公开(公告)号：EP1381523A4

公开(公告)日：2006-09-06

申请号：EP01975475

申请日：2001-09-25

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU CHONG ,  YAO TZE-JUNG ,  YANG XING

IPC: B81B3/00 ,  B81C1/00 ,  B44C1/22 ,  A61B19/00 ,  B41J2/04 ,  H01L21/00

CPC classification number: B81B3/001 ,  B81C2201/112

Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the cantilever (130) includes downwardly extending plurality of legs (131 and 132) which preventing the substrate (100) from sticking to the cantilever. In another embodiment, the polymer cantilever (215) is prevented from sticking to the substrate (200) by at amortized stick layer (205) on the substrate and during the formation of the cantilever, the stick layer is removed later as a sacrificial layer.

公开(公告)号：AU5389301A

公开(公告)日：2002-05-27

申请号：AU5389301

申请日：2001-04-12

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YAO TZE-JUNG

IPC: B81B1/00 ,  B81C3/00 ,  F16J15/02

Abstract: A micromachined O-ring is described. The O-ring can be formed for use in micromachined microfluidic devices.

公开(公告)号：AU9479501A

公开(公告)日：2002-04-02

申请号：AU9479501

申请日：2001-09-25

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU CHONG ,  YAO TZE-JUNG ,  YANG XING

IPC: B81B3/00 ,  B81C1/00 ,  B44C1/22 ,  B41J2/04 ,  A61B19/00 ,  H01L21/00

Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the polymer cantilever is prevented from sticking to the substrate by at amortized stick layer on the substrate during formation that is later removed as a sacrificial layer. In another embodiment, the cantilever includes downwardly extending legs.