公开(公告)号：DE69940765D1

公开(公告)日：2009-06-04

申请号：DE69940765

申请日：1999-11-30

Applicant: CANON KK

Inventor： INA HIDEKI ,  YOSHII MINORU ,  HASEGAWA MASANOBU ,  SATOH TAKASHI

IPC: G03F9/00 ,  H01L21/027

Abstract: An alignment method for aligning first and second objects, in an exposure apparatus for transferring a pattern of the first object onto the second object as being coated with a resist, includes a process of producing an alignment offset value related to an alignment mark forming region on the second object, after formation of the resist coating thereon, and a process of aligning the first object with the second object as being coated with the resist, in the exposure apparatus, on the basis of the offset value as produced.

公开(公告)号：DE69937933D1

公开(公告)日：2008-02-21

申请号：DE69937933

申请日：1999-10-29

Applicant: CANON KK

Inventor： INA HIDEKI ,  YOSHII MINORU ,  HASEGAWA MASANOBU ,  SATOH TAKASHI

IPC: G03F9/00 ,  H01L21/027 ,  G03F7/20

Abstract: A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device, wherein one of divided light beams is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the surface of the object, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on the basis of the imagewise signal, and an image contrast adjusting device for adjusting image contrast of an image of a portion close to the target, as picked up by the image pickup device.

公开(公告)号：DE69937933T2

公开(公告)日：2008-05-21

申请号：DE69937933

申请日：1999-10-29

Applicant: CANON KK

Inventor： INA HIDEKI ,  YOSHII MINORU ,  HASEGAWA MASANOBU ,  SATOH TAKASHI

IPC: G03F9/00 ,  H01L21/027 ,  G03F7/20

Abstract: A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device, wherein one of divided light beams is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the surface of the object, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on the basis of the imagewise signal, and an image contrast adjusting device for adjusting image contrast of an image of a portion close to the target, as picked up by the image pickup device.