公开(公告)号：EP1340985A1

公开(公告)日：2003-09-03

申请号：EP03075312.3

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01P15/0888

Abstract: A balanced angular accelerometer (10;110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34).

Abstract translation: 提供一种平衡角加速度计（10; 110），具有基片（60），具有多个固定电容板（24）的固定电极（20A）和具有中心孔（13）的旋转惯性质量块（12） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。

公开(公告)号：EP1340984B1

公开(公告)日：2009-06-17

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

公开(公告)号：EP1340984A3

公开(公告)日：2005-12-28

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

公开(公告)号：EP1340984A2

公开(公告)日：2003-09-03

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

Abstract translation: 提供了具有基板（60），具有多个固定电容板（24）的固定电极（20A）和具有中心开口（13）的旋转惯性质量块（12）的平衡角加速度计（10或110） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。 根据另一实施例，一个或多个切口孔（150）形成在惯性质量块（112）中以补偿通道（141）和信号线（140），以平衡围绕中心的惯性质量（112） 的惯性质量（112）。