公开(公告)号：FR2863404A1

公开(公告)日：2005-06-10

申请号：FR0314378

申请日：2003-12-09

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  PARROCHON JOHANN

IPC: B01D53/00 ,  B08B7/00 ,  C01B23/00 ,  C23C16/44 ,  C23C16/455 ,  H01L21/3065 ,  H01L21/31 ,  H01L21/306 ,  B81C1/00 ,  B08B5/00

Abstract: A device for the generation and control of the flow of cleaning agents, adaptable on a process chamber (1) to assure its cleaning by a gaseous cleaning agent, incorporates a recirculation device (9) adapted to set aside the gas leaving the process chamber, filter it and reintroduce it to the process chamber. The recirculation device is structured in a manner that, in all portions of its trajectory in the recirculation device, the recycled gas remains essentially at the low pressure reigning in the process chamber. An independent claim is also included for the cleaning of a process chamber with a gaseous cleaning agent.

公开(公告)号：FR2863404B1

公开(公告)日：2006-04-21

申请号：FR0314378

申请日：2003-12-09

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  PARROCHON JOHANN

IPC: H01L21/306 ,  B01D53/00 ,  B08B5/00 ,  B08B7/00 ,  B81C1/00 ,  C01B23/00 ,  C23C16/44 ,  C23C16/455 ,  H01L21/3065 ,  H01L21/31

Abstract: A device for the generation and control of the flow of cleaning agents, adaptable on a process chamber (1) to assure its cleaning by a gaseous cleaning agent, incorporates a recirculation device (9) adapted to set aside the gas leaving the process chamber, filter it and reintroduce it to the process chamber. The recirculation device is structured in a manner that, in all portions of its trajectory in the recirculation device, the recycled gas remains essentially at the low pressure reigning in the process chamber. An independent claim is also included for the cleaning of a process chamber with a gaseous cleaning agent.