公开(公告)号：JPS60195543A

公开(公告)日：1985-10-04

申请号：JP5122384

申请日：1984-03-19

Applicant: Canon Inc

Inventor： OGURA YASUTSUGU ,  IIJIMA SHIGEJI ,  KASAMORI EIZOU ,  KAMIO MASARU

IPC: G03C5/00 ,  G03F7/26

CPC classification number: G03F1/56

Abstract: PURPOSE:To form a pattern made of a colored layer having a desired shape on a substrate with good precision and good yield without causing cracking, peeling, etc., by imparting strength enough to withstand each patterning step and intimate adhesion to the substrate, to the colored layer contg., a coloring dye. CONSTITUTION:A positive type resist is laminated on a substrate 1 made of glass or resin or the like, exposed to light through a photomask 3 having a prescribed pattern, and developed with a developing soln. to obtain a resist pattern 2a for the lift-off method. A dye is laminated to form a dye layer 4. As the dye to be used for this dye layer 4, pigments, such as phthalocyanine type, naphthol type, and indanthrene type, and dyes, such as oil-soluble type and dispersion type, are enumerated, and a thickness of this layer 4 is properly selected in accordance with the uses of the colored patterns. The substrate 1 having such a dye layer 5 laminated is treated by the method of immersion in a photoresist-removing soln., or the like, and the photoresist layer 2 and the colored layer 5a formed on the layer 2 are removed together from the substrate 1, thus forming a colored pattern made of a colored layer 5b having a desired shape.

Abstract translation: 目的：通过赋予足够的强度以抵抗每个图案化步骤和对基材的紧密粘附，在基材上形成具有期望形状的着色层的图案，具有良好的精度和良好的收率而不引起开裂，剥离等， 着色层，着色染料。 构成：将正型抗蚀剂层压在由玻璃或树脂等制成的基板1上，通过具有规定图案的光掩模3曝光并用显影剂溶胶显影。 以获得用于剥离方法的抗蚀剂图案2a。 将染料层压以形成染料层4.作为用于该染料层4的染料，可以使用酞菁型，萘酚型，阴丹酮型等颜料，以及油溶性型和分散型等染料， 并且根据着色图案的用途适当地选择该层4的厚度。 通过浸渍在光致抗蚀剂去除溶剂等中的方法处理层叠有这种染料层5的基板1，并且从基板一起去除光致抗蚀剂层2和形成在层2上的着色层5a 从而形成由具有期望形状的着色层5b制成的着色图案。

公开(公告)号：JPS5972762A

公开(公告)日：1984-04-24

申请号：JP18399482

申请日：1982-10-20

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: G02B5/20 ,  C09J5/00 ,  H01L27/14

CPC classification number: C09J5/00

Abstract: PURPOSE:To eliminate a part, where a bonding agent beneath a light shielding region is not hardened, by limiting the width of the light shielding region of a color separating filter to a specified value or less, thereby providing sufficient diffraction from the transmitting region of ultraviolet rays and the amount of intrusion from the surrounding part. CONSTITUTION:A color separating filter 1 has a light shielding region 3 made of chromium, whose width is 1.5mm. or less, at the surrounding part of the filter 1. A stripe shaped pattern 2 is formed in the light shielding region 3. A solid state image pickup element 4 is of, e.g., a frame transfer type, and has a light receiving part 5, an accumulating part 6, and a bonding pad 7. The solid state image pickup element and the color separating filter are set in a sticking device, and an ultraviolet ray hardening type bonding agent 8 is dropped on the light receiving part 5 of the solid state image pickup element 4. Thereafter, the solid state image pickup element 4 is compressed to the color separating filter 1, and their positions are aligned. Ultraviolet rays are emitted from the side of the color separating filter on the entire surface, and the ultraviolet ray hardening type bonding agent is hardened. Thus, the bonding agent at the part beneath the light shielding region made of chromium can be perfectly hardened, and highly reliable bonding can be performed.

Abstract translation: 目的：通过将分色滤光片的遮光区域的宽度限制在规定值以下，为了消除光屏蔽区域下方的粘合剂未硬化的部分，由此提供来自透光区域 紫外线和周围部分的入侵量。 构成：分色滤色器1具有宽度为1.5mm的由铬制成的遮光区域3。 以下，在遮光区域3上形成有条状的图案2.固态摄像元件4例如为帧传送型，具有受光部5 ，积存部6和接合焊盘7.固体摄像元件和分色滤光器设置在粘贴装置中，并且紫外线固化型粘合剂8落在固体的光接收部分5上 此后，固态图像拾取元件4被压缩到分色滤光器1，并且它们的位置对齐。 在整个表面上从分色滤光片的一侧发出紫外线，紫外线固化型粘合剂硬化。 因此，由铬制成的遮光区域下方的部分的结合剂可以被完全硬化，并且可以进行高可靠性的接合。

公开(公告)号：JPS5972761A

公开(公告)日：1984-04-24

申请号：JP18399382

申请日：1982-10-20

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: G02B5/20 ,  C09J5/00 ,  H01L27/14

CPC classification number: C09J5/00

Abstract: PURPOSE:To prevent the deterioration of the coloring matter of a color separation filter even when ultraviolet ray hardening is utilized, by aligning a solid state image pickup element and a color separation filter through an ultraviolet ray hardening type bonding agent, thereafter emitting ultraviolet rays having high illuminance, and temporarily bonding the solid state image pickup element and the color separating filter. CONSTITUTION:A light receiving part 5 of a solid state image pickup element 4 and a color separating filter 1 on a glass substrate 9 are set on a sticking jig so that they face each other. Then an ultraviolet ray hardening type bonding agent 8 is dropped on the central part of a light receiving part 5 of the element 4. Thereafter, the element 4 and the filter 1 are brought closer to 20mum, and their positions are aligned. The element 4 is compressed to the filter 1. Under this state, ultraviolet rays are emitted from a super high voltage mercury lamp (illuminance of ultraviolet rays is 30mW/cm or more) built in a sticking device from the filter 1 side on the entire surface for several seconds. Thus the filter 1 and the element 4 are temporarily fixed. Thereafter, the temporarily fixed element 4 is taken out, and the filter 1 is set so as to face a main hardening device. The ultraviolet rays are emitted at the illuminance of 5mW/cm or less for several tens of minutes, and the bonding agent 8 is permanently hardened.

Abstract translation: 目的：为了防止使用紫外线硬化时的分色滤光片的着色物质的劣化，通过紫外线硬化型粘合剂使固体摄像元件和分色滤光片对准，然后发射具有 高照度，并且暂时粘合固态图像拾取元件和分色滤光器。 构成：将固态摄像元件4的光接收部5和玻璃基板9上的分色滤光器1设置在粘贴夹具上，使得它们彼此面对。 然后在元件4的光接收部分5的中心部分放置紫外线硬化型粘结剂8.此后，使元件4和滤光器1接近20微米，并且它们的位置对准。 元件4被压缩到过滤器1.在这种状态下，从过滤器1侧的超级高压汞灯（紫外线的照度为30mW / cm 2以上）内置于粘贴装置中而发出紫外线 在整个表面上几秒钟。 因此，过滤器1和元件4被暂时固定。 此后，取出临时固定的元件4，将过滤器1设定为面对主硬化装置。 紫外线以5mW / cm 2以下的照度发射数十分钟，粘结剂8永久硬化。

公开(公告)号：JPS6138537A

公开(公告)日：1986-02-24

申请号：JP16127484

申请日：1984-07-31

Applicant: Canon Inc

Inventor： OGURA YASUTSUGU

IPC: G01M11/00 ,  G01N21/84 ,  G01N21/88 ,  G01N21/94 ,  G01N21/958

CPC classification number: G01N21/88

Abstract: PURPOSE:To detect a defective part of color filters arranged with fine color elements by disposing color filter elements at slight intervals on a solid stage image pickup element and irradiating 3-color light; red, green and blue. CONSTITUTION:A stage on which a filter 1 to be inspected moves the filter 1 to be first inspected near to the prescribed position by the X-axis feed servocontrol 10a and Y-axis feed servocontrol 10b of a driving system B then the filter 1 is again moved on the image screen of a microscopic monitor for positioning and is thus placed to the prescribed position. The space between the filter 1 and the solid state image pickup element 2 is then adjusted by the Z-axis feed servocontrol 10c. The three-color light, red, green and blue are successively irradiated via mirrors 7a-7d while the filters of the color filter elements for the solid state image pickup element arranged with the fine color elements are disposed at slight spaces on the element 2. The defective part of the filters 1 is easily detected from the output signal of the element 2.

Abstract translation: 目的：通过在实体平面图像拾取元件上放置滤色器元件并照射3色光，来检测排列有精细色彩元素的彩色滤光片的有缺陷的部分; 红色，绿色和蓝色。 构成：通过驱动系统B的X轴进给伺服控制10a和Y轴进给伺服控制部10b，要检查的过滤器1将要首先检查的过滤器1移动到规定位置附近的阶段，则过滤器1为 再次在微观监视器的图像屏幕上移动以进行定位，并因此被放置到规定位置。 然后通过Z轴进给伺服控制10c调节过滤器1和固态图像拾取元件2之间的空间。 通过反射镜7a-7d连续照射三色光，红色，绿色和蓝色，而用于配置有细色元件的固态摄像元件的滤色器元件的滤光片在元件2上设置在微小的空间。 滤波器1的有缺陷的部分可以容易地从元件2的输出信号检测。

公开(公告)号：JPS59104162A

公开(公告)日：1984-06-15

申请号：JP21371982

申请日：1982-12-06

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: G02B5/20 ,  H01L27/14 ,  H01L31/0216

CPC classification number: H01L31/02162

Abstract: PURPOSE:To stabilize the quality by setting the thickness of an adhesive layer to a desired value by utilizing an irregular pattern for controlling the thickness of the layer formed on the surface of a solid state image sensor, thereby providing excellent image resolution. CONSTITUTION:A photoreceptor 6 of a solid stage image pick-up element 5 and the filter surface of a color separating film 1 are opposed and set to a bonding jig. Then, an ultraviolet ray curable adhesive is dropped in approx. 0.1cc on the center of the photoreceptor 6. Then, the element 5 and the film 1 are approached in approx. 20mum, obseved by a microscope for the bondin unit by both alignment marks, and the alignment is performed. Then, they are further approached. At this time, they are approached by obseving the irregular pattern 10, 11 formed around the alignment mark and the mark 9 in the microscope. The thickness of the adhesive is set by stopping approaching the element to the filter when the focus is matched to the mark 9.

Abstract translation: 目的：为了通过利用用于控制形成在固态图像传感器的表面上的层的厚度的不规则图案将粘合剂层的厚度设定为期望值来稳定质量，从而提供优异的图像分辨率。 构成：将固体摄像元件5的感光体6和分色膜1的滤色器面相对并设置于接合夹具。 然后，将紫外线固化型粘合剂 在感光体6的中心上为0.1cc。然后，元件5和胶片1接近近似。 通过两个对准标记由显微镜观察到结合单元，并且进行对准。 然后，他们进一步接近。 此时，通过在显微镜中观察在对准标记周围形成的不规则图案10,11和标记9来接近它们。 当聚焦与标记9匹配时，粘合剂的厚度通过停止接近元件到达滤光器来设定。

公开(公告)号：JPS5944007A

公开(公告)日：1984-03-12

申请号：JP15544582

申请日：1982-09-07

Applicant: Canon Inc

Inventor： OGURA YASUTSUGU ,  IIJIMA SHIGEJI ,  KAMIO MASARU

IPC: G03G15/01 ,  G02B5/20 ,  G02F1/1335 ,  H01L27/14 ,  H01L31/0216 ,  H04N9/07

CPC classification number: H01L31/02162

Abstract: PURPOSE:To adhere a color separation filter to a substrate uniformly without being affected by the local difference of UV transmittance, by forming the color separation filter on an adhesive layer bonded to the substrate, irradiating it to harden a part of it, and hardening all the adhesive layer with heating. CONSTITUTION:The color separation filter is set, then, a solid-state image pickup element is set, and fixed by vacuum suction. A UV hardenable type adhesive is dropped with a dispenser, a solid-state image pickup element is moved to right under the filter. The filter and said element are registered with an alignment optical system. Spotted temporarily fixing windows are formed through the ineffective part of the filter, and UV rays are irradiated through a chromium mask only on those positions to fix them temporarily. The filter and the element are taken out and placed into an oven to harden the UV hardenable type adhesive with heating, thus limiting hardening by UV rays to only one part of the adhesive layer, and not leaving the effect of the UV irradiation hysteresis.

Abstract translation: 目的：通过在与基板接合的粘合剂层上形成分色过滤器，照射其来使其一部分硬化，并将其全部硬化，将均匀的粘着分离过滤器均匀地粘附到基板上而不受局部UV透射率的影响 粘合层加热。 构成：设置分色滤光片，然后固定固体摄像元件，并通过真空抽吸固定。 用分配器落下UV可硬化型粘合剂，将固态图像拾取元件移动到过滤器的正下方。 过滤器和所述元件与对准光学系统配准。 通过过滤器的无效部分形成发现的临时固定窗，并且仅通过铬掩模将紫外线照射到那些位置以暂时固定。 过滤器和元件被取出并放置在烘箱中以加热UV硬化型粘合剂，从而限制仅通过UV粘合层的一部分硬化，而不会留下UV照射滞后的影响。

公开(公告)号：JPS5940566A

公开(公告)日：1984-03-06

申请号：JP15052182

申请日：1982-08-30

Applicant: Canon Inc

Inventor： KAMIO MASARU ,  IIJIMA SHIGEJI ,  YOSHIHARA SATOSHI ,  OGURA YASUTSUGU

IPC: H04N9/07 ,  H01L27/14 ,  H01L31/0203 ,  H01L31/0216

CPC classification number: H01L31/02162 ,  H01L31/0203 ,  H01L2224/05554 ,  H01L2224/48091 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/00014

Abstract: PURPOSE:To avoid the adhesion of adhesive to the bonding part by a method wherein a recess is formed in an element or an element package, and excess adhesive is contained therein, when a color decomposing filter is adhered on a solid-state image pick-up element. CONSTITUTION:The solid-state image pick-up element 2 is contained in the bottom surface of the recess provided in the package 4, the color decomposing filter 1 is adhered on the surface thereof. Next, bonding pads 6 and 9 provided respectively on the element 2 and the package 4 are connected each other by means of metallic fine wires 5. In this constitution, recesses 7 and 8 are bored in the surface of the element 2 and at the bottom surface respectively by being positioned on both sides of the filter 1, the excess adhesive 3 of expanded adhesive 3 is contained into the recesses 7 and 8 when the filter 1 is fixed on the element 2 by dripping the photo setting type adhesive 3. Thereafter, the adhesive 3 is hardened by the irradiation of ultraviolet rays. In this manner, the excess adhesive 3 does not deposit on the pads 6 and 9.

Abstract translation: 目的：为了通过在元件或元件封装中形成凹部的方法避免粘合剂粘合到粘合部分上，并且当将颜色分解过滤器粘附在固态图像拾取器上时， up元素。 构成：固体摄像元件2包含在设置在封装4中的凹部的底面中，分色滤光器1粘附在其表面上。 接下来，分别设置在元件2和封装4上的接合焊盘6和9通过金属细线5彼此连接。在该结构中，凹部7和8在元件2的表面和底部 表面分别通过定位在过滤器1的两侧，当过滤器1通过滴落光固化型粘合剂3固定在元件2上时，膨胀粘合剂3的多余粘合剂3被包含在凹部7和8中。此后， 粘合剂3通过紫外线的照射而硬化。 以这种方式，多余的粘合剂3不会沉积在垫6和9上。