公开(公告)号：US20140295588A1

公开(公告)日：2014-10-02

申请号：US14196708

申请日：2014-03-04

Applicant: EPISTAR CORPORATION

Inventor： Yi-Ming CHEN ,  Tzu-Chieh HSU ,  Chi-Hsing CHEN ,  Hsin-Ying WANG

IPC: H01L33/00 ,  H01L21/02

CPC classification number: H01L33/005 ,  H01L21/02436 ,  H01L21/02664 ,  H01L33/0079

Abstract: A method of forming a light-emitting diode includes: providing a substrate having one or more first openings passing through the substrate; forming a sacrificial layer on the substrate; forming an epitaxial layer on the sacrificial layer; connecting a supporting substrate with the epitaxial layer; and separating the substrate from the epitaxial layer by selectively etching the sacrificial layer.

Abstract translation: 形成发光二极管的方法包括：提供具有穿过基板的一个或多个第一开口的基板; 在所述基板上形成牺牲层; 在牺牲层上形成外延层; 将支撑衬底与所述外延层连接; 以及通过选择性蚀刻牺牲层将衬底与外延层分离。