公开(公告)号：KR20200124780A

公开(公告)日：2020-11-03

申请号：KR20207030995

申请日：2013-05-31

Applicant: ENTEGRIS INC

Inventor： HENDRIX BRYAN C ,  GREGG JOHN N ,  BATTLE SCOTT L ,  NAITO DONN K ,  BARTOSH KYLE ,  CLEARY JOHN M ,  CHEON SEBUM ,  HODGES JORDAN

IPC: C23C16/44 ,  C23C16/458

Abstract: 시스템, 시약지지체트레이, 입자억제장치, 및방법이개시되어있다. 하나의양태에서, 시스템은내부용적부를둘러싸는하나이상의내부벽을갖는기화기용기, 및상기내부용적부내부에수직으로적층가능하도록구성된복수의시약지지체트레이를포함한다. 복수의시약지지체트레이각각은내부용적부내에수직으로적층가능하여시약지지체트레이의스택을형성하도록구성된다. 복수의시약지지체트레이중 하나이상은, 시약지지체트레이의스택내 인접한시약지지체트레이들사이를통과하는가스유동의방향을바꿔서, 가스의유동이특정시약지지체트레이내의소스시약물질과, 시약지지체트레이의스택내 복수의시약지지체트레이중 다음트레이로통과하기이전에상호작용하도록구성된다.

公开(公告)号：SG11201501002QA

公开(公告)日：2015-04-29

申请号：SG11201501002Q

申请日：2013-08-07

Applicant: ENTEGRIS INC

Inventor： NAITO DONN K ,  KRELL ANDY ,  MCFERON MITCHELL W ,  JACKSON STEVEN ,  ROBISON JOEL

IPC: H01L21/02

公开(公告)号：SG10201700892QA

公开(公告)日：2017-04-27

申请号：SG10201700892Q

申请日：2013-08-07

Applicant: ENTEGRIS INC

Inventor： NAITO DONN K ,  KRELL ANDY ,  MCFERON MITCHELL W ,  JACKSON STEVEN ,  ROBISON JOEL

公开(公告)号：EP2855730A4

公开(公告)日：2016-01-27

申请号：EP13796903

申请日：2013-05-31

Applicant: ENTEGRIS INC

Inventor： HENDRIX BRYAN C ,  GREGG JOHN N ,  BATTLE SCOTT L ,  NAITO DONN K ,  BARTOSH KYLE ,  CLEARY JOHN M ,  CHEON SEBUM ,  HODGES JORDAN

IPC: C23C16/44 ,  B01B1/00 ,  C23C16/458

CPC classification number: C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

公开(公告)号：EP2883238A4

公开(公告)日：2016-03-16

申请号：EP13828292

申请日：2013-08-07

Applicant: ENTEGRIS INC

Inventor： NAITO DONN K ,  KRELL ANDY ,  MCFERON MITCHELL W ,  JACKSON STEVEN ,  ROBISON JOEL

IPC: H01L21/02 ,  B01J4/00 ,  B01J19/02 ,  B65D25/14 ,  B65D25/38 ,  B65D43/02 ,  B65D85/00 ,  H01L21/67

CPC classification number: B65D25/14 ,  B01J4/00 ,  B01J19/02 ,  B01J2219/0245 ,  B65D25/38 ,  B65D43/02 ,  B65D85/70 ,  H01L21/67023