公开(公告)号：DE10205280C1

公开(公告)日：2003-07-03

申请号：DE10205280

申请日：2002-02-07

Applicant: DEGUSSA

Inventor： LORTZ WOLFGANG ,  PERLET GABRIELE ,  BATZ-SOHN CRISTOPH ,  WILL WERNER

IPC: B24B37/00 ,  C01B33/18 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/3105 ,  C09G1/04

Abstract: In aqueous dispersion for chemical-mechanical polishing of oxide surfaces, containing a powder of pyrogenic silica doped with alumina by means of an aerosol, the powder contains 0.01-3, preferably 0.2-1.5 weight percent (wt.%) alumina and the average particle diameter of the dispersion is not more than 0.1 microns. An Independent claim is also included for production of the dispersion by dispersing the doped silica in an aqueous medium with an energy input of not less than 200 kJ/m3.