公开(公告)号：DE69637863D1

公开(公告)日：2009-04-23

申请号：DE69637863

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H03H9/205 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

Abstract: A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.

公开(公告)号：DK0834218T3

公开(公告)日：2009-04-20

申请号：DK96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  MACDONALD NOEL C ,  BERTSCH FRED M ,  SHAW KEVIN A

IPC: H03H9/125 ,  H03H9/205 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

Abstract: A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.

公开(公告)号：CA2224402C

公开(公告)日：2008-06-17

申请号：CA2224402

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  MACDONALD NOEL C ,  SHAW KEVIN A ,  BERTSCH FRED M

IPC: H03H9/125 ,  H03H9/24 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/46

Abstract: A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.

公开(公告)号：ES2321889T3

公开(公告)日：2009-06-12

申请号：ES96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H03H9/205 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

Abstract: SE TRATA DE UNA ESTRUCTURA DE RESONADOR ELECTROMECANICO QUE SE PUEDE AFINAR Y QUE INCORPORA UN IMPULSOR ELECTROSTATICO (66, 68) QUE PERMITE LA ATENUACION O LA ELEVACION DE LA FRECUENCIA DE RESONANCIA DE LA ESTRUCTURA. EL IMPULSOR CONSISTE EN DOS CONJUNTOS DE ELECTRODOS OPUESTOS, EN FORMA DE DEDOS, CADA UNO DE CUYOS CONJUNTOS TIENE VARIOS DEDOS SEPARADOS Y PARALELOS ENTRE SI (70, 72, 84, 90). UN CONJUNTO (70, 72) ESTA MONTADO SOBRE UNA PARTE MOVIL (54) DE LA ESTRUCTURA DEL RESONADOR Y EL OTRO CONJUNTO (84, 90) ESTA MONTADO SOBRE UNA BASE FIJA ADYACENTE (132, 134) SITUADA SOBRE EL SUSTRATO; LOS EXTREMOS ADYACENTES ESTAN SEPARADOS POR UN ESPACIO VACIO (86, 92). UNA TENSION DE POLARIZACION GRADUABLE (130) PASANDO POR LOS DOS CONJUNTOS DE ELECTRODOS AFINA LA FRECUENCIA DE RESONANCIA DE LA ESTRUCTURA MOVIL.

公开(公告)号：PT834218E

公开(公告)日：2009-05-06

申请号：PT96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H03H9/205 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

公开(公告)号：CA2224402A1

公开(公告)日：1997-01-09

申请号：CA2224402

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： MACDONALD NOEL C ,  SHAW KEVIN A ,  BERTSCH FRED M ,  ADAMS SCOTT G

IPC: H03H9/125 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24 ,  H03H9/46

Abstract: A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.

公开(公告)号：EP0834218A4

公开(公告)日：2002-04-10

申请号：EP96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24 ,  H03H9/46

CPC classification number: H03H9/02425 ,  H02N1/008 ,  H03H9/02417 ,  H03H9/46 ,  H03H2009/02496

Abstract: A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.