METHOD AND DEVICE FOR MANUFACTURING OPTICAL FLUORIDE CRYSTAL USED FOR LIGHT OF SHORTER WAVELENGTH THAN 250 NM

    公开(公告)号:JP2003160397A

    公开(公告)日:2003-06-03

    申请号:JP2002246443

    申请日:2002-08-27

    Applicant: CORNING INC

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a high quality calcium fluoride optical fluoride crystal for a lithography/laser element having excellent optical quality for the light of shorter wavelength than 250 nm. SOLUTION: The device for treating the fluoride crystal comprises an enclosure (12); a heating means for heating the internal volume (16) of the enclosure (12); at least one hollow platform (20) delimiting an internal chamber (22) whose upper wall (24) bears at least two independent diffusers (30) each delimiting a cavity (32) able to receive a unitary quantity (100) of the fluoride crystal substance, each of the cavities (32) communicating with the internal chamber (22) of the corresponding platform (20); a reactive gas supply source; means (50, 52, 54) for distributing the reactive gas from the gas supply source to the inside of the internal chamber of each platform; and a means (44) for regulating the pressure of the distributed gas. COPYRIGHT: (C)2003,JPO

    2.
    发明专利
    未知

    公开(公告)号:DE10239327A1

    公开(公告)日:2003-05-15

    申请号:DE10239327

    申请日:2002-08-27

    Applicant: CORNING INC

    Abstract: The optical fluoride crystal treatment device of the invention includes a enclosure (12) separating the device from its external environment, heating means to heat and keep the internal volume (16) of said enclosure (12) at a predetermined temperature, at least one hollow platform (20) delimiting an internal chamber (22) whose upper wall (24) bears at least two independent diffusers (30) each delimiting a cavity (32) able to receive a unitary quantity (100) of said optical fluoride crystal substance, each of said cavities (32) communicating with said internal chamber (22) of the corresponding platform (20), a gas supply source containing said reactive gas, and means (50, 52, 54) for distributing said gas containing said reactive gas from said supply source to the inside of the internal chamber of each platform and having means (44) for regulating the pressure of said distributed gas. This optical fluoride crystal treatment device is preferably used to carry out anionic purification with a reactive gas formed of a fluoridation gas, a fluoride powder of an alkaline metal or alkaline-earth metal in the making of optical fluoride crystals.

    4.
    发明专利
    未知

    公开(公告)号:BR0011088A

    公开(公告)日:2002-03-19

    申请号:BR0011088

    申请日:2000-04-26

    Applicant: CORNING INC

    Abstract: A double crucible fiber fabrication system employing a rod to control flow of the core material to produce a core of desired diameter. The rod fits closely within the inner crucible and moves at a speed necessary to produce a core material flow rate which will produce a desired core diameter. Control of the rod speed produces good control of core diameter for a wide variety of different core materials. It is also possible to control the rod speed in order to compensate for capillary effects and leakage of core material. Furthermore, control of the rod speed allows fabrication of a fiber having a core diameter which varies as desired throughout a single fiber.

    Continuously casting rod with cross-sectional compsn. gradient

    公开(公告)号:FR2733224A1

    公开(公告)日:1996-10-25

    申请号:FR9504646

    申请日:1995-04-19

    Applicant: CORNING INC

    Abstract: A rod of material having a cross-sectional compsn. gradient is obtd. by simultaneously passing a core stream of one compsn. and a concentric annular sheathing stream of a different compsn. into a casting tube. Appts. includes at least two reservoirs having concentric discharge orifices through which the materials flow by gravity into a concentric casting tube. A heating system controls the temp. profile of the material as it flows through the tube and provision is made for controlling the rate of flow. From its outlet the materials pass in laminar flow to a concentric mould of greater cross-section. Pref. the compsn. gradient is controlled by adjusting the flow rates and temp. at a selected interface position between core and sheath.

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