公开(公告)号：AU3282289A

公开(公告)日：1989-10-05

申请号：AU3282289

申请日：1989-03-06

Applicant: CABOT CORP

Inventor： JORDAN MERRILL ,  NEVILLE MATTHEW ,  REZNEK STEVEN R ,  SOUCY BRIAN A ,  MACKAY BRUCE E

IPC: C01B13/34 ,  C01F7/02 ,  C01F7/30 ,  C01F7/32 ,  C01G23/047 ,  C01G25/02 ,  C01B13/14 ,  C01G23/04

Abstract: The present invention includes metal oxide foam particles and a method of making the same. A decomposable metal salt feed solution is injected into a hot atomizing gas. The mixture of hot atomizing gas and feed solution is maintained in the reactor until the feed solution converts to metal oxide foam particles. The metal oxide foam particles have a high specific surface area.

公开(公告)号：AU3549495A

公开(公告)日：1996-05-02

申请号：AU3549495

申请日：1995-09-01

Applicant: CABOT CORP

Inventor： NEVILLE MATTHEW ,  FLUCK DAVID J ,  LUCARELLI MICHAEL A ,  SCHERBER DEBRA LYNN ,  HUNG CHENG-HUNG

IPC: H01L21/304 ,  B24B37/00 ,  C09G1/02 ,  C09K3/14 ,  C23F3/00 ,  B24B1/00

Abstract: A slurry for use in chemical-mechanical polishing of a metal layer comprising high purity fine metal oxide particles uniformly dispersed in a stable aqueous medium.

公开(公告)号：DE708160T1

公开(公告)日：2001-10-11

申请号：DE95306994

申请日：1995-10-03

Applicant: CABOT CORP

Inventor： FLUCH DAVID J ,  HUNG CHENG-HUNG ,  LUCARELLI MICHAEL A ,  NEVILLE MATTHEW ,  SCHERBER DEBRA LYNN

IPC: H01L21/304 ,  B24B37/00 ,  C09G1/02 ,  C09K3/14 ,  C23F3/00

Abstract: A slurry for use in chemical-mechanical polishing of a metal layer comprising high purity fine metal oxide particles uniformly dispersed in a stable aqueous medium.

公开(公告)号：DE68922732T2

公开(公告)日：1995-09-14

申请号：DE68922732

申请日：1989-03-06

Applicant: CABOT CORP

Inventor： JORDAN MERRILL ,  NEVILLE MATTHEW ,  REZNEK STEVEN ,  SOUCY BRIAN ,  MACKAY BRUCE

IPC: C01B13/34 ,  C01F7/02 ,  C01F7/30 ,  C01F7/32 ,  C01G23/047 ,  C01G25/02 ,  C04B38/00 ,  C01G23/04

Abstract: The present invention includes metal oxide foam particles and a method of making the same. A decomposable metal salt feed solution is injected into a hot atomizing gas. The mixture of hot atomizing gas and feed solution is maintained in the reactor until the feed solution converts to metal oxide foam particles. The metal oxide foam particles have a high specific surface area.

公开(公告)号：DE68922732D1

公开(公告)日：1995-06-22

申请号：DE68922732

申请日：1989-03-06

Applicant: CABOT CORP

Inventor： JORDAN MERRILL ,  NEVILLE MATTHEW ,  REZNEK STEVEN ,  SOUCY BRIAN ,  MACKAY BRUCE

IPC: C01B13/34 ,  C01F7/02 ,  C01F7/30 ,  C01F7/32 ,  C01G23/047 ,  C01G25/02 ,  C04B38/00 ,  C01G23/04

Abstract: The present invention includes metal oxide foam particles and a method of making the same. A decomposable metal salt feed solution is injected into a hot atomizing gas. The mixture of hot atomizing gas and feed solution is maintained in the reactor until the feed solution converts to metal oxide foam particles. The metal oxide foam particles have a high specific surface area.

公开(公告)号：AU5460898A

公开(公告)日：1998-06-22

申请号：AU5460898

申请日：1997-11-21

Applicant: CABOT CORP

Inventor： STREINZ CHRISTOPHER C ,  NEVILLE MATTHEW ,  GRUMBINE STEVEN K ,  MUELLER BRIAN L

IPC: C09G1/02 ,  C23F3/00

公开(公告)号：AU8013994A

公开(公告)日：1995-05-04

申请号：AU8013994

申请日：1994-10-07

Applicant: CABOT CORP

Inventor： ANAND JOGINDER N ,  LEMAN GREGORY W ,  NEVILLE MATTHEW ,  LUCARELLI MICHAEL A ,  MILLER DENIS G ,  WHITEHOUSE ROBERT S

IPC: C01B33/18 ,  C08K3/36 ,  C09C1/30 ,  C08K9/04 ,  C08L23/02 ,  C08L23/12