公开(公告)号：JPH06349431A

公开(公告)日：1994-12-22

申请号：JP613591

申请日：1991-01-23

Applicant: CONS RIC MICROELETTRONICA

Inventor： MARIO RASUPARIISHI ,  KANDEIIDO MEDEYURATSU

IPC: C23C14/48 ,  H01J27/08 ,  H01J27/22 ,  H01J37/08 ,  H01J37/317 ,  H01L21/265

Abstract: PURPOSE: To provide a Freeman-type ionizer which can be used for a commercial ion implanter and can ionize metals having a high melting point, while maintaining conventional operation. CONSTITUTION: This ionizer is provided with a cylindrical casing 1, having an inside cavity 2 and a flange, an arc chamber 15 which is superposed on its outside upper part and contains a filament 20 to which electric power is supplied by passing through power supply conductors 8, 7 and 6 supported by the flange, a repulsive plate 21 held at a negative voltage by the power supply conductors and an inlet for gas to be ionized. A support 23 for metal 24 to be ionized, which is supported by a rod 9 passing through the inside cavity of the cylindrical casing and electrically connected to an electrode 13, exists on the inside of the arc chamber.