公开(公告)号：EP1212602A4

公开(公告)日：2003-04-02

申请号：EP00959338

申请日：2000-08-22

Applicant: CANDESCENT INTELLECTUAL PROP

Inventor： FIELD JOHN E ,  ELLOWAY DONALD J ,  PONG CHUNGDEE

IPC: G01B11/02 ,  G01B11/08 ,  G01B11/22 ,  G01B11/30 ,  H01J9/02 ,  H01J9/42 ,  G01N21/55

CPC classification number: G03F7/70791 ,  G01B11/02

Abstract: Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object (60) such as part (10) of a flat-panel display. The dimensional information includes the average diameter of openings (62) in the object, the average density of the openings, and the average thickness of a layer (64) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities (146 and 148), of crossing lines (140 and 142) in such an object.

公开(公告)号：EP0972428A4

公开(公告)日：2005-05-18

申请号：EP98907557

申请日：1998-02-27

Applicant: CANDESCENT INTELLECTUAL PROP

Inventor： BRIGHAM KRISTIN ,  PONG CHUNGDEE

IPC: H01L21/302 ,  H01J9/02 ,  H01L21/311 ,  H01L21/3213 ,  H05B33/10 ,  B29D11/00 ,  B44C1/22

CPC classification number: H01J9/025 ,  H01J2237/32 ,  H01J2237/334 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/32136 ,  H01L21/32139

Abstract: A method is provided for etching an etch layer using a polycarbonate layer as a mask. The method includes placing an etch structure (80) in a reaction chamber (111), the etch structure including an etch layer (86) underlying a polycarbonate layer (88), the polycarbonate layer having apertures (90). The etch layer is then eteched using a low pressure-high density plasma generated at a pressure in the range of approximately 1 to 30 millitorr where the ionized particle concentration is at least 10 ions/cm and where the ionized particle concentration is substantially equal throughout the volume of the reaction chamber. To increase the etch rate, the etch structure can be heated or biased. To decrease the etch rate, an inert gas can be added to the process gas mixture used to form the plasma.

公开(公告)号：EP0992061A4

公开(公告)日：2002-05-29

申请号：EP98921171

申请日：1998-05-13

Applicant: CANDESCENT INTELLECTUAL PROP

Inventor： PONG CHUNGDEE ,  PORTER JOHN D ,  FAHLEN THEODORE S ,  CURTIN CHRISTOPHER J ,  NEIMEYER ROBERT G ,  LUDWIG PAUL N

IPC: H01J9/18 ,  H01J9/24 ,  H01J9/26 ,  H01J17/16 ,  H01J29/02 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H01J61/30 ,  H01J63/02

CPC classification number: H01J61/305 ,  H01J9/185 ,  H01J9/242 ,  H01J9/261 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8665

Abstract: A flat panel display includes a wall (103-102) which is held in place by a structure formed either on the faceplate (101) or on the backplate (210). In one embodiment, the supporting structure is formed by two adjacent walls that forms a slot which mechanically restrains the wall. In another embodiment, a slot is formed within the faceplate and the walls of the slot mechanically restrain the wall. In one embodiment, the wall segments are inserted into supporting structures that mechanically restrain each wall segment. In another embodiment, a UV curable adhesive is used to maintain walls in their proper alignment and position. The bond electrically connects conductive lines located on the wall and conductive lines located on the faceplate and maintains the wall in proper alignment.