公开(公告)号：US20010017287A1

公开(公告)日：2001-08-30

申请号：US09745367

申请日：2000-12-22

Applicant: California Institute of Technology, a California corportion

Inventor： Xu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F02G001/04 ,  B44C001/22 ,  C23F001/00

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

公开(公告)号：US20010019034A1

公开(公告)日：2001-09-06

申请号：US09792752

申请日：2001-02-22

Applicant: California Institute of Technology

Inventor： Yu-Chong Tai ,  Xuan-Qi Wang

IPC: B32B001/08 ,  B44C001/22

CPC classification number: F16K99/0001 ,  B81B3/001 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C2201/115 ,  F15C5/00 ,  F16K15/144 ,  F16K99/0009 ,  F16K99/0034 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7888 ,  Y10T137/7895

Abstract: The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.

Abstract translation: 本公开内容描述了一种Parylene微型止回阀，其包括具有粗糙顶表面的微加工硅阀座，膜帽通过扭绞系绳锚定在该顶部表面上。 发现微型止回阀在用作流动液体和气体流体的微孔时用作阀门时，具有低开启压力，高反向压力，低逆流泄漏以及可忽略的膜引起的流动阻力。

公开(公告)号：US20010014438A1

公开(公告)日：2001-08-16

申请号：US09745682

申请日：2000-12-22

Applicant: California Institute of Technology, a corporation

Inventor： Yu-Chong Tai ,  Xing Yang ,  Charles Grosjean ,  Xuan-Qi Wang

IPC: F27B001/00 ,  F24J003/00

CPC classification number: F15C5/00 ,  B81B3/0024 ,  B81B2201/036 ,  B81B2201/054 ,  F04B19/24 ,  F04B43/043 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/7737 ,  Y10T137/7879

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract translation: 具有改进性能的微加工流体处理装置。 阀门由增强的聚对二甲苯制成。 加热器加热流体以膨胀流体。 加热器形成在无负载的氮化硅上以降低功率。 该装置可用于形成阀或泵。 另一个实施方案形成复合硅树脂/聚对二甲苯膜。 另一个特征是使用具有同心凹槽的阀座，用于更好的密封操作。