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公开(公告)号:FR2792083B1
公开(公告)日:2003-08-01
申请号:FR9904539
申请日:1999-04-12
Applicant: CIT ALCATEL
Inventor: ROUSSEAU CLAUDE , PILOTTI PATRICK , MAQUIN PHILIPPE
Abstract: The pressure regulation system for a vacuum chamber (1), connected by pipes to a pump unit (3) with a primary mechanical dry pump (4) and a secondary pump (5), has a speed controller (6) simultaneously setting speed of the primary and secondary pumps. The speed controller uses predetermined speed profiles (20) computed from condensation curves for effluents contained in the chamber and pipes.
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2.
公开(公告)号:FR2792083A1
公开(公告)日:2000-10-13
申请号:FR9904539
申请日:1999-04-12
Applicant: CIT ALCATEL
Inventor: ROUSSEAU CLAUDE , PILOTTI PATRICK , MAQUIN PHILIPPE
Abstract: The pressure regulation system for a vacuum chamber (1), connected by pipes to a pump unit (3) with a primary mechanical dry pump (4) and a secondary pump (5), has a speed controller (6) simultaneously setting speed of the primary and secondary pumps. The speed controller uses predetermined speed profiles (20) computed from condensation curves for effluents contained in the chamber and pipes.
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公开(公告)号:AT280406T
公开(公告)日:2004-11-15
申请号:AT00400956
申请日:2000-04-07
Applicant: CIT ALCATEL
Inventor: ROUSSEAU CLAUDE , PILOTTI PATRICK , MAQUIN PHILIPPE
Abstract: The invention concerns a system for regulating pressure in a chamber (1) containing effluents, connected by pipes (2) to a pumping unit (3) comprising a self-lubricating mechanical primary pump (4) and at least a secondary pump (5). The invention is characterised in that the system comprises a speed regulator (6) controlling simultaneously the rotation speeds of the self-lubricating mechanical primary pump (4) and of the secondary pump (5).
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