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    METHOD AND DEVICE FOR MANUFACTURING OPTICAL FLUORIDE CRYSTAL USED FOR LIGHT OF SHORTER WAVELENGTH THAN 250 NM
    1.
    发明专利
    METHOD AND DEVICE FOR MANUFACTURING OPTICAL FLUORIDE CRYSTAL USED FOR LIGHT OF SHORTER WAVELENGTH THAN 250 NM 审中-公开

    公开(公告)号：JP2003160397A

    公开(公告)日：2003-06-03

    申请号：JP2002246443

    申请日：2002-08-27

    Applicant: CORNING INC

    Inventor： KERDONCUFF ALAIN ,  MAYOLET ALEXANDRE M

    IPC: C30B11/00 ,  C30B29/12 ,  G02B1/02 ,  G02B3/00

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a high quality calcium fluoride optical fluoride crystal for a lithography/laser element having excellent optical quality for the light of shorter wavelength than 250 nm. SOLUTION: The device for treating the fluoride crystal comprises an enclosure (12); a heating means for heating the internal volume (16) of the enclosure (12); at least one hollow platform (20) delimiting an internal chamber (22) whose upper wall (24) bears at least two independent diffusers (30) each delimiting a cavity (32) able to receive a unitary quantity (100) of the fluoride crystal substance, each of the cavities (32) communicating with the internal chamber (22) of the corresponding platform (20); a reactive gas supply source; means (50, 52, 54) for distributing the reactive gas from the gas supply source to the inside of the internal chamber of each platform; and a means (44) for regulating the pressure of the distributed gas. COPYRIGHT: (C)2003,JPO

    Method for preparing optical fluoride crystal
    2.
    发明专利
    Method for preparing optical fluoride crystal 审中-公开
    制备光学氟化物晶体的方法

    公开(公告)号：JP2005213140A

    公开(公告)日：2005-08-11

    申请号：JP2004372879

    申请日：2004-12-24

    Applicant: Corning Inc ,  コーニング インコーポレイテッド

    Inventor： GLASSON THOMAS J ,  LEBLOND NICHOLAS ,  MAYOLET ALEXANDRE M

    IPC: G02B1/02 ,  C30B11/00 ,  C30B29/12

    CPC classification number: C30B11/00 ,  C30B29/12

    Abstract: PROBLEM TO BE SOLVED: To provide a method for preparing a metal fluoride crystal suitable for manufacturing an optical element that can be used in a lithographic equipment below 200 nm and its process. SOLUTION: Metal fluoride particles, substantially all of which have a size of 1 mm or greater, are treated with an oxygen scavenger just prior to being melted, and used to grow a metal fluoride single crystal. In one embodiment, a metal fluoride raw material is treated with the oxygen scavenger to remove oxygen containing impurities, liquefied, and cooled to form a premelt material. The premelt material is then broken into particles having a certain range of sizes and separated by sieving or other separation methods known in the technical art into at least a group of particles substantially all of which have a size of 1 mm or larger and a group of particles having a size of less than 1 mm. The 1 mm and larger material is used to grow the metal fluoride single crystal having improved transmission properties in a range of 120-220 nm. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题：提供一种适用于制造可用于低于200nm的光刻设备的光学元件的金属氟化物晶体的方法及其工艺。 解决方案：金属氟化物颗粒，其基本上全部具有1mm或更大的尺寸，在熔融之前用除氧剂处理，并用于生长金属氟化物单晶。 在一个实施方案中，用除氧剂处理金属氟化物原料以除去含氧杂质，液化并冷却以形成预熔材料。 然后将预熔材料破碎成具有一定尺寸范围的颗粒，并通过本技术领域已知的筛分或其它分离方法分离成至少一组基本上具有1mm或更大尺寸的颗粒，以及一组 尺寸小于1mm的颗粒。 1mm以上的材料用于在120-220nm的范围内生长具有改进的透射性的金属氟化物单晶。 版权所有（C）2005，JPO＆NCIPI

    Antimony oxide glass with optical activity
    4.
    发明专利
    Antimony oxide glass with optical activity 未知

    公开(公告)号：AU3387899A

    公开(公告)日：1999-10-25

    申请号：AU3387899

    申请日：1999-04-08

    Applicant: CORNING INC

    Inventor： DICKINSON JAMES E JR ,  ELLISON ADAM J ,  MAYOLET ALEXANDRE M ,  PRASSAS MICHEL

    IPC: G02B6/00 ,  C03B27/004 ,  C03C3/06 ,  C03C3/062 ,  C03C3/095 ,  C03C3/11 ,  C03C3/112 ,  C03C3/12 ,  C03C3/14 ,  C03C3/23 ,  C03C3/253 ,  C03C13/04 ,  H01S3/06

    Abstract: A glass consisting essentially of antimony oxide. An optically active glass consisting essentially of antimony oxide and up to about 4 mole % of an oxide of a rare earth element. A rare earth-doped, antimony oxide-containing glass including 0-99 mole % SiO2, 0-99 mole % GeO2, 0-75 mole % (Al, Ga)2O3, 0.5-99 mole % Sb2O3, and up to about 4 mole % of an oxide of a rare earth element. The oxide of the rare earth element may comprise Er2O3. The glass of the invention further includes fluorine, expressed as a metal fluoride. An optical energy-producing or light-amplifying device, in particular, an optical amplifier, comprising the above-described glass. The optical amplifier can be either a fiber amplifier or a planar amplifier, either of which may have a hybrid composition. Embodiments of the glass of the invention can be formed by conventional glass making techniques, while some of the high content antimony oxide embodiments are formed by splat or roller quenching.

    ANTIMONY OXIDE GLASS WITH OPTICAL ACTIVITY
    7.
    发明专利
    ANTIMONY OXIDE GLASS WITH OPTICAL ACTIVITY 未知

    公开(公告)号：CA2327297A1

    公开(公告)日：1999-10-14

    申请号：CA2327297

    申请日：1999-04-08

    Applicant: CORNING INC

    Inventor： DICKINSON JAMES E ,  ELLISON ADAM J ,  MAYOLET ALEXANDRE M ,  PRASSAS MICHEL

    IPC: G02B6/00 ,  C03B27/004 ,  C03C3/06 ,  C03C3/062 ,  C03C3/095 ,  C03C3/11 ,  C03C3/112 ,  C03C3/12 ,  C03C3/14 ,  C03C3/23 ,  C03C3/253 ,  C03C13/04 ,  H01S3/06 ,  C03B19/00

    Abstract: A glass consisting essentially of antimony oxide. An optically active glass consisting essentially of antimony oxide and up to about 4 mole % of an oxide of a rare earth element. A rare earth-doped, antimony oxide-containing glass including 0-99 mole % SiO2, 0-99 mole % GeO2, 0-75 mole % (Al, Ga)2O3, 0.5-99 mole % Sb2O3, and up to about 4 mole % of an oxide of a rare earth element. The oxide of the rare earth element may comprise Er2O3. The glass of the invention further includes fluorine, expressed as a metal fluoride. An optical energy-producing or light-amplifying device, in particular, an optical amplifier, comprising the above-described glass. The optical amplifier can be either a fiber amplifier or a planar amplifier, either of which may have a hybrid composition. Embodiments of the glass of the invention can be formed by conventional glass making techniques, while some of the high content antimony oxide embodiments are formed by splat or roller quenching.

    METHOD OF MAKING HIGH PURITY OPTICAL FLUORIDE CRYSTALS
    9.
    发明申请
    METHOD OF MAKING HIGH PURITY OPTICAL FLUORIDE CRYSTALS 审中-公开
    制造高纯度光学氟化物晶体的方法

    公开(公告)号：WO03008674A3

    公开(公告)日：2003-05-22

    申请号：PCT/US0222927

    申请日：2002-07-18

    Applicant: CORNING INC

    Inventor： KERDONCUFF ALAIN ,  MAYOLET ALEXANDRE M

    IPC: C30B29/12 ,  C01B9/08 ,  C01F5/28 ,  C01F11/20 ,  C30B11/00 ,  C01F11/22

    CPC classification number: C01F11/20 ,  C01B9/08 ,  C01F5/28 ,  C01P2004/61 ,  C01P2006/80 ,  C30B11/00 ,  C30B29/12

    Abstract: The present invention relates to the manufacturing of high purity optical fluoride crystals, the making of purified optical fluoride crystal feedstocks and to the anionic purification of optical fluoride crystalline materials. The invention relates generally to methods for removing oxide impurities from optical fluoride crystal feedstocks. More specifically, the invention relates to a method for preparing purified optical fluoride crystal feedstocks and the use of the feedstock in manufacturing VUV

    Abstract translation: 本发明涉及高纯度光学氟化物晶体的制造，纯化的光学氟化物晶体原料的制造以及光学氟化物晶体材料的阴离子纯化。 本发明一般涉及从光学氟化物晶体原料中除去氧化物杂质的方法。 更具体地说，本发明涉及制备纯化的光学氟化物晶体原料的方法以及该原料在制造用于VUV光刻/激光系统的VUV <200nm透射光学氟化物晶体中的用途。

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