公开(公告)号：JPS60195543A

公开(公告)日：1985-10-04

申请号：JP5122384

申请日：1984-03-19

Applicant: Canon Inc

Inventor： OGURA YASUTSUGU ,  IIJIMA SHIGEJI ,  KASAMORI EIZOU ,  KAMIO MASARU

IPC: G03C5/00 ,  G03F7/26

CPC classification number: G03F1/56

Abstract: PURPOSE:To form a pattern made of a colored layer having a desired shape on a substrate with good precision and good yield without causing cracking, peeling, etc., by imparting strength enough to withstand each patterning step and intimate adhesion to the substrate, to the colored layer contg., a coloring dye. CONSTITUTION:A positive type resist is laminated on a substrate 1 made of glass or resin or the like, exposed to light through a photomask 3 having a prescribed pattern, and developed with a developing soln. to obtain a resist pattern 2a for the lift-off method. A dye is laminated to form a dye layer 4. As the dye to be used for this dye layer 4, pigments, such as phthalocyanine type, naphthol type, and indanthrene type, and dyes, such as oil-soluble type and dispersion type, are enumerated, and a thickness of this layer 4 is properly selected in accordance with the uses of the colored patterns. The substrate 1 having such a dye layer 5 laminated is treated by the method of immersion in a photoresist-removing soln., or the like, and the photoresist layer 2 and the colored layer 5a formed on the layer 2 are removed together from the substrate 1, thus forming a colored pattern made of a colored layer 5b having a desired shape.

Abstract translation: 目的：通过赋予足够的强度以抵抗每个图案化步骤和对基材的紧密粘附，在基材上形成具有期望形状的着色层的图案，具有良好的精度和良好的收率而不引起开裂，剥离等， 着色层，着色染料。 构成：将正型抗蚀剂层压在由玻璃或树脂等制成的基板1上，通过具有规定图案的光掩模3曝光并用显影剂溶胶显影。 以获得用于剥离方法的抗蚀剂图案2a。 将染料层压以形成染料层4.作为用于该染料层4的染料，可以使用酞菁型，萘酚型，阴丹酮型等颜料，以及油溶性型和分散型等染料， 并且根据着色图案的用途适当地选择该层4的厚度。 通过浸渍在光致抗蚀剂去除溶剂等中的方法处理层叠有这种染料层5的基板1，并且从基板一起去除光致抗蚀剂层2和形成在层2上的着色层5a 从而形成由具有期望形状的着色层5b制成的着色图案。