Abstract:
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.
Abstract:
A microfluidic system with on-chip pumping which can be used for liquid chromatography and also electrospray ionization mass spectrometry and which provides improved efficiency, better integration with sensors, improved portability, reduced power consumption, and reduced cost. The system can include (A) a main chip comprising: a substrate having a front face and a back face; a chromatography column on the front face of said substrate, wherein said column has an inlet and an outlet; an electrospray ionization (ESI) nozzle on the front face of said substrate, wherein said nozzle has an inlet and an outlet, and wherein the inlet of the nozzle is microfluidically coupled to the outlet of the column; one or more pump systems on the front face of said substrate comprising a pump chamber, one or more electrodes, and an outlet microfluidically coupled to the inlet of said column; and (B) a reservoir chip comprising a front surface and a back surface, wherein the reservoir chip has one or more cavities in the back surface which when disposed next to the front surface of the main chip extends the volume of the pump chamber of one of the pump system. Microfabrication can be used to prepare the chips, which can be assembled with a cover and inserted into a testing jig for electronic control and mass spectral analysis. Peptide separations are demonstrated which compete with present commercial systems.
Abstract:
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel and the cavity region. Additionally, the device includes a first capacitor electrode coupled to the membrane, a second capacitor electrode coupled to the cavity region and physically separated from the first capacitor electrode by at least the cavity region, and an electrical power source coupled between the first capacitor electrode and the second capacitor electrode and causing an electric field at least within the cavity region. The polymer based membrane includes a polymer.
Abstract:
A surface-micromachined mass flow controller (MFC) comprises an electrostatically actuated microvalve integrated with a thermal flow sensor. The microvalve comprises a normally-open diaphragm defining an aperture allowing fluid communication between first and second flow channels. The diaphragm includes a second electrode actuable toward a valve seat including a first electrode. Fabricated utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated.
Abstract:
A surface-micromachined mass flow controller (MFC) comprises an electrostatically actuated microvalve integrated with a thermal flow sensor. The microvalve comprises a normally-open diaphragm defining an aperture allowing fluid communication between first and second flow channels. The diaphragm includes a second electrode actuable toward a valve seat including a first electrode. Fabricated utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated.
Abstract:
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel and the cavity region. Additionally, the device includes a first capacitor electrode coupled to the membrane, a second capacitor electrode coupled to the cavity region and physically separated from the first capacitor electrode by at least the cavity region, and an electrical power source coupled between the first capacitor electrode and the second capacitor electrode and causing an electric field at least within the cavity region. The polymer based membrane includes a polymer.
Abstract:
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.