Abstract:
A high-frequency Electromagnetic Bandgap (EBG) motion sensor device (70), and a method (100) for making such a device (70) are provided. The device (70) includes a substantially planar substrate (72) including multiple conducting vias (76) forming a periodic lattice in the substrate (72). The vias (76) extend from the lower surface of the substrate (72) to the upper surface of the substrate (72). The device (70) also includes a movable defect (83) positioned in the periodic lattice. The movable defect (83) is configured to move relative to the plurality of vias (76). A resonant frequency of the EBG motion sensor device (70) varies based on movement of the movable defect (83).