公开(公告)号：JP2000277841A

公开(公告)日：2000-10-06

申请号：JP8467599

申请日：1999-03-26

Applicant: OMI TADAHIRO ,  CANON KK

Inventor： OMI TADAHIRO ,  HIRAYAMA MASAKI ,  SHINOHARA HISAKUNI ,  TANAKA NOBUYOSHI ,  SUZUKI NOBUMASA ,  OSAWA MASARU

IPC: H01L21/027 ,  G03F7/20 ,  H01S3/03 ,  H01S3/0973 ,  H01S3/0975 ,  H01S3/225

Abstract: PROBLEM TO BE SOLVED: To achieve uniform laser emission with extremely suppressed energy loss by realizing plasma excitation which is uniform in the overall longitudinal direction of a laser emission. SOLUTION: An excimer laser gas in a laser tube 2 is excited by microwave introduced from a wave guide 1, and electric field concentration is caused at a slit-shaped gap 3 provided to a plate-like member 11c to generate a plasma discharge. Phases of this plasma light are made uniform and resonate, and an excimer laser beam is generated. Thereby plasma excitation which is uniform in the overall longitudinal direction of a laser emission direction is realized, so that uniform laser emission with extremely suppressed energy loss is made possible.

公开(公告)号：JPH07282459A

公开(公告)日：1995-10-27

申请号：JP3842195

申请日：1995-02-27

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： KUWAYAMA TETSUO ,  TANIGUCHI TAKASATO ,  ENDO KIYONOBU ,  HOSHI HIROAKI ,  NAKAMURA YASUO ,  OSAWA MASARU

IPC: G02B5/18 ,  G11B7/09 ,  G11B7/135

Abstract: PURPOSE:To obtain an optical head device capable of well detecting a tracking error. CONSTITUTION:The luminous flux emitted from a light source 11 is condensed to an information recording surface 20 by an objective lens 18 and the reflected luminous flux from the information recording surface 20 is introduced by a diffraction grating 15 disposed in an optical path from a light source 11 to the information recording surface 20 to a photodetector 23, by which detection or recording of information is executed. A collimator lens 12 which converts the luminous flux emitted from the light source 11 to parallel luminous fluxes and makes these parallel luminous fluxes incident on the objective lens 18 is disposed between the light source 11 and the objective lens 18 of the optical head device. The diffraction grating 15 is arranged into the optical path of the parallel luminous fluxes heading toward the objective lens 18 from the collimator lens 12 and the objective lens 18 is moved in a direction perpendicular to the optical axis, by which autotracking to the information recording surface 20 is executed.

公开(公告)号：JPH07262602A

公开(公告)日：1995-10-13

申请号：JP3842595

申请日：1995-02-27

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： KUWAYAMA TETSUO ,  TANIGUCHI TAKASATO ,  ENDO KIYONOBU ,  HOSHI HIROAKI ,  NAKAMURA YASUO ,  OSAWA MASARU

IPC: G02B5/18 ,  G11B7/09 ,  G11B7/135

Abstract: PURPOSE:To provide an optical head device with high utility efficiency of light by providing a lambda/4 plate between a diffraction grating and an information recording surface and setting an angle between a reflecting optical flux from the information recording surface and diffracted light beams by the diffraction grating to a nearly right angle. CONSTITUTION:A beam outgoing from a semiconductor laser 11 becomes parallel rays of light by a collimate lens to be incident on a light splitter 13. The light splitter 13 consists of two sheets of parallel plates 14, 16 and the diffraction grating 15 held between them. The diffraction grating 15 is formed so that the diffraction efficiency becomes nearly 100% for an S polarization and nearly 0% for a P polarization. Since the beam from the semiconductor laser 11 is set to the P polarization for the light splitter 13, an incident beam hardly is diffracted to be incident on the lambda/4 plate 17. Thereafter, the incident beam becomes a circular polarization, and the reflecting optical flux from the information recording surface becomes the S polarization in the direction orthogonally intersecting with the incident time. At this time, by setting an angle between the reflecting optical flux and the diffracted light beams by the diffraction grating to a nearly right angle, the utility efficiency of light is enhanced, and the inclination of the luminous flux is prevented from being changed.

公开(公告)号：JPH07225114A

公开(公告)日：1995-08-22

申请号：JP8640694

申请日：1994-04-25

Applicant: CANON KK

Inventor： IWAMOTO KAZUNORI ,  OSAWA MASARU ,  SAITO KENJI

IPC: G01B9/02 ,  G01B11/00 ,  G01J9/00 ,  H01L21/027

Abstract: PURPOSE:To provide a laser interference measuring instrument which can accurately measure laser interference without receiving any influence from its using atmosphere. CONSTITUTION:A laser interference measuring instrument is provided with a reference vacuum tube 106, polarizing shear plate 101 which causes two laser beams 12 to interfere with each other, and receiver 21 which receives an interference beam having the wavelength information of the laser beams 12. A vacuum pump 110 is connected to the tube 106. The refractive index in the tube 106 is maintained at '1' by evacuating the tube 106 with the pump 110.

公开(公告)号：JPH07220291A

公开(公告)日：1995-08-18

申请号：JP2043195

申请日：1995-02-08

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： HOSHI HIROAKI ,  TANIGUCHI TAKASATO ,  ENDO KIYONOBU ,  KUWAYAMA TETSUO ,  OSAWA MASARU ,  NAKAMURA YASUO

IPC: G11B7/09 ,  G11B7/135

Abstract: PURPOSE:To facilitate the adjustment of position of a photodetector without affecting an incident light beam on an information recording surface by making an optical divider three frame gratings having grating patterns different from each other and providing four photodetectors. CONSTITUTION:A diffraction grating on an optical divider 111 is divided into frame gratings 112a, 112b, 113 on which grating patterns different from each other are formed and the grating 113 is formed symmetrically about the neighboring direction AA' of a track. A light flux from the grating 113 is guided within the optical divider and detected by means of a bisected photodetector 114. A dividing line between the gratings 112a and 112b is coincident with the neighboring direction AA' of a track and the respective diffracted beams are detected by photodetectors 115 and 116. A reproducing information signal is obtained as the total sum of the outputs of these photodetectors, a focusing error signal is obtained by calculating the difference of two output signals from the bisected photodetector 114a, 114b and a tracking.error signal is obtained by detecting light quantities from the gratings 112a, 112b by the corresponding detectors 116, 115 and calculating the difference of the output signals.

公开(公告)号：JPH07130636A

公开(公告)日：1995-05-19

申请号：JP28594193

申请日：1993-10-20

Applicant: CANON KK

Inventor： CHITOKU KOICHI ,  OSAWA MASARU ,  SAITO KENJI ,  HASEGAWA MASANORI

IPC: G03F9/00 ,  H01L21/027

Abstract: PURPOSE:To miniaturize and simplify the whole equipment, by detecting positional deviation in the lateral direction and the surface interval direction by using one equipment, when positional relations of a mask and a wafer in the interval direction and the surface interval are detected. CONSTITUTION:A position deviation detection alignment (AA) mark 41 and surface interval detection alignment (AF) marks 4, 4', 5, 5' are formed on a mask 2 surface. An AA mark 42 is formed on a wafer 3 surface. A photo detection means detects position data of luminous fluxes 51, 52 on a specified surface which fluxes are diffracted by the AF marks 4, 4', reflected by the wafer 3 surface, and diffracted by the AF marks 5, 5'. Further the photo detection means detects position data of luminous flux 53 on a specified surface which flux is diffracted by the AA mark 41 and the AA mark 42. The surface interval between the mask 2 and the wafer 3 and relative positional deviation are detected by using a signal from the position detection means. Thereby a position detector wherein the whole equipment is miniaturized and simplified can be realized.

公开(公告)号：JPS6273433A

公开(公告)日：1987-04-04

申请号：JP21304285

申请日：1985-09-25

Applicant: CANON KK

Inventor： ENDO KIYONOBU ,  KUWAYAMA TETSUO ,  HASEGAWA MITSUHIRO ,  HOSHI HIROAKI ,  OSAWA MASARU ,  YAMAMOTO MASAKUNI ,  TANIGUCHI NAOSATO

IPC: G11B7/09

Abstract: PURPOSE:To attain a detection with high sensitivity by detecting a change in the light intensity distribution of split far field patterns photoelectrically and obtaining a tracking error signal from the phase difference of a detection signal. CONSTITUTION:When the center axis of an information track and the center of a light spot are not coincident, the symmetry of the far field pattern is unbalanced and in detecting a light photoelectrically at the light-receiving sections 13, 14 of a photodetector, a phase difference is caused in the detection signal. A tracking error signal is obtained from the phase difference signal. Thus, high density detection is attained.

公开(公告)号：JPS61233441A

公开(公告)日：1986-10-17

申请号：JP7359185

申请日：1985-04-09

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： KUWAYAMA TETSUO ,  OSAWA MASARU ,  TANIGUCHI NAOSATO ,  ENDO KIYONOBU ,  HOSHI HIROAKI ,  NAKAMURA YASUO

IPC: G11B7/09 ,  G11B7/135

Abstract: PURPOSE:To eliminate the effects of the wavelength variance of a light source by increasing the size of a photodetecting surface in the direction where it is diffracted by a diffraction grating in comparison with the size of said photodetecting surface in the direction orthogonal the first mentioned direction. CONSTITUTION:The traveling direction of the diffracted light 11 is changed slightly by the wavelength variance of a light source 1. The change of direction due to said wave motion variance is coincident with the direction due to said wave motion variance is coincident with the direction diffracted by a diffraction grating. Therefore 11a'-11c' have vertical fluctuations to the distribution of light quantity of 11a-11c. Here the photodetecting surfaces 13a-13d of a photo detector 13 have relatively large sizes in the direction where the luminous flux is shifted by said wavelength fluctuation. At the same time, the dividing line of each photodetecting surface is set in parallel to said direction. As a result, the output of each photodetecting part is not substantially affected despite the wavelength variance of the light source 1. This attains the correct auto- focusing and auto-tracking actions.

公开(公告)号：JPS61233440A

公开(公告)日：1986-10-17

申请号：JP7359085

申请日：1985-04-09

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： KUWAYAMA TETSUO ,  OSAWA MASARU ,  TANIGUCHI NAOSATO ,  ENDO KIYONOBU ,  HOSHI HIROAKI ,  NAKAMURA YASUO

IPC: G11B7/09 ,  G11B7/135

Abstract: PURPOSE:To attain a thin structure having an optical head together with reduction of the cost and also to simplify the optical control of the head device by applying a relief type diffraction grating structure to an optical divider and also leading the rays of light after reflection on the sloping surface of said grating structure. CONSTITUTION:A diffracting grating 15 has about 100% and 0% diffraction efficiency against the s and P polarized beams respectively. The P polarized light transmitted through the optical divider 13 is turned into the circular polarized light by a l/4 plate 17. This circular polarized light is condensed by an objective lens 18 and forms a spot having about 1mum diameter on a recording surface 20 formed at a substrate 19. The luminous flux reflected on the surface 20 is turned into parallel beams through the lens 18 and passes again through the plate 17 to be turned into the S polarized beam vibrating in the direction orthgonal to that of an incident mode. This reflected light 21 is 22 is made incident with a photodetector 23 while repeating the total reflection in the parallel flat plates.

公开(公告)号：JPS61178749A

公开(公告)日：1986-08-11

申请号：JP1919385

申请日：1985-02-05

Applicant: CANON KK ,  CANON DENSHI KK

Inventor： KUWAYAMA TETSUO ,  OSAWA MASARU ,  TANIGUCHI NAOSATO ,  ENDO KIYONOBU ,  HOSHI HIROAKI ,  NAKAMURA YASUO

IPC: G11B11/10 ,  G11B7/09 ,  G11B7/135 ,  G11B11/105

Abstract: PURPOSE:To maintain the deflected state of an introduced light beam and to read properly information by forming a reflecting film which will not change the deflected state on a reflecting surface used for leading a light beam. CONSTITUTION:As a diffracted light beam 22 including recorded information as a change in the deflected state is reflected by the reflecting film 30 or 31, the deflected state of the diffracted light beam 22 hardly changes, and led to a photodetecting element 23 in the deflected state which corresponds properly to the information recorded on a recording surface 20. Accordingly, the light beam made incident on a photodetector 24 through the photodetecting element 23 turns out to be a transient light beam corresponding properly to the recorded information. Namely, the reflecting films 30 and 31 can be designed as a multilayer which will not cause a phase difference with respect to light flux having different incident angles (x), and therefore in any case the diffracted light beam 22 can be led to the analyses 23 without changing its deflected state.