公开(公告)号：DE69530373T2

公开(公告)日：2004-02-12

申请号：DE69530373

申请日：1995-11-20

Applicant: CANDESCENT TECH CORP

Inventor： SPINDT J ,  FIELD E ,  HAVEN A ,  PONG CHUNGDEE

IPC: H01J9/24 ,  H01J9/14 ,  H01J29/02 ,  H01J29/08 ,  H01J29/32 ,  H01J29/46 ,  H01J29/62 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H01J29/82

公开(公告)号：AU7067600A

公开(公告)日：2001-03-26

申请号：AU7067600

申请日：2000-08-22

Applicant: CANDESCENT TECH CORP

Inventor： FIELD JOHN E ,  ELLOWAY DONALD J ,  PONG CHUNGDEE

IPC: G01B11/02 ,  G01B11/08 ,  G01B11/22 ,  G01B11/30 ,  H01J9/02 ,  H01J9/42 ,  G01N21/55

Abstract: Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object (60) such as part (10) of a flat-panel display. The dimensional information includes the average diameter of openings (62) in the object, the average density of the openings, and the average thickness of a layer (64) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities (146 and 148), of crossing lines (140 and 142) in such an object.

公开(公告)号：DE69530373D1

公开(公告)日：2003-05-22

申请号：DE69530373

申请日：1995-11-20

Applicant: CANDESCENT TECH CORP

Inventor： SPINDT J ,  FIELD E ,  HAVEN A ,  PONG CHUNGDEE

IPC: H01J9/24 ,  H01J9/14 ,  H01J29/02 ,  H01J29/08 ,  H01J29/32 ,  H01J29/46 ,  H01J29/62 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H01J29/82

公开(公告)号：AT237869T

公开(公告)日：2003-05-15

申请号：AT95940804

申请日：1995-11-20

Applicant: CANDESCENT TECH CORP

Inventor： SPINDT CHRISTOPHER J ,  FIELD JOHN E ,  HAVEN DUANE A ,  PONG CHUNGDEE

IPC: H01J9/24 ,  H01J9/14 ,  H01J29/02 ,  H01J29/08 ,  H01J29/32 ,  H01J29/46 ,  H01J29/62 ,  H01J29/86 ,  H01J29/87 ,  H01J31/12 ,  H01J29/82