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公开(公告)号:JP2006066271A
公开(公告)日:2006-03-09
申请号:JP2004248611
申请日:2004-08-27
Applicant: Canon Inc , Toshiba Corp , キヤノン株式会社 , 株式会社東芝
Inventor: KAMIO MASARU , TSUDA HISANORI , GOFUKU IHACHIROU , SATO YASUE , SHIMADA YOSHIYUKI , MITANI HIROMASA , KIYONO KAZUYUKI , NISHIMURA KOJI
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a highly reliable and inexpensive image display device causing no leakage, causing little aged deterioration of electron source characteristics in particular, and having high display quality, by a simple process.
SOLUTION: This image display device is equipped with a vacuum vessel formed by making a first substrate 101 face a second substrate and sealing the peripheral part of the first substrate and the second substrate, an electron source disposed in this vacuum vessel, and an ion pump. This manufacturing method of the image display device has a process to join an ion pump vessel 112 to an opening part formed in the first substrate or the second substrate, prior to a process to seal the peripheral part of the first substrate 101 and the second substrate.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题:提供一种制造高可靠性和廉价的不产生泄漏的图像显示装置的方法,通过简单的处理,特别是几乎不会导致电子源特性的老化劣化,并具有高显示质量。 解决方案:该图像显示装置配备有通过使第一基板101面对第二基板并密封第一基板和第二基板的周边部分,设置在该真空容器中的电子源而形成的真空容器,以及 离子泵。 该图像显示装置的制造方法具有将离子泵容器112与形成在第一基板或第二基板中的开口部接合的工序,在密封第一基板101和第二基板 。 版权所有(C)2006,JPO&NCIPI
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公开(公告)号:JPS61140902A
公开(公告)日:1986-06-28
申请号:JP26267584
申请日:1984-12-14
Applicant: Canon Inc
Inventor: KAMIO MASARU , MOTOI YASUKO , TAKAO HIDEAKI
Abstract: PURPOSE: To obtain the titled filter having an excellent spectral characteristics by incorporating to said filter, a green coloring matter formed with vapor- depositing a coloring matter of an octa-4,5-phenylphthalocyanine.
CONSTITUTION: The titled filter has the green coloring matter formed by vapor- depositing the octa-4,5-phenylphthalocyanine type coloring matter. As the green coloring matter layer is composed of the vapor-deposited layer of said phthalocyanine type coloring matter, the filter having an excellent heat resistance and solvent resistance properties and a good spectral property as green color is obtd. The filter is prepared by forming a resist pattern 2 on the substrata 1 and by irradiating on a whole surface of the resist pattern 2, a light or an electron beam having a sensitivity against the resist followed by vapor- deposition octa-4,5-phenylphthalocyanine or its complex salt of metal by means of a vacuum-deposition method on the surface of the substrate 1 arranging the resist pattern thereon to form the layer 3 of the coloring matter. The green coloring matter layer 4 having a stripe pattern is formed by dipping the layer 3 in a solvent.
COPYRIGHT: (C)1986,JPO&JapioAbstract translation: 目的:为了获得具有优异光谱特性的标题滤光片,通过掺入到所述过滤器中,形成有蒸气沉积八氢-4,5-苯基酞菁色素的绿色色素。 构成:标题过滤器具有通过气相沉积八氢-4,5-苯基酞菁型着色剂形成的绿色色素。 由于绿色色素层由所述酞菁型着色剂的气相沉积层构成,所以具有优异的耐热性和耐溶剂性以及良好的光谱特性作为绿色的过滤器。 通过在基片1上形成抗蚀剂图案2并通过在抗蚀剂图案2的整个表面上照射对抗蚀剂敏感的光或电子束,然后进行蒸镀八面-4,5- 苯基酞菁或其金属络合盐通过真空沉积法在衬底1的表面上设置抗蚀图案以形成色素层3。 通过将层3浸渍在溶剂中来形成具有条纹图案的绿色色素层4。
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公开(公告)号:JPS61105508A
公开(公告)日:1986-05-23
申请号:JP22598684
申请日:1984-10-29
Applicant: Canon Inc
Inventor: MOTOI YASUKO , SAKAMOTO EIJI , KAMIO MASARU , SEKIMURA NOBUYUKI
IPC: G02B5/22
Abstract: PURPOSE: To suppress the overheating decomposition owing to a low heat transmission rate and to improve the efficiency of a stage by solidifying preliminarily a dye of a vapor source to prevent scattering in the stage of vapor deposition and to make simple the handling of the dye which is powder and is hard to handle.
CONSTITUTION: The size of a molding in the case of packing the dye 3 in a vapor deposition boat 2 and heating the same to evaporate is preferably 1W5mm granular material and the strength thereof to the extent of obviating the easy powering in handling such as weighting and packing is enough. The preferable shape of the molding is a tablet molded under the pressure to 5W50mm diameter and 1W20mm height. The adequate strength thereof is preferably ≥100kg/cm
2 compressive strength. The molded dye material 3 is packed into the molybdenum boat 2 and is placed in a bell-jar. The dye molding packed in the boat is heated at a heating-up rate of ≤50°C/min in a vacuum kept under 1×10
-4 Pa vacuum degree. The heated dye evaporates and sticks to the surface of the substrate 4 placed in the bell-jar by which colored dye layer is formed.
COPYRIGHT: (C)1986,JPO&JapioAbstract translation: 目的:为了抑制由于低透热率导致的过热分解,并且通过预先将蒸气源的染料预先固化以防止气相沉积阶段中的飞散,并且简化了染料的处理,从而提高了阶段的效率 是粉末,很难处理。 构成:在气相沉积舟2中将染料3包装并将其加热蒸发的情况下的成型体的尺寸优选为1-5mm的颗粒状材料,其强度达到避免容易上料的程度,例如 加重和包装就够了。 模制品的优选形状是在直径为5-50mm和1-20mm高度的压力下成型的片剂。 其合适的强度优选≥100kg/ cm 2的抗压强度。 模制的染料3被包装在钼舟2中并放置在钟形瓶中。 填充在船上的染料成型体在保持在1×10 -4 Pa真空度的真空中以<= 50摄氏度/分钟的加热速率加热。 加热的染料蒸发并粘附到放置在钟形瓶中的基底4的表面上,由此形成着色染料层。
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公开(公告)号:JPS6167003A
公开(公告)日:1986-04-07
申请号:JP18821684
申请日:1984-09-10
Applicant: Canon Inc
Inventor: SASAMORI EIZO , YOKONO KOJIRO , KAMIO MASARU , TANAKA NOBUYOSHI
Abstract: PURPOSE: To increase an effective aperture rate sufficiently and improve functions by providing a colored filter composed of vapor-deposited layers of pigments corresponding to photodetection cells and a condenser lens made of photosensitive resin on a photodetection surface in order from the photodetection surface side.
CONSTITUTION: For example, positive type resist is laminated on the photodetection surface 1a that a main body part has to form a resist layer 5, which is exposed through a photomask 6 having a desired pattern and developed to obtain a resist pattern 5a for a lift-off. Then, ≤1 kind among properly selected pigments is vapor-deposited on this main body photodetection surface 1a to form a vapor-deposited layer 7 of the 1st pigment, and then a colored pattern 8 of the 2nd color and a colored pattern 9 of the 3rd pattern are formed to obtain a color separation filter 10 consisting of the colored patterns of the three colors. A resin layer 11 is formed thereupon and then a photoresist layer 12 is formed and patterned. Lastly, the photoresist layer 12 is softened and fluidized by being annealed and the rectangular sectional shape is deformed into an arcuate shape to form the condenser lens 4.
COPYRIGHT: (C)1986,JPO&JapioAbstract translation: 目的:通过在光检测表面上依次从光电检测表面侧提供由光电检测单元上的由相应于光电检测单元的气相沉积层和由感光树脂制成的聚光透镜构成的彩色滤光片,从而提高有效开孔率并改善功能。 构成:例如,正型抗蚀剂层叠在光检测面1a上,主体部分必须形成抗蚀剂层5,其通过具有所需图案的光掩模6曝光并显影以获得用于电梯的抗蚀剂图案5a -off。 然后,将适当选择的颜料中的<= 1种气相沉积在该主体光检测面1a上,形成第一颜料的蒸镀层7,然后将第二色的着色图案8和着色图案9 形成第三图案以获得由三种颜色的彩色图案组成的分色滤光片10。 在其上形成树脂层11,然后形成和图案化光致抗蚀剂层12。 最后,通过退火使光致抗蚀剂层12软化和流化,并且矩形截面形状变形为弓形以形成聚光透镜4。
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公开(公告)号:JPS6161102A
公开(公告)日:1986-03-28
申请号:JP18272884
申请日:1984-09-03
Applicant: Canon Inc
Inventor: SAKAMOTO EIJI , KAMIO MASARU , MOTOI YASUKO , SEKIMURA NOBUYUKI
Abstract: PURPOSE: To remove the reflection of transmitted light in coloring matters and to improve transmissibility by uniforming at least two kinds or more of coloring components out of a coloring matter layer having a single layer constitution in its laminated direction and the laminated layer direction.
CONSTITUTION: A positive resist film is formed on one side of a plane glass substrate so that the forming direction of the film coincides with the thickness direction of the substrate, and the resist film is prebaked, exposed and then treated with a developer to form a resist mask. On the other hand, coloring matters to be used are mixed at the prescribed wt% and stored in an evaporation board. The substrate on which the resist mask is formed and the board are set up in a vacuum evaporation device and evaporated at the prescribed degree of vacuum and the vapor-deposited glass substrate is dipped in the developer to remove an unnecessary part of the coloring matter film which dissolving the resist pattern.
COPYRIGHT: (C)1986,JPO&JapioAbstract translation: 目的:去除着色物中的透射光的反射,并通过在层叠方向和层叠层方向上均匀化具有单层构成的色素层中的至少两种以上的着色成分来提高透射性。 构成:在平面玻璃基板的一侧形成正的抗蚀剂膜,使得膜的成形方向与基板的厚度方向一致,并且将抗蚀剂膜预烘烤,曝光,然后用显影剂处理以形成 抗拒面具 另一方面,将要使用的着色剂以规定的重量%混合并存储在蒸发板中。 将其上形成有抗蚀剂掩模的基板和板设置在真空蒸发装置中并在规定的真空度下蒸发,并将蒸镀的玻璃基板浸渍在显影剂中以除去不必要的部分色素膜 其溶解抗蚀剂图案。
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公开(公告)号:JPS6139572A
公开(公告)日:1986-02-25
申请号:JP15865884
申请日:1984-07-31
Applicant: Canon Inc
Inventor: FUKAYA MASAKI , KOMATSU TOSHIYUKI , SHOJI TATSUMI , KAMIO MASARU , SEKIMURA NOBUYUKI
IPC: H01L27/146 , H04N1/028 , H04N1/19
CPC classification number: H01L27/14665
Abstract: PURPOSE:To uniformize the characteristics of each photosensor and to enable to read out signal at a high speed without using a correcting circuit by a method wherein the refractive index of the lowest layer of the laminated film of two layers and more, which respectively have the refractive index different from one another and constitute the photoconductive layer of each photosensor, is specified. CONSTITUTION:A quartz glass substrate or a partially glazed ceramic substrate and so forth are used as the substrate 1 for the photosensor array in the image readout device. The refractive index of the a-Si undercoating layer 2 of the photoconductive layer shall be one of 3.2 or less, and the refractive index of an a-Si layer 3 shall be one larger than 3.2 and shall be desirably one of 3.4 or thereabouts. N type layers 4 and 11 are respectively an ohmic contact layer. Common electrodes 5, individual electrodes 6 and signal lead-out conductors 12 shall be all formed of a conductive film of Al and so forth, conductive layers 7 and 8 shall be formed of a conductive film of Cr and so forth, and an insulating layer 9 shall be formed of an insulative inorganic film of SiH: H and so forth or various insulative organic resin films. A semiconductor layer 10 is provided, and a capacitor part 13 to be used for storing charge and a switching transistor part 14 to be used for taking out the charge stored in the capacitor part are respectively constituted.
Abstract translation: 目的:为了使每个光电传感器的特性均匀化,并且能够通过以下方法使高速读出信号而不使用校正电路,其中分层具有两层以上层叠膜的最低层的折射率 指定了彼此不同的折射率并构成每个光电传感器的光电导层。 构成:石英玻璃基板或部分玻璃陶瓷基板等用作图像读出装置中的光电传感器阵列的基板1。 光电导层的a-Si底涂层2的折射率应为3.2以下的折射率,a-Si层3的折射率应大于3.2,优选为3.4左右。 N +型层4和11分别是欧姆接触层。 公共电极5,单独电极6和信号引出导体12全部由Al等的导电膜形成,导电层7和8将由Cr等的导电膜形成,并且绝缘层 9由SiH:H等的绝缘无机膜或各种绝缘性有机树脂膜形成。 设置半导体层10,并且分别构成用于存储电荷的电容器部分13和用于取出存储在电容器部分中的电荷的开关晶体管部分14。
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公开(公告)号:JPS59104162A
公开(公告)日:1984-06-15
申请号:JP21371982
申请日:1982-12-06
Applicant: Canon Inc
Inventor: KAMIO MASARU , IIJIMA SHIGEJI , YOSHIHARA SATOSHI , OGURA YASUTSUGU
IPC: G02B5/20 , H01L27/14 , H01L31/0216
CPC classification number: H01L31/02162
Abstract: PURPOSE:To stabilize the quality by setting the thickness of an adhesive layer to a desired value by utilizing an irregular pattern for controlling the thickness of the layer formed on the surface of a solid state image sensor, thereby providing excellent image resolution. CONSTITUTION:A photoreceptor 6 of a solid stage image pick-up element 5 and the filter surface of a color separating film 1 are opposed and set to a bonding jig. Then, an ultraviolet ray curable adhesive is dropped in approx. 0.1cc on the center of the photoreceptor 6. Then, the element 5 and the film 1 are approached in approx. 20mum, obseved by a microscope for the bondin unit by both alignment marks, and the alignment is performed. Then, they are further approached. At this time, they are approached by obseving the irregular pattern 10, 11 formed around the alignment mark and the mark 9 in the microscope. The thickness of the adhesive is set by stopping approaching the element to the filter when the focus is matched to the mark 9.
Abstract translation: 目的:为了通过利用用于控制形成在固态图像传感器的表面上的层的厚度的不规则图案将粘合剂层的厚度设定为期望值来稳定质量,从而提供优异的图像分辨率。 构成:将固体摄像元件5的感光体6和分色膜1的滤色器面相对并设置于接合夹具。 然后,将紫外线固化型粘合剂 在感光体6的中心上为0.1cc。然后,元件5和胶片1接近近似。 通过两个对准标记由显微镜观察到结合单元,并且进行对准。 然后,他们进一步接近。 此时,通过在显微镜中观察在对准标记周围形成的不规则图案10,11和标记9来接近它们。 当聚焦与标记9匹配时,粘合剂的厚度通过停止接近元件到达滤光器来设定。
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公开(公告)号:JPS5944007A
公开(公告)日:1984-03-12
申请号:JP15544582
申请日:1982-09-07
Applicant: Canon Inc
Inventor: OGURA YASUTSUGU , IIJIMA SHIGEJI , KAMIO MASARU
IPC: G03G15/01 , G02B5/20 , G02F1/1335 , H01L27/14 , H01L31/0216 , H04N9/07
CPC classification number: H01L31/02162
Abstract: PURPOSE:To adhere a color separation filter to a substrate uniformly without being affected by the local difference of UV transmittance, by forming the color separation filter on an adhesive layer bonded to the substrate, irradiating it to harden a part of it, and hardening all the adhesive layer with heating. CONSTITUTION:The color separation filter is set, then, a solid-state image pickup element is set, and fixed by vacuum suction. A UV hardenable type adhesive is dropped with a dispenser, a solid-state image pickup element is moved to right under the filter. The filter and said element are registered with an alignment optical system. Spotted temporarily fixing windows are formed through the ineffective part of the filter, and UV rays are irradiated through a chromium mask only on those positions to fix them temporarily. The filter and the element are taken out and placed into an oven to harden the UV hardenable type adhesive with heating, thus limiting hardening by UV rays to only one part of the adhesive layer, and not leaving the effect of the UV irradiation hysteresis.
Abstract translation: 目的:通过在与基板接合的粘合剂层上形成分色过滤器,照射其来使其一部分硬化,并将其全部硬化,将均匀的粘着分离过滤器均匀地粘附到基板上而不受局部UV透射率的影响 粘合层加热。 构成:设置分色滤光片,然后固定固体摄像元件,并通过真空抽吸固定。 用分配器落下UV可硬化型粘合剂,将固态图像拾取元件移动到过滤器的正下方。 过滤器和所述元件与对准光学系统配准。 通过过滤器的无效部分形成发现的临时固定窗,并且仅通过铬掩模将紫外线照射到那些位置以暂时固定。 过滤器和元件被取出并放置在烘箱中以加热UV硬化型粘合剂,从而限制仅通过UV粘合层的一部分硬化,而不会留下UV照射滞后的影响。
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公开(公告)号:JPS5940566A
公开(公告)日:1984-03-06
申请号:JP15052182
申请日:1982-08-30
Applicant: Canon Inc
Inventor: KAMIO MASARU , IIJIMA SHIGEJI , YOSHIHARA SATOSHI , OGURA YASUTSUGU
IPC: H04N9/07 , H01L27/14 , H01L31/0203 , H01L31/0216
CPC classification number: H01L31/02162 , H01L31/0203 , H01L2224/05554 , H01L2224/48091 , H01L2224/49175 , H01L2224/8592 , H01L2924/00014
Abstract: PURPOSE:To avoid the adhesion of adhesive to the bonding part by a method wherein a recess is formed in an element or an element package, and excess adhesive is contained therein, when a color decomposing filter is adhered on a solid-state image pick-up element. CONSTITUTION:The solid-state image pick-up element 2 is contained in the bottom surface of the recess provided in the package 4, the color decomposing filter 1 is adhered on the surface thereof. Next, bonding pads 6 and 9 provided respectively on the element 2 and the package 4 are connected each other by means of metallic fine wires 5. In this constitution, recesses 7 and 8 are bored in the surface of the element 2 and at the bottom surface respectively by being positioned on both sides of the filter 1, the excess adhesive 3 of expanded adhesive 3 is contained into the recesses 7 and 8 when the filter 1 is fixed on the element 2 by dripping the photo setting type adhesive 3. Thereafter, the adhesive 3 is hardened by the irradiation of ultraviolet rays. In this manner, the excess adhesive 3 does not deposit on the pads 6 and 9.
Abstract translation: 目的:为了通过在元件或元件封装中形成凹部的方法避免粘合剂粘合到粘合部分上,并且当将颜色分解过滤器粘附在固态图像拾取器上时, up元素。 构成:固体摄像元件2包含在设置在封装4中的凹部的底面中,分色滤光器1粘附在其表面上。 接下来,分别设置在元件2和封装4上的接合焊盘6和9通过金属细线5彼此连接。在该结构中,凹部7和8在元件2的表面和底部 表面分别通过定位在过滤器1的两侧,当过滤器1通过滴落光固化型粘合剂3固定在元件2上时,膨胀粘合剂3的多余粘合剂3被包含在凹部7和8中。此后, 粘合剂3通过紫外线的照射而硬化。 以这种方式,多余的粘合剂3不会沉积在垫6和9上。
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公开(公告)号:JP2006066273A
公开(公告)日:2006-03-09
申请号:JP2004248613
申请日:2004-08-27
Applicant: Canon Inc , Toshiba Corp , キヤノン株式会社 , 株式会社東芝
Inventor: SATO YASUE , KAMIO MASARU , GOFUKU IHACHIROU , TSUDA HISANORI , NARISAWA TOMOKO , SHIMADA YOSHIYUKI , MITANI HIROMASA , KIYONO KAZUYUKI , NISHIMURA KOJI
CPC classification number: H01J29/845 , H01J29/94 , H01J2329/00
Abstract: PROBLEM TO BE SOLVED: To provide an image display device that suffers little degradation in electron source characteristics with time and suffers hardly noticeable unevenness of brightness or color shift of the image. SOLUTION: The image display device comprises: an electron source substrate 101 on which a plurality of electron emitting elements 104 are arranged; an image-forming substrate 112 opposed to the substrate 101 and having a phosphor film 111 and an anode electrode film 110; and a magnetic field generating means 121. A component of a flux density of the magnetic field generated by the magnetic field generating means 121 parallel to the electron source substrate 101 is 0.01 tesla or lower at the position of the electron emitting elements 104. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题:提供一种图像显示装置,随着时间的推移,电子源特性几乎没有劣化,并且几乎没有明显的图像不均匀性或色差。 解决方案:图像显示装置包括:电子源基板101,多个电子发射元件104布置在该电子源基板101上; 与基板101相对并且具有荧光膜111和阳极电极膜110的图像形成基板112; 和磁场产生装置121.由电子源基板101平行的磁场产生装置121产生的磁场的磁通密度分量在电子发射元件104的位置处为0.01特斯拉或更低。
版权所有(C)2006,JPO&NCIPI
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