Metallocene catalyst for producing polyolefins

    公开(公告)号:GB2305178A

    公开(公告)日:1997-04-02

    申请号:GB9618794

    申请日:1996-09-09

    Applicant: DAICEL CHEM

    Abstract: A catalyst for producing a poly-* small Greek alpha *-olefin which comprises a metallocene compound containing an element of group IVA bonded to an organic polymer containing an element of group IVB; and a process for producing a poly-* small Greek alpha *-olefin which comprises polymerizing an * small Greek alpha *-olefin in the presence of the above-described catalyst and also a specified aluminoxane as a co-catalyst. The catalyst comprises a polysiloxane having pendent groups selected from cyclopentadiene, fluorene and indene linked to a transition metal halide such as zirconium chloride. The catalyst is prepared by reacting R 2 Si(Hal) 2 where R is cyclopentadienyl, fluorenyl or indenyl with water followed by addition of butyllithium and a transition metal halide.

    Method for preparing resin composition for photoresist
    5.
    发明专利
    Method for preparing resin composition for photoresist 有权
    制备光催化剂树脂组合物的方法

    公开(公告)号:JP2009155661A

    公开(公告)日:2009-07-16

    申请号:JP2009099545

    申请日:2009-04-16

    Abstract: PROBLEM TO BE SOLVED: To provide a method for preparing a resin composition for photoresist which is improved in alkali solubility without deteriorating adhesion to a substrate and dry etching resistance. SOLUTION: The method for preparing the resin composition for photoresist includes a step wherein a monomer mixture M Y including ≥61 mol% of a monomer corresponding to a repeating unit A2 which has an alicyclic skeleton and becomes alkali-soluble by the action of an acid to a mixed solution containing a polymer X containing 1 to Y (weight ratio) 75/25 to 99/1, and polymerization is conducted. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 解决问题:提供一种制备光致抗蚀剂用树脂组合物的方法,该方法在不降低与基材的粘合性和耐干蚀刻性的情况下提高碱溶解性。 解决方案:制备光致抗蚀剂树脂组合物的方法包括以下步骤:其中包含≥61mol%具有脂环族骨架的重复单元A2对应的单体的单体混合物M Y, 通过酸的作用将其溶解成含有含有1〜61重量%的重复单元A1的聚合物X的混合溶液,该重复单元A1通过酸的作用变成碱溶性,并含有重复单元B,该重复单元B具有 极性基和脂环族骨架,其量使得聚合物X /单体混合物M(SP)Y(重量比)75/25至99/1,并进行聚合。 版权所有(C)2009,JPO&INPIT

    Polymer compound for photoresist, and photoresist composition
    6.
    发明专利
    Polymer compound for photoresist, and photoresist composition 有权
    光聚合物聚合物化合物和光电组合物

    公开(公告)号:JP2009091395A

    公开(公告)日:2009-04-30

    申请号:JP2007260612

    申请日:2007-10-04

    Abstract: PROBLEM TO BE SOLVED: To provide a resin which has good solubility to organic solvent when applied for a resin for resist and exhibits high etching resistance, a resist composition, and a semiconductor manufacturing method.
    SOLUTION: This polymer compound for photoresist has a monomer unit expressed by a formula (1). The polymer compound is polymerized while adding monomer solution and polymerization initiator solution to the solvent controlled at the polymerization temperature.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种当应用于抗蚀剂用树脂和表现出高耐腐蚀性的树脂时,对有机溶剂具有良好的溶解性,抗蚀剂组合物和半导体制造方法。 解决方案:该光致抗蚀剂用高分子化合物具有由式(1)表示的单体单元。 将聚合物化合物在将单体溶液和聚合引发剂溶液加入到在聚合温度下控制的溶剂中进行聚合。 版权所有(C)2009,JPO&INPIT

    POLYOLEFIN COPOLYMER AND METHOD FOR PRODUCING THE SAME

    公开(公告)号:JP2002179730A

    公开(公告)日:2002-06-26

    申请号:JP2000378751

    申请日:2000-12-13

    Applicant: DAICEL CHEM

    Inventor: ARAI TAKASHI

    Abstract: PROBLEM TO BE SOLVED: To obtain a polyolefin copolymer by introducing a high boiling point polymerizable compound into a poly-α-olefin to improve the properties of the polymer. SOLUTION: This poly-α-olefin copolymer has a repeating unit containing an alicyclic hydrocarbon or an aromatic hydrocarbon in the side chain. The method for producing a poly-α-olefin copolymer having a repeating unit containing an alicyclic hydrocarbon or an aromatic hydrocarbon in the side chain comprises copolymerizing an α-olefin with a polymerizable compound containing an alicyclic hydrocarbon or an aromatic hydrocarbon in the side chain in the presence of a compound expressed by the formula (1), R2R3MX2 (where R2 and R3 each represents a compound having a cyclopentadienyl ring and may be linked via a bi-valent hydrocarbon; M denotes a transition metal; and X denotes a halogen atom) and an auxiliary catalyst.

    POLYMERIC COMPOUND FOR PHOTORESIST AND PHOTORESIST COMPOSITION

    公开(公告)号:JP2002020424A

    公开(公告)日:2002-01-23

    申请号:JP2000209287

    申请日:2000-07-11

    Applicant: DAICEL CHEM

    Inventor: ARAI TAKASHI

    Abstract: PROBLEM TO BE SOLVED: To obtain a polymeric compound for photoresist excellent in resist properties such as alkali solubility and adhesion to a substrate, especially, excellent in adhesion to a substrate. SOLUTION: The photoresist polymeric compound comprises a vinyl polymer obtained by a polymerization reaction using a polymerization initiator containing an oxygen-containing group or a substituted or unsubstituted amino group in the molecule. The polymerization initiator used is exemplified by an azoic radical polymerization initiator. Examples of the oxygen-containing groups include hydroxyl, carboxyl, substituted oxy, substituted oxycarbonyl, acyls, substituted or unsubstituted carbamoyl, hydroxyimino, substituted oxyimino, and nitro. The vinyl polymer is exemplified by a homo- or co-polymer of a (meth)acrylic monomer, or a copolymer of a (meth)acrylic monomer with other monomers.

    PREPARATION OF RUBBER-MODIFIED STYRENIC RESIN

    公开(公告)号:JP2000256430A

    公开(公告)日:2000-09-19

    申请号:JP5997599

    申请日:1999-03-08

    Applicant: DAICEL CHEM

    Abstract: PROBLEM TO BE SOLVED: To prepare a rubber-modified styrenic resin having a high impact resistance. SOLUTION: The preparation process uses a continuous reaction apparatus which is successively equipped with three complete-mixing type reactors and one tower type reactor. The process comprises a step wherein the whole amount of styrenic monomers used for preparing a rubber-modified styrenic monomer is divided into three batches at a desired ratio, and then the first batch of styrene monomers and the whole amount of rubbers, which make 100 wt.% in total, are introduced into a first reactor and subjected to initial polymerization, a step wherein a polymerized liquid obtained in the first reactor and the next batch of styrenic monomers are introduced into a second reactor and polymerized under stirring until a rubber phase inversion occurs to yield a rubbery polymer as dispersed particles, and a step wherein a polymerized liquid obtained in the second reactor and the last batch of styrenic monomers are continuously introduced into a third reactor to increase the polymerization conversion rate.

    PROCESS AND CATALYST FOR PRODUCING POLYOLEFIN

    公开(公告)号:JPH10292007A

    公开(公告)日:1998-11-04

    申请号:JP10306497

    申请日:1997-04-21

    Applicant: DAICEL CHEM

    Abstract: PROBLEM TO BE SOLVED: To obtain a catalyst for the production of a poly-α-olefin having a low atactic component and highly stereoregular isotactic component by impregnating a magnesium halide with an organometallic compound and forming only a recemic modification structure of a zirconium metallocene compound on its surface. SOLUTION: The organometallic compound used is a compound of formula I (wherein R and R are each an organic liquid such as cyclopentadienyl, indenyl, fluorenyl or a derivative thereof; M is a group IVB transition metal; and X is a halogen). This is reacted with a halide of a group IVA metal (M ) to obtain a compound represented by formula II (wherein M is an element typified by a group IVB element; R and R are each as defined in formula I; M is a group IVA transition metal element; and X and X are each a halogen). A magnesium halide is impregnated with the organometallic compound of formula II to obtain a catalyst for the production of a poly-α-olefin. This is combined with a promoter such as a water-modified organoaluminum compound of a trialkylaluminum compound of formula IV (wherein R is a 1-10C alkyl).

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