公开(公告)号：EP2083246A1

公开(公告)日：2009-07-29

申请号：EP09150251.8

申请日：2009-01-08

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Christenson, John C. ,  Chilcott, Dan W. ,  Forestal, Richard G. ,  Johnson, Jack D.

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A motion sensor in the form of an angular rate sensor (10) and a method of making a sensor are provided and includes a support substrate (12) and a silicon sensing ring (14) supported by the substrate and having a flexural resonance.
Drive electrodes (20A) apply electrostatic force on the ring (14) to cause the ring to resonate. Sensing electrodes (20B) sense a change in capacitance indicative of vibration modes of resonance of the ring (14) so as to sense motion. A plurality of silicon support rings (16) connect the substrate (12) to the ring (14). The support springs (16) have portions (B1 and B2) are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5° and 67.5°, with respect to the crystalline orientation of the silicon. Also disclosed is a method of making a silicon integrated sensor.

Abstract translation: 提供角速率传感器（10）形式的运动传感器和制造传感器的方法，并且包括支撑衬底（12）和由衬底支撑并且具有弯曲共振的硅感测环（14）。 驱动电极（20A）在环（14）上施加静电力使环产生共振。 感测电极（20B）感测指示环（14）的谐振的振动模式的电容的变化，以便感测运动。 多个硅支撑环（16）将衬底（12）连接到环（14）。 支撑弹簧（16）具有部分（B1和B2）相对于硅的结晶取向以与硅的弹性模量（例如约22.5°和67.5°）基本匹配的角度定位。 还公开了制造硅集成传感器的方法。

公开(公告)号：EP1340985A1

公开(公告)日：2003-09-03

申请号：EP03075312.3

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01P15/0888

Abstract: A balanced angular accelerometer (10;110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34).

Abstract translation: 提供一种平衡角加速度计（10; 110），具有基片（60），具有多个固定电容板（24）的固定电极（20A）和具有中心孔（13）的旋转惯性质量块（12） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。

公开(公告)号：EP1055908A1

公开(公告)日：2000-11-29

申请号：EP00201452.0

申请日：2000-04-21

Applicant: Delphi Technologies, Inc.

Inventor： Johnson, Jack D. ,  Zarabadi, Seyed R.

IPC: G01C19/56

CPC classification number: G01C19/5684

Abstract: A motion sensor (10) includes a micromachined sensing structure and a number of capacitive electrodes (20) disposed about a periphery thereof. The sensing structure includes a ring (14) supported above a substrate (12) so as to have an axis of rotation normal to the substrate (12), and a number of springs (16) attached to a post (18) positioned at the center of the ring (14). Certain diametrically opposed ones of the capacitive electrodes (20) are configured as drive electrodes (20a), and other diametrically opposed ones of the capacitive electrodes (20), positioned 90 degrees relative to the corresponding drive electrodes (20a) are configured as sense electrodes (20b). Signals produced at the opposed sense electrodes (20b) are conditioned and coupled to a common input of an amplifier circuit (64,70). With the configuration of the drive (20a) and sense (20b) electrodes and supporting circuitry (60-70), the resulting sensor (10) is operable to reject the effects of linear forces thereupon due to road vibrational effects.

Abstract translation: 运动传感器（10）包括微加工感测结构和围绕其外围设置的多个电容电极（20）。 感测结构包括支撑在衬底（12）上方以便具有垂直于衬底（12）的旋转轴的环（14），以及附接到位于衬底（12）上的柱（18）的多个弹簧（16） 环的中心（14）。 电容性电极（20）中的某些径向相对的电极被配置为驱动电极（20a），并且相对于相应的驱动电极（20a）定位90度的电容性电极（20）中的其它径向相对的电容性电极被配置为感测电极 （20B）。 在相对的传感电极（20b）处产生的信号被调节并耦合到放大器电路（64,70）的公共输入端。 利用驱动器（20a）和感测（20b）电极和支撑电路（60-70）的配置，所得到的传感器（10）可操作以由于道路振动效应而拒绝线性力的影响。

公开(公告)号：EP1340984B1

公开(公告)日：2009-06-17

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

公开(公告)号：EP1659383A2

公开(公告)日：2006-05-24

申请号：EP05077587.3

申请日：2005-11-11

Applicant: Delphi Technologies, Inc.

Inventor： Johnson, Jack D. ,  Zarabadi, Seyed R. ,  Jay, Ian D.

IPC: G01L1/14

CPC classification number: G01L1/142 ,  G01L1/144

Abstract: A strain gauge (10) for sensing strain is provided and includes a support substrate (40), and first and second electrodes (20A and 12) supported on the substrate (40). The first and second electrodes (20A and 12) include first and second capacitive plates (24 and 14), respectively. The first capacitive plates (24) are movable relative to the second capacitive plates (14) responsive to strain. The strain gauge (10) further has an input (26) electrically coupled to one of the first and second electrodes (20A and 12) for receiving an input signal (CLK), and an output (30) electrically coupled to the other of the first and second electrodes (20A and 12) for providing an output signal (V oi ) which varies as a function of the capacitive coupling and is indicative of sensed strain.

Abstract translation: 提供了用于感测应变的应变仪（10），并包括支撑衬底（40）以及支撑在衬底（40）上的第一和第二电极（20A和12）。 第一和第二电极（20A和12）分别包括第一和第二电容板（24和14）。 响应于应变，第一电容板（24）可相对于第二电容板（14）移动。 应变仪（10）还具有电耦合到第一和第二电极（20A和12）中的一个用于接收输入信号（CLK）的输入端（26），以及输出端（30），电连接到另一个 第一和第二电极（20A和12），用于提供作为电容耦合的函数而变化的输出信号（V oi），并且指示感测的应变。

公开(公告)号：EP1340984A3

公开(公告)日：2005-12-28

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

公开(公告)号：EP1340984A2

公开(公告)日：2003-09-03

申请号：EP03075310.7

申请日：2003-02-03

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Jay, Ian D. ,  Johnson, Jack D. ,  Christenson, John C. ,  Noll, Tracy A.

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0888 ,  G01P15/125

Abstract: A balanced angular accelerometer (10 or 110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34). According to another embodiment, one or more cut out apertures (150) are formed in the inertia mass (112) to compensate for a channel (141) and signal line (140) so as to balance the inertia mass (112) about the center of the inertia mass (112).

Abstract translation: 提供了具有基板（60），具有多个固定电容板（24）的固定电极（20A）和具有中心开口（13）的旋转惯性质量块（12）的平衡角加速度计（10或110） 并且基本上悬挂在空腔（34）上并且包括多个可移动电容板（14），其布置成提供与第一多个固定电容板（24）的电容耦合。 加速度计（10）具有中心构件（15）和固定到基底（60）的外部构件（18）。 根据一个实施例，多个内支撑臂（16A-16D）在中心构件（15）和惯性块（12）之间延伸，并且多个外支撑臂（40A-40D）在惯性块 ）和外部构件（18）以将质量块（12）支撑在空腔（34）上方。 根据另一实施例，一个或多个切口孔（150）形成在惯性质量块（112）中以补偿通道（141）和信号线（140），以平衡围绕中心的惯性质量（112） 的惯性质量（112）。

公开(公告)号：EP1659383A3

公开(公告)日：2012-01-25

申请号：EP05077587.3

申请日：2005-11-11

Applicant: Delphi Technologies, Inc.

Inventor： Johnson, Jack D. ,  Zarabadi, Seyed R. ,  Jay, Ian D.

IPC: G01L1/14

CPC classification number: G01L1/142 ,  G01L1/144

Abstract: A strain gauge (10) for sensing strain is provided and includes a support substrate (40), and first and second electrodes (20A and 12) supported on the substrate (40). The first and second electrodes (20A and 12) include first and second capacitive plates (24 and 14), respectively. The first capacitive plates (24) are movable relative to the second capacitive plates (14) responsive to strain. The strain gauge (10) further has an input (26) electrically coupled to one of the first and second electrodes (20A and 12) for receiving an input signal (CLK), and an output (30) electrically coupled to the other of the first and second electrodes (20A and 12) for providing an output signal (V oi ) which varies as a function of the capacitive coupling and is indicative of sensed strain.

公开(公告)号：EP2083246B1

公开(公告)日：2011-07-06

申请号：EP09150251.8

申请日：2009-01-08

Applicant: Delphi Technologies, Inc.

Inventor： Zarabadi, Seyed R. ,  Christenson, John C. ,  Chilcott, Dan W. ,  Forestal, Richard G. ,  Johnson, Jack D.

IPC: G01C19/56

CPC classification number: G01C19/5684