrically connected to the drain, wherein an orthographic projection of the primary gate on the substrate and an orthographic projection of the secondary gate on the substrate are at least partially overlapped with an orthographic projection of the channel region of the semiconductor layer on the substrate, respectively.

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