公开(公告)号：WO0194253A3

公开(公告)日：2002-04-04

申请号：PCT/US0117020

申请日：2001-05-24

Applicant: CALIENT NETWORKS INC

Inventor： CHONG JOHN MATTHEW

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/02

CPC classification number: G02B6/3584 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/033 ,  B81C1/00182 ,  B81C1/00666 ,  B81C2201/0109 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B26/0841

Abstract: A method for forming a suspend structure with thin film flexible elements is disclosed. In one embodiment, the method etches a trench in a bulk substrate around to be released components. The trench is filled with sacrificial material. The surface of the sacrificial material is planarized. Thin film hinge material is patterned and etched on the surface of the sacrificial material. The bulk substrate is then etched from the backside to pre-release the sacrificial material. The sacrificial material is etched to remove the sacrificial material, thus forming a suspended structure with thin film hinges.

Abstract translation: 公开了一种用薄膜柔性元件形成悬挂结构的方法。 在一个实施例中，该方法蚀刻大块衬底中的沟槽以被释放的部件。 沟槽填充有牺牲材料。 牺牲材料的表面被平坦化。 在牺牲材料的表面上对薄膜铰链材料进行图案化和蚀刻。 然后从背面蚀刻大块衬底以预先释放牺牲材料。 牺牲材料被蚀刻以去除牺牲材料，从而形成具有薄膜铰链的悬挂结构。

公开(公告)号：WO0157902A3

公开(公告)日：2002-03-14

申请号：PCT/US0103760

申请日：2001-02-05

Applicant: CALIENT NETWORKS INC ,  ADAMS SCOTT ,  DAVIS TIM ,  MILLER SCOTT ,  SHAW KEVIN ,  CHONG JOHN MATTHEW ,  LEE SEUNG BOK

Inventor： ADAMS SCOTT ,  DAVIS TIM ,  MILLER SCOTT ,  SHAW KEVIN ,  CHONG JOHN MATTHEW ,  LEE SEUNG BOK

IPC: H01H59/00 ,  H01H67/22 ,  G02B26/08 ,  B81B3/00

CPC classification number: H02N1/008 ,  H01H67/22 ,  H01H2001/0068

Abstract: A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

Abstract translation: 描述了可用于提供关于不同枢转点的结构的解耦旋转的方法和装置。 该装置可以包括安装到框架或基板的一个或多个固定刀片，安装到要移动的每个结构的一个或多个可动刀片以及悬挂结构的挠曲件。 可以为每个自由度设置单独的可动叶片。 当在固定刀片和可动刀片之间施加电压时，静电引力产生向可移动刀片固定的刀片吸引可动刀片的力，导致结构围绕弯曲部旋转。 导致的旋转角度可能与叶片的尺寸，数量和间距，弯曲刚度和施加到叶片的电压差的大小有关。 使用深硅蚀刻制造刀片。