公开(公告)号：FR2866956B1

公开(公告)日：2006-05-19

申请号：FR0450353

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01N33/00 ,  G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/71 ,  G01N21/73

Abstract: The method involves retaining characteristic lines of major and easily excitable gaseous species e.g. nitrogen, in an original optical spectrum of radiation emitted by a plasma (4). Amplitude of the major species is sensitive to presence of minor and hardly excitable species e.g. humidity. Information over concentration of the minor species is deducted from the amplitude of the lines. An independent claim is also included for a device of detecting minor and hardly excitable gaseous species.

公开(公告)号：FR2854933A1

公开(公告)日：2004-11-19

申请号：FR0305724

申请日：2003-05-13

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE

IPC: F04B37/16 ,  F04D19/04 ,  F04D27/00

公开(公告)号：FR2874744B1

公开(公告)日：2006-11-24

申请号：FR0451932

申请日：2004-08-30

Applicant: CIT ALCATEL

Inventor： LE GUET CATHERINE ,  KAMBARA HISANORI ,  DESBIOLLES JEAN PIERRE

IPC: H01L21/00 ,  B65D81/20 ,  B65G49/07

Abstract: The device has a transport box (1) retained by a retaining unit (15). A box door (4) is integrated to an interface door (12) and displaced in an axial movement followed by a transversal movement, by door actuating units (14). A peripheral volume (21) around the two doors can be pumped by connection pumps (22, 23). Frontal sealing units (5) seal the door (4) that is locked on the box by locking units (20, 12f).

公开(公告)号：FR2854933B1

公开(公告)日：2005-08-05

申请号：FR0305724

申请日：2003-05-13

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE

IPC: F04B37/16 ,  F04D19/04 ,  F04D27/00

公开(公告)号：FR2854667A1

公开(公告)日：2004-11-12

申请号：FR0305615

申请日：2003-05-09

Applicant: CIT ALCATEL

Inventor： BERNARD ROLAND ,  DESBIOLLES JEAN PIERRE ,  MUNARI SEBASTIEN ,  ROUSSEAU CLAUDE

IPC: F04B41/06 ,  F04B49/08 ,  F04D19/04 ,  G05D16/20 ,  F04B37/16 ,  F04B49/00 ,  F04B49/20 ,  F04B37/14 ,  F04C23/00 ,  F04C29/08 ,  F04C25/02 ,  F04D25/16 ,  F04D27/00

Abstract: The device has two pumps (2,8) coupled to respective control units (3,11) for controlling the speed of the pump. A control valve (4) is coupled to an input of the pump (2) and to a third control unit (5) that controls the control valve. An inert gas injector (6) injects inert gas into the control valve through an injection pipe equipped with an injection valve. The injection valve is controlled by a fourth control unit. The control valve is controlled by the third control unit to compensate the rapid variations of weak amplitudes of pressure and flow of gas in processing chamber. The flow of the inert gas in the inert gas injector is controlled by the fourth control unit to compensate the variation of strong amplitude of the pressure and flow of gas in the processing chamber. The speeds of the two pumps are controlled by the respective control units to compensate the high variations of the amplitude of the conditions of pressure in the processing chamber. Independent claims are also included for the following: (a) a semiconductor fabrication installation or microelectronic mechanical system (b) a process of fabrication of semiconductors or the microelectronic mechanical system.

公开(公告)号：FR2878913B1

公开(公告)日：2007-01-19

申请号：FR0452853

申请日：2004-12-03

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  PUECH MICHEL

IPC: F04D27/00 ,  F04B37/14 ,  F04D19/04 ,  F04D25/16 ,  H01L21/00 ,  H01L21/205

Abstract: A main regulation valve (24) controls total pressure of gas mixture in the vacuum enclosure (8) as a function of total pressure set point. An auxiliary regulation valve (29) held below a secondary pump (9), is controlled as a function of delivery pressure set point to modify delivery pressure of the pump and to adapt its pumping capacity selectively for adjusting the proportions of gases in mixture of the enclosure. An independent claim is also included for the controlling method of low pressure gas mixture in vacuum enclosure.

公开(公告)号：FR2874744A1

公开(公告)日：2006-03-03

申请号：FR0451932

申请日：2004-08-30

Applicant: CIT ALCATEL

Inventor： LE GUET CATHERINE ,  KAMBARA HISANORI ,  DESBIOLLES JEAN PIERRE

IPC: H01L21/00 ,  B65D81/20 ,  B65G49/07

Abstract: Dans un dispositif selon l'invention, une boîte de transport (1) peut être accouplée à l'ouverture de passage (11) d'un appareil de traitement (9), de manière étanche par interposition d'un joint périphérique d'interface (16). La porte de boîte (4) peut être solidarisée sélectivement à la porte d'interface (12) pour un déplacement en bloc selon un mouvement axial suivi d'un mouvement transversal, entraînée par des moyens d'actionnement de porte (14). La boîte de transport (1) est retenue par un moyen de retenue (15). Le volume périphérique (21) autour des deux portes peut être pompé par une pompe (22) et une canalisation (23). Sur la boîte de transport (1), la porte de boîte (4) peut être verrouillée par des moyens de verrouillage (20), assurant une bonne étanchéité pendant que la boîte de transport (1) est à l'écart de l'appareil de traitement (9).On assure ainsi une bonne étanchéité de la boîte de transport (1), et on permet l'ouverture sous vide des portes (4, 12) sans pollution de l'atmosphère intérieure.

公开(公告)号：FR2840232B1

公开(公告)日：2004-08-27

申请号：FR0206642

申请日：2002-05-30

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  SOGAN GLORIA ,  MUNARI SEBASTIEN ,  VERAN EMMANUELLE

IPC: B01D8/00 ,  F04B37/08

Abstract: The cryogenic trap of the invention comprises, in a hollow body ( 3 ) having an access valve ( 2 ) and an outlet valve ( 6 ), a cold core ( 11 ) associated with a plate ( 13 ) having low thermal inertia and movable between a trapping position in contact with the cold core ( 11 ), and a regeneration position spaced apart from the cold core ( 11 ) and in contact with a heater ring ( 14 ). The plate ( 13 ) is in contact with gases to be trapped, and prevents them from passing to the cold core ( 11 ). Regeneration requires heating only of the plate ( 13 ) carrying the condensed and solidified gases, and it is therefore more rapid.

公开(公告)号：FR2863404B1

公开(公告)日：2006-04-21

申请号：FR0314378

申请日：2003-12-09

Applicant: CIT ALCATEL

Inventor： DESBIOLLES JEAN PIERRE ,  PARROCHON JOHANN

IPC: H01L21/306 ,  B01D53/00 ,  B08B5/00 ,  B08B7/00 ,  B81C1/00 ,  C01B23/00 ,  C23C16/44 ,  C23C16/455 ,  H01L21/3065 ,  H01L21/31

Abstract: A device for the generation and control of the flow of cleaning agents, adaptable on a process chamber (1) to assure its cleaning by a gaseous cleaning agent, incorporates a recirculation device (9) adapted to set aside the gas leaving the process chamber, filter it and reintroduce it to the process chamber. The recirculation device is structured in a manner that, in all portions of its trajectory in the recirculation device, the recycled gas remains essentially at the low pressure reigning in the process chamber. An independent claim is also included for the cleaning of a process chamber with a gaseous cleaning agent.

公开(公告)号：FR2866956A1

公开(公告)日：2005-09-02

申请号：FR0450353

申请日：2004-02-26

Applicant: CIT ALCATEL

Inventor： SOGAN GLORIA ,  BOUNOUAR JULIEN ,  DESBIOLLES JEAN PIERRE ,  GAURAND ISABELLE

IPC: G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/73 ,  G01N33/00 ,  G01N21/71

Abstract: The method involves retaining characteristic lines of major and easily excitable gaseous species e.g. nitrogen, in an original optical spectrum of radiation emitted by a plasma (4). Amplitude of the major species is sensitive to presence of minor and hardly excitable species e.g. humidity. Information over concentration of the minor species is deducted from the amplitude of the lines. An independent claim is also included for a device of detecting minor and hardly excitable gaseous species.