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公开(公告)号：DE69419688D1
公开(公告)日：1999-09-02
申请号：DE69419688
申请日：1994-09-30
Applicant: CANON KK
Inventor： AKUTSU KOTARO , OSANAI EIJI , KAMATA SHIGETO
IPC: B23Q1/00 , B23Q1/26 , B23Q1/38 , F16C29/02 , F16C32/06 , G03F7/20 , H01L21/027 , H01L21/68 , H01L21/687 , H01L21/00
Abstract: A tare supporting apparatus supports the tare of a structure required to have very high surface precision, without affecting the surface precision of the structure. For that, the tare supporting apparatus comprises a driving unit for moving a driven body in the direction of gravity with respect to a base, and a supporting unit for supporting the tare of the driven body at a position after driven, wherein the driving unit and supporting unit are so arranged that a drive force of the driving unit and a support force of the supporting unit are on a same axis.
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公开(公告)号：DE69419688T2
公开(公告)日：1999-12-23
申请号：DE69419688
申请日：1994-09-30
Applicant: CANON KK
Inventor： AKUTSU KOTARO , OSANAI EIJI , KAMATA SHIGETO
IPC: B23Q1/00 , B23Q1/26 , B23Q1/38 , F16C29/02 , F16C32/06 , G03F7/20 , H01L21/027 , H01L21/68 , H01L21/687 , H01L21/00
Abstract: A tare supporting apparatus supports the tare of a structure required to have very high surface precision, without affecting the surface precision of the structure. For that, the tare supporting apparatus comprises a driving unit for moving a driven body in the direction of gravity with respect to a base, and a supporting unit for supporting the tare of the driven body at a position after driven, wherein the driving unit and supporting unit are so arranged that a drive force of the driving unit and a support force of the supporting unit are on a same axis.
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公开(公告)号：JP2001025227A
公开(公告)日：2001-01-26
申请号：JP19407499
申请日：1999-07-08
Applicant: CANON KK
Inventor： MATSUKI TOSHIO , KAMATA SHIGETO
Abstract: PROBLEM TO BE SOLVED: To efficiently remove heat from a linear motor coil without damaging protective film on the surface of the coil by providing a jacket with double structure composed of an inner jacket and an outer jacket and letting different types of coolants to flow through the inner jacket and the outer jacket of the coil. SOLUTION: A double jacket is constituted, for example, of a coil inner jacket 4 and 4' which embraces a coil 1 and is supplied in its internal space with a coolant and an outer jacket 9 and 9', which is supplied outside the jacket with coolant. Inert gas is let to flow through the coil inner jacket 4 and 4' so that the protective film on the coil is not damaged. A coolant, regardless of its being activated or inert, satisfactory in cooling efficiency is let to flow through the outer jacket 9 and 9'. Thus insufficiency in cooling capability due to adoption of an inert coolant inferior in cooling capability for the coil inner jacket 4 and 4' can be made up by letting coolant satisfactory in cooling efficiency flow through the jacket 9 and 9'.
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公开(公告)号：JPH06254734A
公开(公告)日：1994-09-13
申请号：JP6619793
申请日：1993-03-02
Applicant: CANON KK
Inventor： SAKINO SHIGEO , KAMATA SHIGETO
IPC: B23Q1/00 , B23Q1/40 , B23Q1/62 , B23Q3/18 , B23Q5/28 , B65G47/90 , B65G49/07 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/68 , H02K41/02 , B23Q1/18
Abstract: PURPOSE:To improve the positioning precision of an XY stage device and accelerate the positioning speed. CONSTITUTION:An XY stage device E1 is constituted of a Y stage 4 reciprocatable along the guide face 8a of a guide member 8 fixed to a base plate 1 and an X stage 7 reciprocatable together with it and reciprocatable along the guide face of a center member 4c. The Y stage 4 is moved by a pair of Y linear motors 2, 3, and the X stage 7 is moved by a pair of X linear motors 5 supported by the Y stage 4 along the center member 4c of the Y stage 4. The Y stage 4 and the X stage 7 are supported on the base plate 1 via individual static pressure bearing pads respectively.
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公开(公告)号：JP2003092060A
公开(公告)日：2003-03-28
申请号：JP2001281635
申请日：2001-09-17
Applicant: CANON KK
Inventor： OKI KAZUHIRO , KAMATA SHIGETO , KIMURA AKIHIRO
Abstract: PROBLEM TO BE SOLVED: To manufacture an electron source in which defects in the manufacturing process are reduced, and small size and simplicity of operation are realized, and manufacturing speed is improved, and which is suitable for mass production and has an excellent electron emitting characteristics. SOLUTION: The manufacturing device processes the electron source substrate 10 on which the electron source is formed, and comprises an inlet port 15 of a gas, an exhaust port 16 of the gas, and a vessel 12 for covering a part of the region of the electron source substrate 10, and a seal member 18 is provided between the electron source substrate 10 and the vessel 12. This seal member 18 can be either of a metal, an alloy or glass. It is optional that the vessel 12 comprises a temperature adjusting means for adjusting the temperature of the seal member and fusing the seal member 18 and then cooling and solidifying it.
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Patent Agency Ranking
公开(公告)号：JP2003086102A
公开(公告)日：2003-03-20
申请号：JP2001273943
申请日：2001-09-10
Applicant: CANON KK
Inventor： KAMATA SHIGETO , OKI KAZUHIRO , KIMURA AKIHIRO
Abstract: PROBLEM TO BE SOLVED: To realize manufacturing an electron source with an excellent electron emission characteristics capable of miniaturizing, simplifying the operability and enhancing the manufacturing speed and appropriate for mass production that can readily comprise a heating means or a cooling means to a support for supporting a large substrate. SOLUTION: For the electron source substrate 10 with wiring, insulators and electron emitting elements formed on it, a vacuum chamber 12 for covering a part of the electron source substrate 10 and the support 207 for mounting the electron emitting base 10 are arranged and a flat plate 210 having a difference of a coefficient of linear expansion with the support 207 no more than the predetermined value is laminated on the face of the support 207 opposite to the electron source substrate 10, a heater 212 and a coolant flow path 213 are arranged on the laminate contacting face with the support 207, and a seal means is arranged around the coolant flow path 213.
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公开(公告)号：JPH08137550A
公开(公告)日：1996-05-31
申请号：JP29586794
申请日：1994-11-04
Applicant: CANON KK
Inventor： KAMATA SHIGETO
Abstract: PURPOSE: To prevent the deterioration in positioning accuracy that is caused by the temperature change. CONSTITUTION: A mobile stage 2 is moved by a lenear motor 3, and a laser interferometer 4 detects the present position of the stage 2 from the reflected light of a mirror 2a and feeds this detected position to a driver 3a of the motor 3. At the same time, the temperature of the stage 3 is detected by a temperature sensor 5 and this detection output is supplied to a computing element 5b. Then the change of distance between a positioning object matter W1 and the reflecting surface of the mirror 2a is calculated and supplied to the driver 3a to correct the driving value of the motor 3.
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公开(公告)号：JPH07302747A
公开(公告)日：1995-11-14
申请号：JP11341194
申请日：1994-05-02
Applicant: CANON KK
Inventor： KAMATA SHIGETO
Abstract: PURPOSE:To more effectively avert the unfavorable effect on the alignment precision due to the heat generated by the title driving device. CONSTITUTION:The title driving device used for a precise alignment device is provided with a driving means 1 making precise alignment, a temperature measuring means 2, 5 for measuring the temperature at least in one position of the driving means 1 or nearby position thereof, a cooling means 3 recovering the heat generated from the driving means 1 as well as a cooling control means 4 controlling the cooling down capacity of the cooling means 3 corresponding to the temperatures measured by the temperature measuring means 2, 5.
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公开(公告)号：JPH07302124A
公开(公告)日：1995-11-14
申请号：JP11341294
申请日：1994-05-02
Applicant: CANON KK
Inventor： KAMATA SHIGETO
Abstract: PURPOSE:To prevent the adverse influence given to the positioning accuracy due to the heating of a driving device by measuring the temperature of a driving means or the temperature of a place near the driving means at least at a single point and controlling the temperature of a refrigerant that is circulated by a cooling device based on the measured temperature. CONSTITUTION:A controller 14 gives a command to a driver 15 so that a positioning subject 10 is set at a prescribed position based on the position data on a position measurement means 12. Thus the driver 15 drives the driving means 1a and 1b. Under such conditions, the temperature varies if the means 1a and 1b generate the heat. A temperature measurement means 2 measures the temperature by a temperature sensor 5 placed at the means 1b (1a), and a temperature control means 4 controls the temperature of a refrigerant 3a that is circulated by a cooling device 6. Thus the temperature changes of both means 1a and 1b can be eliminated. Then the thermal deformation never occurs since the temperature change of the means 1b is eliminated. Therefore the change of distance is eliminated between the subject 10 and a position standard 11 and no error is caused in measurement of positions.
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公开(公告)号：JP2003086086A
公开(公告)日：2003-03-20
申请号：JP2001270917
申请日：2001-09-06
Applicant: CANON KK
Inventor： KIMURA AKIHIRO , OKI KAZUHIRO , KAMATA SHIGETO
Abstract: PROBLEM TO BE SOLVED: To manufacture an electron source with high electron emission characteristics, enhancing stability of voltage applied to an element formed on a substrate, miniaturizing the device, simplifying operativeness, increasing manufacturing speed, and suitable for mass production. SOLUTION: This electron source is equipped with a support 11 supporting a substrate 10 in which an electric conductor is formed; a vacuum container 12 covering a part of the substrate 10; a means applying voltage to the electric conductor; a means detecting temperature of the support 11; and a means adjusting the temperature of the support 11, and after the temperature of the support 11 is stabilized in a specified value, a voltage applying probe is connected to wiring formed on the substrate 10, and then voltage is applied to the electric conductor.
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