公开(公告)号：US10890553B2

公开(公告)日：2021-01-12

申请号：US15804455

申请日：2017-11-06

Applicant: EPISTAR CORPORATION

Inventor： Kunal Kashyap ,  Kun-Wei Kao ,  Yih-Hua Renn ,  Meng-Lun Tsai ,  Zong-Xi Chen ,  Hsin-Mao Liu ,  Jui-Hung Yeh ,  Hung-Chi Wang

IPC: G01N27/414 ,  H01L29/778 ,  H01L23/34 ,  G01N27/02 ,  H01L29/20 ,  H01L29/205 ,  H01L29/10 ,  H01L23/31

Abstract: A sensing device includes a first III-V compound stack and a second III-V compound stack. The first III-V compound stack has a first sensing area, and the second III-V compound stack has a second sensing area. A passivation layer fully covers the second sensing area. The first III-V compound stack is physically separated from the second III-V compound stack, and has material compositions and structures same as the second III-V compound stack.