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    METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES
    3.
    发明申请
    METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES 审中-公开
    减少化学扩散的方法，用于连接到亚胺连接物

    公开(公告)号：WO2006116326A3

    公开(公告)日：2007-11-01

    申请号：PCT/US2006015500

    申请日：2006-04-21

    Applicant: CALIFORNIA INST OF TECHN ,  TAI YU-CHONG ,  RODGER DAMIEN C ,  LI WEN ,  TOOKER ANGELA

    Inventor： TAI YU-CHONG ,  RODGER DAMIEN C ,  LI WEN ,  TOOKER ANGELA

    IPC: C23C16/00

    CPC classification number: B05D3/0254 ,  B05D1/60 ,  H01L21/312 ,  H01L21/76801 ,  H01L21/76826 ,  H01L21/76828

    Abstract: Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.

    Abstract translation: 用于改善不良的对二甲苯对聚对二甲苯薄膜或层的粘附性和/或改变聚对二甲苯层的水和化学渗透性的系统和方法。 具有两个或更多个聚对二甲苯层的装置在减压处理室中在高于聚对二甲苯的沉积温度（例如从约室温至几百摄氏度）的温度下加热一段时间（例如， 几个小时到几天）。 已经显示出本发明的方法将不良粘附和/或水渗透膜转化成最佳粘附和/或相对不透水的膜。

    A NORMALLY CLOSED IN-CHANNEL MICRO CHECK VALVE
    5.
    发明申请
    A NORMALLY CLOSED IN-CHANNEL MICRO CHECK VALVE 审中-公开
    正常关闭的通道微型检查阀

    公开(公告)号：WO0121988A9

    公开(公告)日：2002-01-24

    申请号：PCT/US0026391

    申请日：2000-09-25

    Applicant: CALIFORNIA INST OF TECHN ,  TAI YU CHONG ,  WANG XUAN QI

    Inventor： TAI YU-CHONG ,  WANG XUAN-QI

    IPC: F04B43/04 ,  F15C5/00 ,  F16K15/14 ,  F16K99/00

    CPC classification number: F16K99/0001 ,  F04B43/043 ,  F15C5/00 ,  F16K15/148 ,  F16K99/0007 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10S137/907 ,  Y10T137/0491 ,  Y10T137/7879 ,  Y10T137/789

    Abstract: An in-channel check valve assembly (116) is disclosed comprising, an in-channel check valve (100), connected between the front (110) and rear (114) of a channel (102) attached to a silicon substrate (106). The channel may have a width between 10 microns and 400 microns, and the check valve may have a width between about 50 microns and 500 microns. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and the rear portions of the channel. The check valve may include a sealing cap (122) that contacts a valve seat (120) to seal the valve. The valve seat may include a metal layer (130) to separate the contacting surfaces of the valve seat and the sealing cap in the closed position.

    Abstract translation: 公开了一种通道内止回阀组件（116），其包括连接在附接到硅衬底（106）的通道（102）的前部（110）和后部（114）之间的通道内止回阀（100） 。 通道的宽度可以在10微米到400微米之间，止回阀的宽度可以在大约50微米到500微米之间。 止回阀的形状大致为圆形。 止回阀也可以是常闭，即在通道的前部和后部之间没有压差的情况下被密封。 止回阀可以包括接触阀座（120）以密封阀的密封帽（122）。 阀座可以包括金属层（130），以在关闭位置分离阀座和密封盖的接触表面。

    DESIGN OF AN IC-PROCESSED POLYMER NANO-LIQUID CHROMATOGRAPHY SYSTEM ON-A-CHIP AND METHOD OF MAKING IT
    10.
    发明公开
    DESIGN OF AN IC-PROCESSED POLYMER NANO-LIQUID CHROMATOGRAPHY SYSTEM ON-A-CHIP AND METHOD OF MAKING IT 审中-公开
    EXECUTION IC EDITED高分子纳米液系统用于生产芯片和过程

    公开(公告)号：EP1673152A4

    公开(公告)日：2009-04-01

    申请号：EP04786516

    申请日：2004-08-17

    Applicant: CALIFORNIA INST OF TECHN ,  HOPE CITY

    Inventor： TAI YU-CHONG ,  HE QING ,  XIE JUN ,  PANG CHANGLIN ,  LEE TERRY D

    IPC: B01D15/08 ,  G01N30/60 ,  G01N30/64

    CPC classification number: H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

    Abstract: Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, frits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.

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