公开(公告)号：CA2115605A1

公开(公告)日：1994-08-27

申请号：CA2115605

申请日：1994-02-14

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A ,  COLBY DAVID H

IPC: G03F7/20 ,  G21K5/04 ,  H01J37/04 ,  H01J37/09 ,  H01J37/305 ,  H01L21/027 ,  H05H15/00

Abstract: Spurious electrodynamic effects are reduced or eliminated by the use of a mechanically compact, low capacitance, geometrically symmetric, differentially-driven blanker assembly. This eliminates the need for internal cables or SMA-type launchers and has a solid metal electromechanical contact to system ground.

公开(公告)号：DE69202782T2

公开(公告)日：1995-10-12

申请号：DE69202782

申请日：1992-02-24

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A

IPC: H01J3/02 ,  H01J37/073 ,  H01J37/08 ,  H01J37/12 ,  H01J37/305 ,  H01L21/027

Abstract: A field emission source is used in conjunction with a three element asymmetric lens system to provide an electron gun having greater magnitude beam currents focused on a smaller spot size than has been previously possible for intermediate energy beams. The three element asymmetric lens system has a lower spherical aberration than prior art electrostatic guns and a very low chromatic aberration coefficient, enabling precise focusing of beams with large currents and energy spreads. The electron gun produces high current densities in beams focused on small spot areas, despite the relatively large acceptance angle and energy spread of the source beams.

公开(公告)号：CA2086976A1

公开(公告)日：1993-07-25

申请号：CA2086976

申请日：1993-01-08

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A ,  DEBRA DANIEL B

IPC: H01J37/12 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08 ,  H01J37/15 ,  H01L21/027 ,  H01J3/38

Abstract: MECHANICALLY STABLE FIELD EMISSION GUN Mark A. Gesley Daniel B. DeBra An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.

公开(公告)号：CA2084110C

公开(公告)日：1998-11-24

申请号：CA2084110

申请日：1992-11-30

Applicant: ETEC SYSTEMS INC

Inventor： HOWARD GLEN E ,  GESLEY MARK A

IPC: H01J37/06 ,  H01J37/08 ,  H01J37/24 ,  H01J37/248 ,  H01J37/07

Abstract: An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.

公开(公告)号：DE69404695D1

公开(公告)日：1997-09-11

申请号：DE69404695

申请日：1994-02-24

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A ,  COLBY DAVID H

IPC: G03F7/20 ,  G21K5/04 ,  H01J37/04 ,  H01J37/09 ,  H01J37/305 ,  H01L21/027

Abstract: Spurious electrodynamic effects are reduced or eliminated by the use of a mechanically compact, low capacitance, geometrically symmetric, differentially-driven blanker assembly. This eliminates the need for internal cables or SMA-type launchers and has a solid metal electromechanical contact to system ground.

公开(公告)号：CA2084110A1

公开(公告)日：1993-07-04

申请号：CA2084110

申请日：1992-11-30

Applicant: ETEC SYSTEMS INC

Inventor： HOWARD GLEN E ,  GESLEY MARK A

IPC: H01J37/06 ,  H01J37/08 ,  H01J37/24 ,  H01J37/248 ,  H01J29/48

Abstract: An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.

公开(公告)号：CA2061160A1

公开(公告)日：1992-09-05

申请号：CA2061160

申请日：1992-02-13

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A

IPC: H01J3/02 ,  H01J37/073 ,  H01J37/08 ,  H01J37/12 ,  H01J37/305 ,  H01L21/027 ,  H01J29/56

Abstract: A field emission source is used in conjunction with a three element asymmetric lens system to provide an electron gun having greater magnitude beam currents focused on a smaller spot size than has been previously possible for intermediate energy beams. The three element asymmetric lens system has a lower spherical aberration than prior art electrostatic guns and a very low chromatic aberration coefficient, enabling precise focusing of beams with large currents and energy spreads. The electron gun produces high current densities in beams focused on small spot areas, despite the relatively large acceptance angle and energy spread of the source beams.

公开(公告)号：DE69324386D1

公开(公告)日：1999-05-20

申请号：DE69324386

申请日：1993-01-18

Applicant: ETEC SYSTEMS INC

Inventor： GESLEY MARK A ,  DEBRA DANIEL B

IPC: H01J37/12 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08 ,  H01J37/15 ,  H01L21/027 ,  H01J3/02

Abstract: An improved electron or ion gun support structure includes a hollow cylinder (43) for rigidly connecting the source assembly to the source-motion ring (42), with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.

公开(公告)号：DE69218166T2

公开(公告)日：1997-06-19

申请号：DE69218166

申请日：1992-12-29

Applicant: ETEC SYSTEMS INC

Inventor： HOWARD GLEN E ,  GESLEY MARK A

IPC: H01J37/06 ,  H01J37/08 ,  H01J37/24 ,  H01J37/248

Abstract: An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.

公开(公告)号：DE69218166D1

公开(公告)日：1997-04-17

申请号：DE69218166

申请日：1992-12-29

Applicant: ETEC SYSTEMS INC

Inventor： HOWARD GLEN E ,  GESLEY MARK A

IPC: H01J37/06 ,  H01J37/08 ,  H01J37/24 ,  H01J37/248

Abstract: An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor includes a resistance and an inductor in series with each electrode lead providing voltage or current to the various electrodes of the electron gun. The inductance is provided by a ferrite toroid which contains a plurality of holes in addition to the main central hole. The leads for each electrode are wrapped around the toroid through the various holes, with one hole being provided for each lead. Thus advantageously each lead is isolated magnetically from the others, reducing the transformer and capacitive effects that couple one lead to another.