公开(公告)号：EP1381523A4

公开(公告)日：2006-09-06

申请号：EP01975475

申请日：2001-09-25

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU CHONG ,  YAO TZE-JUNG ,  YANG XING

IPC: B81B3/00 ,  B81C1/00 ,  B44C1/22 ,  A61B19/00 ,  B41J2/04 ,  H01L21/00

CPC classification number: B81B3/001 ,  B81C2201/112

Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the cantilever (130) includes downwardly extending plurality of legs (131 and 132) which preventing the substrate (100) from sticking to the cantilever. In another embodiment, the polymer cantilever (215) is prevented from sticking to the substrate (200) by at amortized stick layer (205) on the substrate and during the formation of the cantilever, the stick layer is removed later as a sacrificial layer.

公开(公告)号：WO9848608A3

公开(公告)日：1999-04-01

申请号：PCT/US9807424

申请日：1998-04-09

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YANG XING

IPC: B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

CPC classification number: B81B3/007 ,  B81B2201/031

Abstract: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections. Anchor structures (420, 430, 440, 450) are disclosed that improve the strength of the microbellows membrane (150). Thermopneumatic actuators having a resistive heater chip are also disclosed.

Abstract translation: 微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量薄膜（150）的强度的锚结构（420,430,440,450）。 还公开了具有电阻加热器芯片的热气动致动器。

公开(公告)号：EP1059979A4

公开(公告)日：2001-05-30

申请号：EP98957706

申请日：1998-11-06

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YANG XING

IPC: B01D39/20 ,  B01D67/00 ,  B01D71/02 ,  B01D71/72 ,  B01D24/00 ,  B01D39/16 ,  B31D3/00 ,  G03F7/12

CPC classification number: B01D67/0088 ,  B01D39/2093 ,  B01D67/0034 ,  B01D67/0062 ,  B01D67/0072 ,  B01D71/02 ,  B01D71/72 ,  B01D2239/0471 ,  B01D2239/0478 ,  B01D2239/10 ,  B01D2325/021

Abstract: A micromachined membrane particle filter is formed by etching a silicon substrate (104) and silicon nitride overlayers (100 and 102) and coating the entire membrane structure with a layer of parylene (150) for the purposes of imparting the characteristics of strength and biocompatibility.

公开(公告)号：EP1030733A4

公开(公告)日：2000-08-30

申请号：EP98906253

申请日：1998-02-05

Applicant: CALIFORNIA INST OF TECHN

Inventor： DESAI AMISH ,  YANG XING ,  TAI YU-CHONG ,  MARZLUFF ELAINE ,  BOCKENKAMP DIRK ,  MAYO STEPHEN

IPC: B01F5/00 ,  B01F5/02 ,  B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00

CPC classification number: B01L3/5027 ,  B01F5/0256 ,  B01F5/0602 ,  B01F13/0059 ,  B01F2005/0025 ,  B01F2005/0621 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00797 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/0883 ,  B01L2400/0487 ,  B01L2400/084 ,  Y10S366/03

Abstract: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 νs. The mixer chip contains two tee mixers (120, 130) connected by one channel which serves a reaction chamber (140). Each tee mixer consists of opposing channels (110, 120) where liquids meet head-on and exit into a third channel (150) forming the base of a 'T'.

Abstract translation: 用于研究化学反应动力学的微机械高雷诺数亚毫秒液体混合器。 这种大型微机械硅混合器能够以100νs的间隔启动和熄灭化学反应。 混合器芯片包含两个T形混合器（120,130），其通过一个用于反应室（140）的通道连接。 每个T形混合器由相对的通道（110,120）组成，在这些通道中液体迎头相接并流出到形成“T”的基部的第三通道（150）中。

公开(公告)号：AU1522299A

公开(公告)日：1999-05-31

申请号：AU1522299

申请日：1998-11-12

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YANG XING ,  GROSJEAN CHARLES ,  WANG XUAN-QI

IPC: B81B3/00 ,  B81B7/00 ,  F04B19/24 ,  F04B43/04 ,  F15C5/00 ,  F16K99/00 ,  F16K27/00

公开(公告)号：AU1389799A

公开(公告)日：1999-05-31

申请号：AU1389799

申请日：1998-11-06

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YANG XING

IPC: B01D39/20 ,  B01D67/00 ,  B01D71/02 ,  B01D71/72 ,  B01D24/00 ,  B31D3/00

Abstract: A micromachined membrane particle filter is formed by making holes in a silicon derivative overlayer and coating over the holes with Parylene.

公开(公告)号：AU9479501A

公开(公告)日：2002-04-02

申请号：AU9479501

申请日：2001-09-25

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU CHONG ,  YAO TZE-JUNG ,  YANG XING

IPC: B81B3/00 ,  B81C1/00 ,  B44C1/22 ,  B41J2/04 ,  A61B19/00 ,  H01L21/00

Abstract: An anti stiction structure for cantilever formation technique. In one embodiment, the polymer cantilever is prevented from sticking to the substrate by at amortized stick layer on the substrate during formation that is later removed as a sacrificial layer. In another embodiment, the cantilever includes downwardly extending legs.

公开(公告)号：AU6152498A

公开(公告)日：1998-08-25

申请号：AU6152498

申请日：1998-02-05

Applicant: CALIFORNIA INST OF TECHN

Inventor： DESAI AMISH ,  YANG XING ,  TAI YU-CHONG ,  MARZLUFF ELAINE ,  BOCKENKAMP DIRK ,  MAYO STEPHEN

IPC: B01F5/00 ,  B01F5/02 ,  B01F5/06 ,  B01F13/00 ,  B01J19/00 ,  B01L3/00

Abstract: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 mu s. The mixer chip contains two tee mixers connected by one channel which serves as a reaction chamber. Each tee mixer consists of opposing channels where liquids meet head-on and exit into a third channel forming the base of a "T".

公开(公告)号：AU6969298A

公开(公告)日：1998-11-24

申请号：AU6969298

申请日：1998-04-09

Applicant: CALIFORNIA INST OF TECHN

Inventor： TAI YU-CHONG ,  YANG XING

IPC: B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

Abstract: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.